Detection device
A detection device includes a substrate, a plurality of photodiodes that are arranged in a detection region of the substrate, a plurality of first terminals that are arranged in a first direction in a peripheral region outside the detection region of the substrate, an insulating film that covers the first terminals, and an anisotropic conductive film that is located above the insulating film, and covers the first terminals.
1. A detection device comprising:
a substrate;
a plurality of photodiodes that are arranged in a detection region of the substrate;
a plurality of first terminals that are arranged in a first direction in a peripheral region outside the detection region of the substrate;
an insulating film that covers the first terminals; and
an anisotropic conductive film that is located above the insulating film, and covers the first terminals, wherein
each of the first terminals comprises, between the substrate and the insulating film:
a first metal layer;
a second metal layer that is stacked above the first metal layer with a first interlayer insulating film interposed between the first metal layer and the second metal layer;
a third metal layer that is stacked above the second metal layer so as to be in contact with the second metal layer; and
a first light-transmitting conductive layer that is stacked above the third metal layer so as to be in contact with the third metal layer,
the insulating film has an opening that exposes the first light-transmitting conductive layer in a region overlapping each of the first terminals, and
the anisotropic conductive film is in direct contact with a side surface of the insulating film forming the opening and with the first light-transmitting conductive layer overlapping the opening.
2. The detection device according to claim 1 , wherein the insulating film is provided so as to cover a periphery of the first light-transmitting conductive layer, and the opening is formed inside the periphery.
3. The detection device according to claim 1 , further comprising:
a plurality of scan lines that are provided in the detection region; and
a plurality of output signal lines that are provided in the detection region, and intersect the scan lines, wherein
the first metal layer is the same layer as that of the scan lines, and
the second metal layer is the same layer as that of the output signal lines.
4. The detection device according to claim 3 , further comprising a lower electrode and an upper electrode that are provided in the detection region, wherein
the lower electrode, each of the photodiodes, and the upper electrode are stacked in this order, and
the third metal layer is the same layer as that of the lower electrode.
5. The detection device according to claim 4 , further comprising an overlapping electrode provided so as to overlap the upper electrode, wherein the first light-transmitting conductive layer is the same layer as that of the upper electrode or the overlapping electrode.
6. The detection device according to claim 4 , further comprising, in the detection region, an inorganic insulating film that covers the upper electrode of the photodiode, and a coupling wiring coupled to the upper electrode through a contact hole formed in the inorganic insulating film, wherein
the inorganic insulating film is formed between the substrate and the insulating film, and
the first light-transmitting conductive layer is an electrode formed between the insulating film and the inorganic insulating film.
7. The detection device according to claim 5 , further comprising a second light-transmitting conductive layer that is stacked on the first light-transmitting conductive layer, wherein
the first light-transmitting conductive layer is the same layer as that of the upper electrode, and
the second light-transmitting conductive layer is the same layer as that of the overlapping electrode.
8. The detection device according to claim 1 , wherein a width in the first direction of the first metal layer is equal to a width in the first direction of the opening.
9. The detection device according to claim 4 , further comprising signal line coupling wiring that is electrically coupled to the output signal lines, and extends in a second direction intersecting the first direction, wherein the first metal layer is provided in the same layer as that of the signal line coupling wiring, is coupled to the signal line coupling wiring, and is electrically coupled to the second metal layer through a first contact portion provided through the first interlayer insulating film.
10. The detection device according to claim 1 , further comprising:
a drive circuit that is provided in the peripheral region; and
a plurality of second terminals that are provided adjacent in the first direction to the first terminals, and are electrically coupled to the drive circuit.
11. The detection device according to claim 10 , further comprising a second interlayer insulating film that is stacked between the first interlayer insulating film and the insulating film in a region between the adjacent second terminals.
12. The detection device according to claim 10 , further comprising outer edge wiring that is electrically coupled to each of at least more than one of the second terminals among the first terminals and the second terminals, and extends in a second direction intersecting the first direction between the second terminals and an outer periphery of the substrate.
13. The detection device according to claim 12 , wherein
the first interlayer insulating film extends in the second direction so as to cover the outer edge wiring, and
a plurality of convex portions in each of which the outer edge wiring and the first interlayer insulating film are stacked are arranged in the first direction.
14. The detection device according to claim 13 , wherein
the outer edge wiring is not coupled to the first terminals,
the detection device comprises:
a plurality of first convex portions that are provided in a region between the first terminals and the outer periphery of the substrate, and are formed of the first interlayer insulating film; and
a plurality of second convex portions that are provided in a region between the second terminals and the outer periphery of the substrate, and in each of which the outer edge wiring and the first interlayer insulating film covering the outer edge wiring are stacked, and
the first convex portions and the second convex portions are arranged in the first direction.