IP Library › Granted Patent US 12,187,906
Granted Patent B2
US 12,187,906 · App. 18/069,148 · Granted Jan 7, 2025

Variable refractive index thin films

Inventor: Alejo Lifschitz Arribio (Redmond, WA)
Assignee: Meta Platforms Technologies, LLC
C09D11/322C01G19/006C09D11/36G02B1/10G02B27/0172G02B2027/0178
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Quick Facts
Patent No.
US 12,187,906
App. No.
18/069,148
Granted
Jan 7, 2025
Kind
B2
Abstract

A method of forming a variable refractive index thin film includes forming a coating including a tin (II) halide precursor and a liquid solvent, where the composition and/or concentration of the liquid solvent may vary spatially over one or more lateral dimension(s) of the coating. Annealing at elevated temperature may induce densification of the coating and the formation of a thin film having a variable refractive index. Local variability in the refractive index may be correlated to the location oxidation state of tin within the thin film, which may be related to the conformation of the liquid solvent.

Claims (29)

1. A method comprising:

forming a first solution comprising a first tin (II) halide precursor and a first liquid solvent;

forming a second solution comprising a second tin (II) halide precursor and a second liquid solvent;

depositing the first solution and the second solution over respective regions of a deposition surface of a substrate to form a coating; and

annealing the coating to form a thin film having a variable refractive index.

2. The method of claim 1 , wherein the first and second tin (II) halide precursors each comprise tin (II) chloride.

3. The method of claim 1 , wherein the first and second liquid solvents independently comprise a liquid selected from the group consisting of propylene glycol methyl ether, dipropylene glycol monomethyl ether, propylene glycol methyl ether acetate, tripropylene glycol monomethyl ether, 1,3-dimethoxy-2-propanol, diethylene glycol, butyl lactate, propylene carbonate, isopropyl alcohol, methanol, and water.

4. The method of claim 1 , wherein depositing the solutions comprises ink-jet printing.

5. The method of claim 1 , wherein the solutions are deposited into trenches or vias that constitute at least a portion of the deposition surface.

6. The method of claim 1 , wherein annealing the coating comprises heating the coating to a temperature ranging from approximately 120° C. to approximately 250° C.

7. The method of claim 1 , wherein the annealing produces tin having a first valence within a first region of the thin film and tin having a second valence within a second region of the thin film.

8. The method of claim 7 , wherein the thin film comprises a first refractive index within the first region and a second refractive index within the second region.

9. The method of claim 7 , wherein the thin film comprises a first refractive index greater than approximately 1.7 within the first region, a second refractive index greater than approximately 1.7 within the second region, and a difference between the first refractive index and the second refractive index is at least approximately 0.1.

10. The method of claim 1 , further comprising:

combining the first solution and the second solution at a first ratio to form a first mixture;

combining the first solution and the second solution at a second ratio to form a second mixture;

depositing the first mixture over a first region of the substrate; and

depositing the second mixture over a second region of the substrate.

11. A method comprising:

forming a solution comprising a tin (II) halide precursor and a first liquid solvent;

depositing the solution onto a deposition surface of a substrate to form a coating over the substrate;

depositing a second liquid solvent non-uniformly over the coating; and

annealing the coating to form a thin film having a variable refractive index.

12. The method of claim 11 , wherein the first and second liquid solvents independently comprise a liquid selected from the group consisting of propylene glycol methyl ether, dipropylene glycol monomethyl ether, propylene glycol methyl ether acetate, tripropylene glycol monomethyl ether, 1,3-dimethoxy-2-propanol, diethylene glycol, butyl lactate, propylene carbonate, isopropyl alcohol, methanol, and water.

13. The method of claim 11 , wherein the solution is deposited into trenches or vias that constitute at least a portion of the deposition surface.

14. The method of claim 11 , wherein annealing the coating comprises heating the coating to a temperature ranging from approximately 120° C. to approximately 250° C.

15. The method of claim 11 , wherein the annealing produces tin having a first valence within a first region of the thin film and tin having a second valence within a second region of the thin film.

16. The method of claim 15 , wherein the thin film comprises a first refractive index within the first region and a second refractive index within the second region.

17. The method of claim 15 , wherein the thin film comprises a first refractive index greater than approximately 1.7 within the first region, a second refractive index greater than approximately 1.7 within the second region, and a difference between the first refractive index and the second refractive index is at least approximately 0.1.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 26, 2023
From: ARRIBIO, ALEJO LIFSCHITZ
To: META PLATFORMS TECHNOLOGIES, LLC
Reel/Frame 064060/0512 →
Continuity (2)
Provisional Application 63333072 · Apr 20, 2022
Related Publication 20230340286A1 · Oct 26, 2023
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