IP Library Granted Patent US 12,276,755
Granted Patent B2
US 12,276,755 · App. 18/102,647 · Granted Apr 15, 2025

2D scanning high precision LiDAR using combination of rotating concave mirror and beam steering devices

Inventors: Junwei Bao (Los Altos, CA); Yimin Li (Cupertino, CA); Rui Zhang (Palo Alto, CA)
Assignee: SEYOND, INC.
G01S7/4812G01S7/4816G01S7/4817G01S17/10G01S17/42G01S17/88G01S17/931G02B19/0028G02B19/0076G02B26/12G02B26/124G02B26/125G02B26/126
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 12,276,755
App. No.
18/102,647
Granted
Apr 15, 2025
Kind
B2
Abstract

The present disclosure describes a system and method for coaxial LiDAR scanning. The system includes a first light source configured to provide first light pulses. The system also includes one or more beam steering apparatuses optically coupled to the first light source. Each beam steering apparatus comprises a rotatable concave reflector and a light beam steering device disposed at least partially within the rotatable concave reflector. The combination of the light beam steering device and the rotatable concave reflector, when moving with respect to each other, steers the one or more first light pulses both vertically and horizontally to illuminate an object within a field-of-view; obtain one or more first returning light pulses, the one or more first returning light pulses being generated based on the steered first light pulses illuminating an object within the field-of-view, and redirects the one or more first returning light pulses.

Claims (73)

1. A light detection and ranging (LiDAR) scanning system, comprising:

one or more light sources configured to provide one or more light pulses; and

a beam steering apparatus optically coupled to the one or more light sources to receive the one or more light pulses;

the beam steering apparatus comprising a light beam steering device and a reflector having a plurality of reflective surfaces,

wherein the light beam steering device is configured to direct the one or more light pulses to the reflector,

wherein the reflector is configured to redirect, upon receiving the one or more light pulses from the light beam steering device, the one or more light pulses to a field-of-view, and

wherein a combination of the reflector and the light beam steering device, when moving with respect to each other, is configured to:

scan the one or more light pulses both vertically and horizontally to illuminate an object within the field-of-view, and

receive return light formed based on the illumination of the object within the field-of-view, and

direct the return light to a detector,

and wherein the light beam steering device is configured to oscillate between two end vertical positions to obtain multiple scanlines in-between.

2. The LiDAR scanning system of claim 1 , wherein the light beam steering device is an oscillation mirror.

3. The LiDAR scanning system of claim 2 , wherein the oscillation mirror is operative to oscillate about a first axis and the reflector is operative to rotate about a second axis, wherein the combination of the oscillation mirror and the reflector, when moving based on their respective axes, coaxially illuminates the object using the one or more light pulses and receives the return light.

4. The LiDAR scanning system of claim 2 , wherein the oscillation mirror is a one-facet mirror.

5. The LiDAR scanning system of claim 2 , wherein the oscillation mirror is a multiple-facet mirror.

6. The LiDAR scanning system of claim 1 , further comprising one or more optics disposed between the one or more light sources and the light beam steering device, the one or more optics facilitating directing the one or more light pulses to the light beam steering device.

7. The LiDAR scanning system of claim 1 , wherein an angle between any two adjacent reflective surfaces of the plurality of reflective surfaces is other than a 90-degree angle.

8. The LiDAR scanning system of claim 1 , wherein the reflector is a polygonal-shaped structure.

9. The LiDAR scanning system of claim 1 , wherein the one or more light pulses form two beams of light pulses comprising a first light beam and a second light beam, and wherein the beam steering apparatus scans the first light beam in a first range within the field-of-view and scans the second light beam in a second range within the field-of-view, the first range and the second range overlap.

10. The LiDAR scanning system of claim 1 ,

wherein the reflector is further configured to direct the return light to the light beam steering device, and

wherein the light beam steering device is further configured to direct, upon receiving the return light from the reflector, the return light to a detector.

11. A light detection and ranging (LiDAR) system, comprising:

one or more light sources configured to generate one or more light beams;

a beam scanner configured to scan a field-of-view of the LiDAR system using the one or more light beams, the beam scanner comprising a planar mirror and a polygon mirror comprising a plurality of reflective surfaces,

wherein the planar mirror is pivotable along a first axis to direct the one or more light beams to the polygon mirror,

wherein the polygon mirror is rotatable about a second axis orthogonal to the first axis to redirect the one or more light beams to a field-of-view, and

wherein the beam scanner is optically coupled to the one or more light sources and is positioned to:

scan the one or more light beams both vertically and horizontally to illuminate an object within the field-of-view of the LiDAR system,

receive return light formed based on the illumination of the object within the field-of-view, and

direct the return light to a detector,

and wherein the planar mirror is configured to oscillate between two end vertical positions to obtain multiple scanlines in-between.

12. The LiDAR system of claim 11 , wherein the plurality of reflective surfaces comprises four or more reflective surfaces.

13. The LiDAR system of claim 11 , wherein the polygon mirror is operative to rotate about a polygon mirror axle, the polygon mirror axle extending into a block of the polygon mirror through two opposing non-reflective surfaces of the block.

14. The LiDAR system of claim 11 , wherein:

the one or more light beams comprise a first light beam and a second light beam,

the first light beam and the second light beam are scanned by the beam scanner to define a first field-of-view and a second field-of-view, respectively,

the first field-of-view and the second field-of-view, in combination, define the field-of-view of the LiDAR system, and

the first field-of-view and the second field-of-view partially overlap to define an overlap region within the field-of-view of the LiDAR system.

15. The LiDAR system of claim 11 , wherein:

the one or more light beams comprise a first light beam and a second light beam, and

each of the first light beam and second light beam is scanned by the beam scanner to define a respective partial field-of-view of approximately 60 degrees wide in one direction.

16. The LiDAR system of claim 11 , wherein the polygon mirror is further configured to direct the return light to the planar mirror, and

wherein the planar mirror is further configured to direct the return light to the detector.

17. A light detection and ranging (LiDAR) system, comprising:

one or more light sources configured to generate one or more light beams;

a beam scanner configured to scan a field-of-view of the LiDAR system using the one or more light beams, the beam scanner comprising a polygon mirror and a second mirror,

wherein the polygon mirror comprises a plurality of reflective surfaces and is rotatable about a polygon mirror axle to direct the one or more light beams to the second mirror,

wherein the second mirror is pivotable along an axis orthogonal to the polygon mirror axle to direct the one or more light beams to a field-of-view, and

wherein the beam scanner is optically coupled to the one or more light sources and is positioned to:

scan the one or more light beams both vertically and horizontally to illuminate an object within the field-of-view of the LiDAR system,

receive return light formed based on the illumination of the object within the field-of-view, and

direct the return light to a detector,

and wherein the second mirror is configured to oscillate between two end vertical positions to obtain multiple scanlines in-between.

18. The LiDAR system of claim 17 , wherein the plurality of reflective surfaces comprises four or more reflective surfaces.

19. The LiDAR system of claim 17 , wherein:

the one or more light beams comprise a first light beam and a second light beam,

the first light beam and the second light beam are scanned by the beam scanner to define a first field-of-view and a second field-of-view, respectively,

the first field-of-view and the second field-of-view, in combination, define the field-of-view of the LiDAR system, and

the first field-of-view and the second field-of-view partially overlap to define an overlap region within the field-of-view of the LiDAR system.

20. The LiDAR system of claim 17 , wherein the second mirror is further configured to direct the return light to the polygon mirror, and

wherein the polygon mirror is further configured to direct the return light to the detector.

21. A method for performing LiDAR scanning using a LiDAR system, comprising:

directing one or more light pulses from one or more light sources to a beam steering apparatus optically coupled to the one or more light sources, the beam steering apparatus comprising a light beam steering device and a reflector having a plurality of reflective surfaces;

directing, by the light beam steering device of the beam steering apparatus, the one or more light pulses toward the reflector,

upon receiving the one or more light pulses from the light beam steering device, directing, by the reflector, the one or more light pulses to a field-of-view, wherein the one or more light pulses are steered by a combination of the light beam steering device and the reflector both vertically and horizontally to illuminate an object within the field-of-view,

receiving return light formed based on the illumination of the object within the field-of-view, and

directing the return light to a detector,

wherein the light beam steering device is configured to oscillate between two end vertical positions to obtain multiple scanlines in-between.

22. The method of claim 21 , wherein the one or more light pulses form two beams of light pulses comprising a first light beam and a second light beam, wherein the one or more light pulses are steered by scanning the first light beam in a first range within the field-of-view and scanning the second light beam in a second range within the field-of-view, the first range and the second range overlap.

23. The LiDAR system of claim 21 , wherein directing the return light to the detector comprises:

directing, by the reflector, the return light to the light beam steering device, and

directing, upon the light beam steering device receiving the return light from the reflector, the return light to a detector.

Assignments (3)
CHANGE OF NAME Recorded Feb 22, 2024
From: INNOVUSION, INC.
To: SEYOND, INC.
Reel/Frame 066660/0957 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 16, 2023
From: BAO, JUNWEI; LI, YIMIN; ZHANG, RUI
To: INNOVUSION IRELAND LIMITED
Reel/Frame 063007/0119 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 16, 2023
From: INNOVUSION IRELAND LIMITED
To: INNOVUSION, INC.
Reel/Frame 063007/0123 →
Continuity (5)
Continuation 17169366 · Feb 5, 2021
Division 15721127 · Sep 29, 2017
Provisional Application 62529955 · Jul 7, 2017
Provisional Application 62441280 · Dec 31, 2016
Related Publication 20230194668A1 · Jun 22, 2023
References Cited (400)
US 3122330A · Trentini · 1964 [cited by applicant]
US 3854821A · Thompson · 1974 [cited by applicant]
US 3897150A · Bridges et al. · 1975 [cited by applicant]
US 4412720A · Costa · 1983 [cited by applicant]
US 4464048A · Farlow · 1984 [cited by applicant]
US 4710621A · Loy · 1987 [cited by applicant]
US 4733072A · Lettington · 1988 [cited by applicant]
US 4923263A · Johnson · 1990 [cited by applicant]
US 5006721A · Cameron et al. · 1991 [cited by applicant]
US 5157451A · Taboada et al. · 1992 [cited by applicant]
US 5303084A · Pflibsen et al. · 1994 [cited by applicant]
US 5319434A · Croteau et al. · 1994 [cited by applicant]
US 5369661A · Yamaguchi et al. · 1994 [cited by applicant]
US 5371608A · Muto et al. · 1994 [cited by applicant]
US 5442358A · Keeler et al. · 1995 [cited by applicant]
US 5475207A · Bobba et al. · 1995 [cited by applicant]
US 5510890A · Langdon et al. · 1996 [cited by applicant]
US 5546188A · Wangler · 1996 [cited by examiner]
US 5579153A · Laming et al. · 1996 [cited by applicant]
US 5600487A · Kiyomoto et al. · 1997 [cited by applicant]
US 5614961A · Gibeau et al. · 1997 [cited by applicant]
US 5657077A · Deangelis et al. · 1997 [cited by applicant]
US 5682225A · DuBois et al. · 1997 [cited by applicant]
US 5736958A · Turpin · 1998 [cited by applicant]
US 5742068A · Dybdahl et al. · 1998 [cited by applicant]
US 5793491A · Wangler et al. · 1998 [cited by applicant]
US 5838239A · Stern et al. · 1998 [cited by applicant]
US 5864391A · Hosokawa et al. · 1999 [cited by applicant]
US 5926259A · Bamberger et al. · 1999 [cited by applicant]
US 5936756A · Nakajima · 1999 [cited by applicant]
US 6163378A · Khoury · 2000 [cited by applicant]
US 6175440B1 · Conemac · 2001 [cited by applicant]
US 6317202B1 · Hosokawa et al. · 2001 [cited by applicant]
US 6361324B1 · Flint · 2002 [cited by applicant]
US 6420698B1 · Dimsdale · 2002 [cited by applicant]
US 6594000B2 · Green et al. · 2003 [cited by applicant]
US 6650404B1 · Crawford · 2003 [cited by applicant]
US 6650407B2 · Jamieson et al. · 2003 [cited by applicant]
US 6783074B1 · Hammer · 2004 [cited by applicant]
US 6788445B2 · Goldberg et al. · 2004 [cited by applicant]
US 6788861B1 · Utsui et al. · 2004 [cited by applicant]
US 6864498B2 · Katzir et al. · 2005 [cited by applicant]
US 6950733B2 · Stopczynski · 2005 [cited by applicant]
US 7128267B2 · Reichenbach et al. · 2006 [cited by applicant]
US 7202941B2 · Munro · 2007 [cited by applicant]
US 7323987B2 · Seas et al. · 2008 [cited by applicant]
US 7345271B2 · Boehlau et al. · 2008 [cited by applicant]
US 7382442B2 · Adachi et al. · 2008 [cited by applicant]
US 7405676B2 · Janssen · 2008 [cited by applicant]
US 7440084B2 · Kane · 2008 [cited by applicant]
US 7440175B2 · Di et al. · 2008 [cited by applicant]
US 7489865B2 · Varshneya et al. · 2009 [cited by applicant]
US 7541943B2 · Manor · 2009 [cited by applicant]
US 7541944B2 · Konya et al. · 2009 [cited by applicant]
US 7544945B2 · Tan et al. · 2009 [cited by applicant]
US 7576837B2 · Liu et al. · 2009 [cited by applicant]
US 7580117B2 · Okada et al. · 2009 [cited by applicant]
US 7639347B2 · Eaton · 2009 [cited by applicant]
US 7675655B2 · Marshall et al. · 2010 [cited by applicant]
US 7679798B2 · Sowa et al. · 2010 [cited by applicant]
US 7697120B2 · Reichert et al. · 2010 [cited by applicant]
US 7830527B2 · Chen et al. · 2010 [cited by applicant]
US 7835068B1 · Brooks et al. · 2010 [cited by applicant]
US 7847235B2 · Krupkin et al. · 2010 [cited by applicant]
US 7880865B2 · Tanaka et al. · 2011 [cited by applicant]
US 7936448B2 · Albuquerque et al. · 2011 [cited by applicant]
US 7969558B2 · Hall · 2011 [cited by applicant]
US 7982861B2 · Abshire et al. · 2011 [cited by applicant]
US 8009186B2 · Tomioka · 2011 [cited by applicant]
US 8072582B2 · Meneely · 2011 [cited by applicant]
US 8116968B2 · Jou et al. · 2012 [cited by applicant]
US 8212998B2 · Rindle · 2012 [cited by applicant]
US 8248272B2 · Arnold et al. · 2012 [cited by applicant]
US 8299957B2 · Tseng · 2012 [cited by applicant]
US 8471895B2 · Banks · 2013 [cited by applicant]
US 8526473B2 · Baird et al. · 2013 [cited by applicant]
US 8629977B2 · Phillips et al. · 2014 [cited by applicant]
US 8659643B2 · Purvis et al. · 2014 [cited by applicant]
US 8659748B2 · Dakin et al. · 2014 [cited by applicant]
US 8681319B2 · Tanaka et al. · 2014 [cited by applicant]
US 8736818B2 · Weimer et al. · 2014 [cited by applicant]
US 8749764B2 · Hsu · 2014 [cited by applicant]
US 8812149B2 · Doak · 2014 [cited by applicant]
US 8836955B2 · Alvarez Diez et al. · 2014 [cited by applicant]
US 8842356B2 · Sandner et al. · 2014 [cited by applicant]
US 8918270B2 · Wang · 2014 [cited by applicant]
US 8976339B2 · Phillips et al. · 2015 [cited by applicant]
US 8994928B2 · Shiraishi · 2015 [cited by applicant]
US 9048616B1 · Robinson · 2015 [cited by applicant]
US 9065243B2 · Asobe et al. · 2015 [cited by applicant]
US 9086273B1 · Gruver et al. · 2015 [cited by applicant]
US 9188674B2 · Suzuki et al. · 2015 [cited by applicant]
US 9194701B2 · Bosch · 2015 [cited by applicant]
US 9239959B1 · Evans et al. · 2016 [cited by applicant]
US 9255790B2 · Zhu · 2016 [cited by applicant]
US 9285477B1 · Smith et al. · 2016 [cited by applicant]
US 9300321B2 · Zalik et al. · 2016 [cited by applicant]
US 9304316B2 · Weiss et al. · 2016 [cited by applicant]
US 9316724B2 · Gehring et al. · 2016 [cited by applicant]
US 9354485B2 · Fermann et al. · 2016 [cited by applicant]
US 9476968B2 · Anderson et al. · 2016 [cited by applicant]
US 9477007B2 · Albert et al. · 2016 [cited by applicant]
US 9510505B2 · Halloran et al. · 2016 [cited by applicant]
US 9575184B2 · Gilliland et al. · 2017 [cited by applicant]
US 9605998B2 · Nozawa · 2017 [cited by applicant]
US 9606222B2 · Bayha et al. · 2017 [cited by applicant]
US 9618742B1 · Droz et al. · 2017 [cited by applicant]
US 9621876B2 · Federspiel · 2017 [cited by applicant]
US 9625580B2 · Kotelnikov et al. · 2017 [cited by applicant]
US 9638799B2 · Goodwin et al. · 2017 [cited by applicant]
US 9671094B2 · Ball · 2017 [cited by applicant]
US 9696426B2 · Zuk · 2017 [cited by applicant]
US 9702966B2 · Batcheller et al. · 2017 [cited by applicant]
US 9753351B2 · Eldada · 2017 [cited by applicant]
US 9778364B2 · Gruver et al. · 2017 [cited by applicant]
US 9791555B2 · Zhu · 2017 [cited by applicant]
US 9798003B2 · Hammes et al. · 2017 [cited by applicant]
US 9804264B2 · Villeneuve et al. · 2017 [cited by applicant]
US 9810786B1 · Welford et al. · 2017 [cited by applicant]
US 9812838B2 · Villeneuve et al. · 2017 [cited by applicant]
US 9817121B2 · Inoue et al. · 2017 [cited by applicant]
US 9823351B2 · Haslim et al. · 2017 [cited by applicant]
US 9823353B2 · Eichenholz et al. · 2017 [cited by applicant]
US 9857468B1 · Eichenholz et al. · 2018 [cited by applicant]
US 9857472B2 · Mheen et al. · 2018 [cited by applicant]
US 9869753B2 · Eldada · 2018 [cited by applicant]
US 9869754B1 · Campbell et al. · 2018 [cited by applicant]
US 9880278B2 · Uffelen et al. · 2018 [cited by applicant]
US 9880283B2 · Droz et al. · 2018 [cited by applicant]
US 9885778B2 · Dussan · 2018 [cited by applicant]
US 9897689B2 · Dussan · 2018 [cited by applicant]
US 9915726B2 · Bailey et al. · 2018 [cited by applicant]
US 9923329B2 · Savage-Leuchs et al. · 2018 [cited by applicant]
US 9927915B2 · Frame et al. · 2018 [cited by applicant]
US 9958545B2 · Eichenholz et al. · 2018 [cited by applicant]
US 9989755B2 · Fujimura et al. · 2018 [cited by applicant]
US 9995820B2 · Jachmann et al. · 2018 [cited by applicant]
US 10007001B1 · LaChapelle et al. · 2018 [cited by applicant]
US 10012732B2 · Eichenholz et al. · 2018 [cited by applicant]
US 10018724B2 · Royo Royo et al. · 2018 [cited by applicant]
US 10031214B2 · Rosenzweig et al. · 2018 [cited by applicant]
US 10035112B2 · Barcikowski et al. · 2018 [cited by applicant]
US 10042159B2 · Dussan et al. · 2018 [cited by applicant]
US 10048381B2 · Koehler · 2018 [cited by applicant]
US 10061019B1 · Campbell et al. · 2018 [cited by applicant]
US 10073166B2 · Dussan · 2018 [cited by applicant]
US 10078133B2 · Dussan · 2018 [cited by applicant]
US 10084925B2 · LaChapelle · 2018 [cited by applicant]
US 10107914B2 · Kalscheur et al. · 2018 [cited by applicant]
US 10157630B2 · Vaughn et al. · 2018 [cited by applicant]
US 10180517B2 · Wiersema · 2019 [cited by applicant]
US 10191155B2 · Curatu · 2019 [cited by applicant]
US 10203399B2 · Retterath et al. · 2019 [cited by applicant]
US 10215847B2 · Scheim et al. · 2019 [cited by applicant]
US 10267898B2 · Campbell et al. · 2019 [cited by applicant]
US 10295656B1 · Li et al. · 2019 [cited by applicant]
US 10310058B1 · Campbell et al. · 2019 [cited by applicant]
US 10317672B2 · Sarkar · 2019 [cited by applicant]
US 10324170B1 · Enberg, Jr. et al. · 2019 [cited by applicant]
US 10324171B2 · Niclass et al. · 2019 [cited by applicant]
US 10324185B2 · McWhirter et al. · 2019 [cited by applicant]
US 10393877B2 · Hall et al. · 2019 [cited by applicant]
US 10401482B2 · Kienzler et al. · 2019 [cited by applicant]
US 10429495B1 · Wang et al. · 2019 [cited by applicant]
US 10444356B2 · Wu et al. · 2019 [cited by applicant]
US 10451716B2 · Hughes et al. · 2019 [cited by applicant]
US 10466342B1 · Zhu et al. · 2019 [cited by applicant]
US 10502831B2 · Eichenholz · 2019 [cited by applicant]
US 10509112B1 · Pan · 2019 [cited by applicant]
US 10520602B2 · Villeneuve et al. · 2019 [cited by applicant]
US 10557923B2 · Watnik et al. · 2020 [cited by applicant]
US 10571567B2 · Campbell et al. · 2020 [cited by applicant]
US 10578720B2 · Hughes et al. · 2020 [cited by applicant]
US 10591600B2 · Villeneuve et al. · 2020 [cited by applicant]
US 10627491B2 · Hall et al. · 2020 [cited by applicant]
US 10641872B2 · Dussan et al. · 2020 [cited by applicant]
US 10663564B2 · LaChapelle · 2020 [cited by applicant]
US 10663585B2 · McWhirter · 2020 [cited by applicant]
US 10663595B2 · Curatu · 2020 [cited by applicant]
US 10663596B2 · Dussan et al. · 2020 [cited by applicant]
US 10684360B2 · Campbell · 2020 [cited by applicant]
US 10698110B2 · Verheggen et al. · 2020 [cited by applicant]
US 10908262B2 · Dussan · 2021 [cited by applicant]
US 10908265B2 · Dussan · 2021 [cited by applicant]
US 10908268B2 · Zhou et al. · 2021 [cited by applicant]
US 10969475B2 · Li et al. · 2021 [cited by applicant]
US 10983218B2 · Hall et al. · 2021 [cited by applicant]
US 11002835B2 · Pan et al. · 2021 [cited by applicant]
US 11009605B2 · Li et al. · 2021 [cited by applicant]
US 11194022B2 · de Mersseman et al. · 2021 [cited by applicant]
US 11194048B1 · Burbank et al. · 2021 [cited by applicant]
US 20010043717A1 · Laumeyer et al. · 2001 [cited by applicant]
US 20020039221A1 · Shiraishi et al. · 2002 [cited by applicant]
US 20020136251A1 · Green et al. · 2002 [cited by applicant]
US 20020149760A1 · Hipp · 2002 [cited by applicant]
US 20020149761A1 · Saccomanno · 2002 [cited by applicant]
US 20030066954A1 · Hipp · 2003 [cited by applicant]
US 20030080285A1 · Hipp · 2003 [cited by applicant]
US 20040062442A1 · Laumeyer et al. · 2004 [cited by applicant]
US 20040135992A1 · Munro · 2004 [cited by applicant]
US 20050033497A1 · Stopczynski · 2005 [cited by applicant]
US 20050034036A1 · Lages et al. · 2005 [cited by applicant]
US 20050088641A1 · Hung et al. · 2005 [cited by applicant]
US 20050190424A1 · Reichenbach et al. · 2005 [cited by applicant]
US 20050195383A1 · Breed et al. · 2005 [cited by applicant]
US 20050218128A1 · Han · 2005 [cited by applicant]
US 20060071846A1 · Yanagisawa et al. · 2006 [cited by applicant]
US 20060132752A1 · Kane · 2006 [cited by applicant]
US 20060227317A1 · Henderson et al. · 2006 [cited by applicant]
US 20070024840A1 · Fetzer et al. · 2007 [cited by applicant]
US 20070091948A1 · Di et al. · 2007 [cited by applicant]
US 20070216995A1 · Bollond et al. · 2007 [cited by applicant]
US 20070248136A1 · Leonardo et al. · 2007 [cited by applicant]
US 20080123170A1 · Reichert et al. · 2008 [cited by applicant]
US 20080174762A1 · Liu et al. · 2008 [cited by applicant]
US 20080193135A1 · Du et al. · 2008 [cited by applicant]
US 20080210881A1 · Harris et al. · 2008 [cited by applicant]
US 20080218821A1 · Dalgleish et al. · 2008 [cited by applicant]
US 20080247425A1 · Welford · 2008 [cited by applicant]
US 20080264164A1 · Solheim et al. · 2008 [cited by applicant]
US 20090010644A1 · Varshneya et al. · 2009 [cited by applicant]
US 20090051926A1 · Chen · 2009 [cited by applicant]
US 20090059201A1 · Willner et al. · 2009 [cited by applicant]
US 20090067453A1 · Mizuuchi et al. · 2009 [cited by applicant]
US 20090099813A1 · Dimsdale et al. · 2009 [cited by applicant]
US 20090102313A1 · West et al. · 2009 [cited by applicant]
US 20090102828A1 · Arai et al. · 2009 [cited by applicant]
US 20090147239A1 · Zhu · 2009 [cited by applicant]
US 20090252376A1 · Retterath et al. · 2009 [cited by applicant]
US 20090262760A1 · Krupkin et al. · 2009 [cited by applicant]
US 20090316134A1 · Michael et al. · 2009 [cited by applicant]
US 20100006760A1 · Lee et al. · 2010 [cited by applicant]
US 20100007870A1 · Haberer et al. · 2010 [cited by applicant]
US 20100020306A1 · Hall · 2010 [cited by applicant]
US 20100020377A1 · Borchers et al. · 2010 [cited by applicant]
US 20100025798A1 · Itzler et al. · 2010 [cited by applicant]
US 20100027602A1 · Abshire et al. · 2010 [cited by applicant]
US 20100045965A1 · Meneely · 2010 [cited by applicant]
US 20100053715A1 · O'Neill et al. · 2010 [cited by applicant]
US 20100097678A1 · Hajjar et al. · 2010 [cited by applicant]
US 20100114416A1 · Au et al. · 2010 [cited by applicant]
US 20100128109A1 · Banks · 2010 [cited by applicant]
US 20100165082A1 · Kiehn et al. · 2010 [cited by applicant]
US 20100208235A1 · Kaehler · 2010 [cited by applicant]
US 20100245849A1 · Satzky et al. · 2010 [cited by applicant]
US 20100128248A1 · Heizmann et al. · 2010 [cited by applicant]
US 20100271614A1 · Albuquerque et al. · 2010 [cited by applicant]
US 20100302528A1 · Hall · 2010 [cited by applicant]
US 20110032508A1 · Ludwig et al. · 2011 [cited by applicant]
US 20110085155A1 · Stann et al. · 2011 [cited by applicant]
US 20110102764A1 · Walsh et al. · 2011 [cited by applicant]
US 20110122895A1 · Savage-Leuchs et al. · 2011 [cited by applicant]
US 20110161031A1 · Dimsdale et al. · 2011 [cited by applicant]
US 20110181864A1 · Schmitt et al. · 2011 [cited by applicant]
US 20110216304A1 · Hall · 2011 [cited by applicant]
US 20110235019A1 · Matsubara et al. · 2011 [cited by applicant]
US 20120035788A1 · Trepagnier et al. · 2012 [cited by applicant]
US 20120038903A1 · Weimer et al. · 2012 [cited by applicant]
US 20120101680A1 · Trepagnier et al. · 2012 [cited by applicant]
US 20120124113A1 · Zalik et al. · 2012 [cited by applicant]
US 20120162373A1 · Mheen et al. · 2012 [cited by applicant]
US 20120219020A1 · Fermann et al. · 2012 [cited by applicant]
US 20120221142A1 · Doak · 2012 [cited by applicant]
US 20130050676A1 · d'Aligny · 2013 [cited by applicant]
US 20130087689A1 · Woodward et al. · 2013 [cited by applicant]
US 20130107016A1 · Federspeil · 2013 [cited by applicant]
US 20130116971A1 · Retkowski et al. · 2013 [cited by applicant]
US 20130235366A1 · Giacotto et al. · 2013 [cited by applicant]
US 20130241761A1 · Cooper et al. · 2013 [cited by applicant]
US 20130293867A1 · Hsu et al. · 2013 [cited by applicant]
US 20130293946A1 · Fermann et al. · 2013 [cited by applicant]
US 20130329279A1 · Nati et al. · 2013 [cited by applicant]
US 20130342822A1 · Shiraishi · 2013 [cited by applicant]
US 20140027607A1 · Mordarski et al. · 2014 [cited by applicant]
US 20140035959A1 · Lapstun · 2014 [cited by applicant]
US 20140063255A1 · Breed · 2014 [cited by applicant]
US 20140063489A1 · Steffey et al. · 2014 [cited by applicant]
US 20140078514A1 · Zhu · 2014 [cited by applicant]
US 20140104594A1 · Gammenthaler · 2014 [cited by applicant]
US 20140171523A1 · Lau et al. · 2014 [cited by applicant]
US 20140233942A1 · Kanter · 2014 [cited by applicant]
US 20140300952A1 · Gusev et al. · 2014 [cited by applicant]
US 20140319638A1 · Chia · 2014 [cited by applicant]
US 20140320845A1 · Bayha et al. · 2014 [cited by applicant]
US 20140332676A1 · Bayha et al. · 2014 [cited by applicant]
US 20140347650A1 · Bosch · 2014 [cited by applicant]
US 20140350836A1 · Stettner et al. · 2014 [cited by applicant]
US 20150015868A1 · Jachman et al. · 2015 [cited by applicant]
US 20150055117A1 · Pennecot et al. · 2015 [cited by applicant]
US 20150078123A1 · Batcheller et al. · 2015 [cited by applicant]
US 20150084805A1 · Dawber · 2015 [cited by applicant]
US 20150109603A1 · Kim et al. · 2015 [cited by applicant]
US 20150116692A1 · Zuk et al. · 2015 [cited by applicant]
US 20150124238A1 · Sakai et al. · 2015 [cited by applicant]
US 20150139259A1 · Robinson · 2015 [cited by applicant]
US 20150153271A1 · Retterath et al. · 2015 [cited by applicant]
US 20150158489A1 · Oh et al. · 2015 [cited by applicant]
US 20150266472A1 · Ferguson et al. · 2015 [cited by applicant]
US 20150293228A1 · Retterath et al. · 2015 [cited by applicant]
US 20150332102A1 · Lu et al. · 2015 [cited by applicant]
US 20150338270A1 · Williams et al. · 2015 [cited by applicant]
US 20150355327A1 · Goodwin et al. · 2015 [cited by applicant]
US 20150378012A1 · Sayyah et al. · 2015 [cited by applicant]
US 20160003946A1 · Gilliland et al. · 2016 [cited by applicant]
US 20160047896A1 · Dussan · 2016 [cited by applicant]
US 20160047900A1 · Dussan · 2016 [cited by applicant]
US 20160047902A1 · Ishikawa et al. · 2016 [cited by applicant]
US 20160061655A1 · Nozawa · 2016 [cited by applicant]
US 20160061935A1 · Mccloskey et al. · 2016 [cited by applicant]
US 20160100521A1 · Halloran et al. · 2016 [cited by applicant]
US 20160117048A1 · Frame et al. · 2016 [cited by applicant]
US 20160172819A1 · Ogaki · 2016 [cited by applicant]
US 20160178736A1 · Chung · 2016 [cited by applicant]
US 20160191870A1 · Hajjar et al. · 2016 [cited by applicant]
US 20160226210A1 · Zayhowski et al. · 2016 [cited by applicant]
US 20160245902A1 · Natnik · 2016 [cited by applicant]
US 20160291134A1 · Droz et al. · 2016 [cited by applicant]
US 20160313445A1 · Bailey et al. · 2016 [cited by applicant]
US 20160327646A1 · Scheim et al. · 2016 [cited by applicant]
US 20170003116A1 · Yee et al. · 2017 [cited by applicant]
US 20170070029A1 · Moeneclaey et al. · 2017 [cited by applicant]
US 20170131388A1 · Campbell et al. · 2017 [cited by applicant]
US 20170153319A1 · Villeneuve et al. · 2017 [cited by applicant]
US 20170168145A1 · Sakabe · 2017 [cited by applicant]
US 20170242104A1 · Dussan · 2017 [cited by applicant]
US 20170299721A1 · Eichenholz et al. · 2017 [cited by applicant]
US 20170307738A1 · Schwarz et al. · 2017 [cited by applicant]
US 20170365105A1 · Rao et al. · 2017 [cited by applicant]
US 20180020115A1 · Hipp · 2018 [cited by applicant]
US 20180040171A1 · Kundu et al. · 2018 [cited by applicant]
US 20180050704A1 · Tascione et al. · 2018 [cited by applicant]
US 20180059221A1 · Slobodyanyuk et al. · 2018 [cited by applicant]
US 20180069367A1 · Villeneuve et al. · 2018 [cited by applicant]
US 20180152691A1 · Pacala et al. · 2018 [cited by applicant]
US 20180158471A1 · Vaughn et al. · 2018 [cited by applicant]
US 20180164439A1 · Droz et al. · 2018 [cited by applicant]
US 20180156896A1 · O'Keeffe · 2018 [cited by applicant]
US 20180188355A1 · Bao et al. · 2018 [cited by applicant]
US 20180188357A1 · Li et al. · 2018 [cited by applicant]
US 20180188358A1 · Li et al. · 2018 [cited by applicant]
US 20180188371A1 · Bao et al. · 2018 [cited by applicant]
US 20180210084A1 · Zwölfer et al. · 2018 [cited by applicant]
US 20180217262A1 · Albelo et al. · 2018 [cited by applicant]
US 20180275274A1 · Bao et al. · 2018 [cited by applicant]
US 20180284237A1 · Campbell et al. · 2018 [cited by applicant]
US 20180284241A1 · Campbell et al. · 2018 [cited by applicant]
US 20180284242A1 · Campbell · 2018 [cited by applicant]
US 20180284286A1 · Eichenholz et al. · 2018 [cited by applicant]
US 20180329060A1 · Pacala et al. · 2018 [cited by applicant]
US 20180359460A1 · Pacala et al. · 2018 [cited by applicant]
US 20190011567A1 · Pacala et al. · 2019 [cited by applicant]
US 20190025428A1 · Li et al. · 2019 [cited by applicant]
US 20190094345A1 · Singer et al. · 2019 [cited by applicant]
US 20190101645A1 · Demersseman et al. · 2019 [cited by applicant]
US 20190107607A1 · Danziger · 2019 [cited by applicant]
US 20190107623A1 · Campbell et al. · 2019 [cited by applicant]
US 20190120942A1 · Zhang et al. · 2019 [cited by applicant]
US 20190120962A1 · Gimpel et al. · 2019 [cited by applicant]
US 20190154804A1 · Eichenholz · 2019 [cited by applicant]
US 20190154807A1 · Steinkogler et al. · 2019 [cited by applicant]
US 20190212416A1 · Li et al. · 2019 [cited by applicant]
US 20190250254A1 · Campbell et al. · 2019 [cited by applicant]
US 20190250270A1 · Suzuki et al. · 2019 [cited by applicant]
US 20190257924A1 · Li et al. · 2019 [cited by applicant]
US 20190265334A1 · Zhang et al. · 2019 [cited by applicant]
US 20190265336A1 · Zhang et al. · 2019 [cited by applicant]
US 20190265337A1 · Zhang et al. · 2019 [cited by applicant]
US 20190265339A1 · Zhang et al. · 2019 [cited by applicant]
US 20190277952A1 · Beuschel et al. · 2019 [cited by applicant]
US 20190310368A1 · LaChapelle · 2019 [cited by applicant]
US 20190369215A1 · Wang et al. · 2019 [cited by applicant]
US 20190369258A1 · Hall et al. · 2019 [cited by applicant]
US 20190383915A1 · Li et al. · 2019 [cited by applicant]
US 20200026071A1 · Bao et al. · 2020 [cited by applicant]
US 20200142070A1 · Hall et al. · 2020 [cited by applicant]
US 20200142073A1 · Gassend et al. · 2020 [cited by applicant]
US 20200142074A1 · Huber et al. · 2020 [cited by applicant]
US 20200142075A1 · Lee · 2020 [cited by applicant]
US 20200142076A1 · Gulo et al. · 2020 [cited by applicant]
US 20200256964A1 · Campbell et al. · 2020 [cited by applicant]
US 20200284906A1 · Eichenholz et al. · 2020 [cited by applicant]
US 20200319310A1 · Hall et al. · 2020 [cited by applicant]
US 20200400798A1 · Rezk et al. · 2020 [cited by applicant]
US 20210088630A9 · Zhang · 2021 [cited by applicant]
AT 3688U1 · 2000 [cited by applicant]
CN 1677050A · 2005 [cited by applicant]
CN 1770211A · 2006 [cited by applicant]
CN 1946986A · 2007 [cited by applicant]
CN 1322307C · 2007 [cited by applicant]
CN 101093285A · 2007 [cited by applicant]
CN 101231383A · 2008 [cited by applicant]
CN 101241182A · 2008 [cited by applicant]
CN 101246216A · 2008 [cited by applicant]
CN 201251669Y · 2009 [cited by applicant]
CN 101576620A · 2009 [cited by applicant]
CN 101641613A · 2010 [cited by applicant]
CN 101813778A · 2010 [cited by applicant]
CN 102083359A · 2011 [cited by applicant]
CN 102736075A · 2012 [cited by applicant]
CN 102971657A · 2013 [cited by applicant]