IP Library Granted Patent US 12,326,572
Granted Patent B2
US 12,326,572 · App. 18/132,411 · Granted Jun 10, 2025

Nano-textured attenuator for use with laser beam profiling and laser beam characterization systems and method of use

Inventors: Kevin Kirkham (North Logan, UT); Kenneth Ferree (North Logan, UT)
Assignee: Ophir-Spiricon, LLC
G02B27/281G01J1/4257
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Quick Facts
Patent No.
US 12,326,572
App. No.
18/132,411
Granted
Jun 10, 2025
Kind
B2
Abstract

The present application discloses a nano-textured attenuator which includes a body defining an input aperture, a measurement aperture, and at least one beam dump aperture. At least one coupling fixture may be formed on or positioned on the body, a first nano-textured beamsplitter is positioned within the body and configured to transmit 85% to 99.9999% of an input beam therethrough while reflecting 0.0001% of the input beam to form a partially attenuated beam, at least a second nano-textured beamsplitter is also positioned within the body and is configured to transmit 85% to 99.9999% of the partially attenuated beam therethrough while reflecting 0.0001% of the partially attenuated beam to form an attenuated measurement beam, and at least one camera in communication with the measurement aperture be configured to measure at least one optical characteristic of the attenuated measurement beam.

Claims (25)

1. A nano-textured attenuator for use in laser beam characterization systems, comprising:

a body defining at least one input aperture, at least one measurement aperture, and at least one first beam dump aperture;

a first beamsplitter positioned within the body, the first beamsplitter having a surface having undergone a nano-texturing process, the surface allowing 99.99% to 99.99999% of an input beam to be transmitted therethrough and allowing 0.01% to 0.00001% of the input beam to be reflected therefrom to form at least one partially attenuated beam;

at least a second beamsplitter positioned within the body, the second beamsplitter having a surface having undergone a nano-texturing process, the surface allowing 99.99% to 99.99999% of the at least one partially attenuated beam to be transmitted therethrough and allowing 0.01% to 0.00001% of the at least one partially attenuated beam to be reflected therefrom to form at least one attenuated measurement beam; and

at least one camera system in communication with the at least one measurement aperture, the at least one camera system configured to receive the at least one attenuated measurement beam and measure at least one characteristic of the at least one attenuated measurement beam.

2. The nano-textured attenuator of claim 1 , further comprising at least one selectively movable mount configured to adjustably support at least one of the first beamsplitter and the at least a second beamsplitter.

3. The nano-textured attenuator of claim 1 , wherein at least one of the at least one input aperture, the at least one measurement aperture, and the at least one first beam dump aperture includes at least one protective window.

4. The nano-textured attenuator of claim 1 , wherein the 99.99% to 99.99999% of the at least one partially attenuated beam forms a second output beam directed through at least one second beam dump aperture.

5. A nano-textured attenuator for use in laser beam characterization systems, comprising:

a body defining at least one input aperture, at least one measurement aperture, and at least one first beam dump aperture;

a beamsplitter positioned within the body, the beamsplitter having a surface having undergone a nano-texturing process, the surface allowing 99.99% to 99.99999% of an input beam to be transmitted therethrough and allowing 0.01% to 0.00001% of the input beam to be reflected therefrom to form at least one partially attenuated beam;

at least one optical element positioned within the body, the at least one optical element having a surface having undergone a nano-texturing process, the surface allowing 99.99% to 99.99999% of the at least one partially attenuated beam to be transmitted therethrough and allowing 0.01% to 0.00001% of the at least one partially attenuated beam to be reflected therefrom to form at least one attenuated measurement beam; and

at least one camera system in communication with the at least one measurement aperture, the at least one camera system configured to receive the at least one attenuated measurement beam and measure at least one characteristic of the at least one attenuated measurement beam.

6. The nano-textured attenuator of claim 5 , further comprising at least one selectively movable mount configured to adjustably support at least one of the beamsplitter and the at least one optical element.

7. The nano-textured attenuator of claim 5 , wherein at least one of the at least one input aperture, at least one measurement aperture, and at least one beam dump aperture includes a protective window.

8. The nano-textured attenuator of claim 5 , wherein the at least one optical element is a beamsplitter.

9. The nano-textured attenuator of claim 5 , wherein the at least one optical element is a wave plate.

10. The nano-textured attenuator of claim 5 , wherein the at least one optical element is a lens.

11. A method of measuring an optical signal, comprising:

providing a nano-textured attenuator having a first beamsplitter, at least a second beamsplitter, and at least one beam dump aperture;

directing at least one input beam to the first beamsplitter;

reflecting a portion of the at least one input beam with the first beamsplitter to form at least one partially attenuated beam, the at least one partially attenuated beam having 0.01% to 0.00001% of a power of the at least one input beam while transmitting 99.99% to 99.99999% of the at least one input beam through the first beamsplitter;

reflecting a portion of the at least one partially attenuated beam from the first beamsplitter with the at least a second textured beamsplitter to form at least one attenuated measurement beam, the at least one attenuated measurement beam having of the at least one partially attenuated beam while transmitting 99.99% to 99.99999% of the at least one partially attenuated beam through the at least a second beamsplitter; and

directing at least a portion of the at least one input beam through the at least one beam dump aperture;

measuring at least one optical characteristic of the at least one attenuated measurement beam with at least one sensor system.

Assignments (3)
SECURITY INTEREST Recorded Aug 1, 2025
From: MKS INC.; ELECTRO SCIENTIFIC INDUSTRIES, INC.; NEWPORT CORPORATION
To: JPMORGAN CHASE BANK, N.A., AS THE COLLATERAL AGENT
Reel/Frame 071914/0186 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 5, 2023
From: OPHIR-SPIRICON, LLC
To: OPHIR OPTRONICS SOLUTIONS, LTD.
Reel/Frame 064793/0745 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 24, 2023
From: KIRKHAM, KEVIN; FERREE, KENNETH
To: OPHIR-SPIRICON, LLC
Reel/Frame 063419/0730 →
Continuity (3)
Continuation 16906335 · Jun 19, 2020
Provisional Application 62865160 · Jun 22, 2019
Related Publication 20230296909A1 · Sep 21, 2023
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