METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT
According to one embodiment, a method of manufacturing a piezoelectric element, includes forming lower electrodes on an insulating substrate, applying a precursor solution on the insulating substrate and the lower electrodes, drying the precursor solution by firing, thus forming a first precursor layer, patterning the first precursor layer into a shape of a plurality of islands located on the lower electrodes, respectively and crystallizing the island-shaped first precursor layer by firing, thus forming first piezoelectric layers.
1 . A method of manufacturing a piezoelectric element, comprising:
forming lower electrodes on an insulating substrate;
applying a precursor solution on the insulating substrate and the lower electrodes;
drying the precursor solution by firing, thus forming a first precursor layer;
patterning the first precursor layer into a shape of a plurality of islands located on the lower electrodes, respectively; and
crystallizing the island-shaped first precursor layer by firing, thus forming first piezoelectric layers.
2 . The piezoelectric element manufacturing method of claim 1 , comprising:
after crystallizing the island-shaped first precursor layers by firing to form the first piezoelectric layers,
applying the precursor solution on the insulating substrate and the first piezoelectric layers;
drying the precursor solution by firing, thus forming a second precursor layer;
patterning the second precursor layer into a shape of a plurality of islands located on the first piezoelectric layer, respectively; and
crystallizing the island-shaped second precursor layer by firing, thus forming second piezoelectric layers.
3 . The piezoelectric element manufacturing method of claim 2 , wherein
an end portion of each of the first piezoelectric layers does not overlap an end portion of each respective one of the second piezoelectric layers.
4 . The piezoelectric element manufacturing method of claim 1 , wherein
each of the first piezoelectric layers is located on each of the lower electrodes, and
the lower electrodes and the first piezoelectric layers are arranged in a matrix.
5 . The piezoelectric element manufacturing method of claim 1 , wherein
the lower electrodes extend along a first direction and are aligned along a second direction intersecting the first direction, and
multiple ones of the first piezoelectric layers are aligned along the first direction on one of the lower electrodes.
6 . The piezoelectric element manufacturing method of claim 1 , wherein
the insulating substrate is formed of glass.