IP Library Granted Patent US 12,251,946
Granted Patent B2
US 12,251,946 · App. 18/169,649 · Granted Mar 18, 2025

Printing system assemblies and methods

Inventors: Robert B. Lowrance (San Jose, CA); Alexander Sou-Kang Ko (Santa Clara, CA); Justin Mauck (Belmont, CA); Eliyahu Vronsky (Los Altos, CA); Aleksey Khrustalev (Sunnyvale, CA); Karl Mathia (Menlo Park, CA); Shandon Alderson (San Carlos, CA)
Assignee: Kateeva, Inc.
B41J3/28B41J3/407B41J11/0035B41J11/0045B41J11/0085B41J11/06B41J11/22B41J25/005B41J25/304B41J29/02B41J29/12B41J29/38H01L21/67784H01L21/68H01L21/6838H10K71/00
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Quick Facts
Patent No.
US 12,251,946
App. No.
18/169,649
Granted
Mar 18, 2025
Kind
B2
Abstract

The present teachings disclose various embodiments of a printing system for printing substrate, in which the printing system can be housed in a gas enclosure, where the environment within the enclosure can be maintained as a controlled printing environment. A controlled environment of the present teachings can include control of the type of gas environment within the gas enclosure, the size and level particulate matter within the enclosure, control of the temperature within the enclosure and control of lighting. Various embodiments of a printing system of the present teachings can include a Y-axis motion system and a Z-axis moving plate that are configured to substantially decrease excess thermal load within the enclosure by, for example, eliminating or substantially minimizing the use of conventional electric motors.

Claims (36)

1. A method, comprising:

supporting a substrate on a gas cushion table;

positioning the substrate in a first linear direction using a y-axis motion system;

moving a dispenser across the substrate in a second linear direction that crosses the first linear direction using an x-axis carriage assembly;

adjusting a z-axis position of the dispenser in a third linear direction substantially perpendicular to the first and second linear directions using a z-axis moving plate coupled to a pneumatic counterbalance;

supporting a component of the y-axis motion system on a first gas cushion and supporting the dispenser on a second gas cushion; and

maintaining orientation of the substrate parallel to the first linear direction by rotating the component of the y-axis motion system about an axis that extends along the third linear direction.

2. The method of claim 1 , wherein the component of the y-axis motion system engages with the substrate using vacuum.

3. The method of claim 2 , wherein the component of the y-axis motion system is rotated using at least one linear transducer.

4. The method of claim 3 , wherein the linear transducer comprises a voice coil mechanism.

5. The method of claim 1 , further comprising enclosing the substrate support, the x-axis carriage assembly, the y-axis motion system, and the z-axis moving plate in a gas enclosure.

6. The method of claim 5 , wherein supporting the substrate on the gas cushion table comprises applying pressure and vacuum to a surface of the substrate.

7. A method, comprising:

supporting a substrate on a gas cushion table;

positioning the substrate in a first linear direction using a y-axis motion system;

moving a dispenser across the substrate in a second linear direction that crosses the first linear direction using an x-axis carriage assembly;

adjusting a z-axis position of the dispenser in a third linear direction substantially perpendicular to the first and second linear directions using a z-axis moving plate coupled to a pneumatic counterbalance;

operating the pneumatic counterbalance based on an input current to a drive motor of the z-axis moving plate; and

maintaining orientation of the substrate parallel to the first linear direction by rotating a component of the y-axis motion system about an axis that extends along the third linear direction.

8. The method of claim 7 , further comprising operating the pneumatic counterbalance to minimize the input current to the drive motor of the z-axis moving plate.

9. A method, comprising:

supporting a substrate on a gas cushion table;

moving the substrate in a first linear direction using a y-axis motion system;

moving a dispenser across the substrate in a second linear direction that crosses the first linear direction using an x-axis carriage assembly;

adjusting a z-axis position of the dispenser in a third linear direction substantially perpendicular to the first and second linear directions using a z-axis moving plate coupled to a pneumatic counterbalance;

operating the pneumatic counterbalance based on an input current to a drive motor of the z-axis moving plate;

delivering a first ink volume from a local ink supply of the dispenser to a local ink delivery system of the dispenser;

delivering a second ink volume from a bulk ink system to the local ink supply; and

maintaining orientation of the substrate parallel to the first linear direction by rotating a component of the y-axis motion system about an axis that extends along the third linear direction.

10. The method of claim 9 , further comprising measuring at least one characteristic of a droplet ejected from the dispenser using a maintenance system.

11. The method of claim 10 , further comprising moving the maintenance system in a direction substantially parallel to the first linear direction to engage with the dispenser.

12. The method of claim 9 , wherein the component of the y-axis motion system is rotated using at least one linear transducer.

13. The method of claim 12 , wherein the linear transducer comprises a voice coil mechanism.

14. The method of claim 9 , wherein supporting the substrate on the gas cushion table comprises applying pressure and vacuum to a surface of the substrate.

15. The method of claim 9 , wherein the component of the y-axis motion system engages with an edge of the substrate using vacuum.

16. The method of claim 9 , further comprising dispensing droplets of ink from the local ink supply onto the substrate using the dispenser concurrently with the moving the substrate in the first linear direction and with the moving the dispenser across the substrate in the second linear direction.

Assignments (1)
SECURITY INTEREST Recorded Nov 13, 2025
From: KATEEVA, INC.
To: SINO XIN JI LIMITED
Reel/Frame 072891/0259 →
Continuity (12)
Continuation 17247013 · Nov 24, 2020
Continuation 16416523 · May 20, 2019
Continuation 15836617 · Dec 8, 2017
Continuation 15354927 · Nov 17, 2016
Continuation 14738785 · Jun 12, 2015
Provisional Application 62044165 · Aug 29, 2014
Provisional Application 62037494 · Aug 14, 2014
Provisional Application 62021390 · Jul 7, 2014
Provisional Application 62021563 · Jul 7, 2014
Provisional Application 62013440 · Jun 17, 2014
Provisional Application 62013433 · Jun 17, 2014
Related Publication 20230290667A1 · Sep 14, 2023
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