Embedded mechanical stopper for thermal sensor device
Disclosed herein are thermal sensor devices including TMOS devices with a mass suspended over a cavity by springs extending between a frame and the mass. The thermal sensor devices include stoppers that limit upward and/or downward movement of the springs and therefore the mass. These stoppers are formed from sidewalls supporting a top cap over the frame, springs, and mass. The stoppers are constructed by using various overlapping metal layers during fabrication. Details of forming the stoppers using these overlapping metal layers are contained here.
1 . A method of forming a thermal sensing pixel, comprising:
providing a base substrate having a buried oxide layer thereon, with a silicon layer being on the buried oxide layer, whereby the buried oxide layer and silicon layer are selectively etchable to form a frame structure, spring structures, and a central structure;
forming an active layer within the silicon layer to include at least one integrated circuit therein, the at least one integrated circuit formed in a position overlying the central structure;
forming a first insulator layer on the active layer;
forming a first metal layer in the first insulator layer, with metallized portions of the first metal layer overlying the spring structures;
forming a second insulator layer on the first metal layer;
forming a second metal layer in second insulator layer, and with a central metallized portion of the second metal layer overlying the at least one integrated circuit and central structure;
forming a third insulator layer on the second metal layer;
forming a third metal layer in the third insulator layer;
performing an etch to remove the third insulator layer, portions of the second insulator layer except those underlying metallized portions of the third metal layer, and portions of the first insulator layer except those underlying metallized portions of the third metal layer and second metal layer, as well as portions of the silicon layer and buried oxide layer underlying metallized portions of the third metal layer, second metal layer, and first metal layer to thereby form the frame structure, spring structures, and central structure; and
removing the metallized portions of the third metal layer, second metal layer, and first metal layer to thereby form a frame defined by the frame structure, springs defined by the spring structures, and a mass defined by the central structure, with a first stopper being defined by exposed portions of a bottom surface of the second insulator layer.
2 . The method of claim 1 , wherein the second metal layer is also formed to include peripheral metallized portions overlying certain metallized portions of the first metal layer; wherein the metallized portions of the third metal layer overlay peripheral metallized portions of the second metal layer but not the metallized portions of the first metal layer; wherein metallized portions of the third metal layer overlay the peripheral metallized portions of the second metal layer; wherein the etch also fails to remove the peripheral metallized portions of the second metal layer; and wherein the first stopper constrains movement of the spring in a first direction.
3 . The method of claim 2 , wherein a thickness of the first stopper is defined by a distance between the second metal layer and the first metal layer.
4 . The method of claim 1 , wherein metallized portions of the third metal layer overlay the metallized portions of the first metal layer.
5 . The method of claim 4 , wherein a thickness of the first stopper is defined by a distance between the third metal layer and the first metal layer.
6 . The method of claim 1 , wherein the second metal layer is also formed to include peripheral metallized portions overlying certain metallized portions of the first metal layer; further comprising, prior to formation of the first metal layer,
forming first vias extending through the first insulator layer, silicon layer, and buried oxide layer to reach the base substrate;
wherein the metallized portions of the first metal layer are formed to overlay the first vias;
further comprising forming a second via through the second insulator layer to reach a top surface of a metallized portion of the first metal layer;
wherein removal of the metallized portions of the first metal layer also removes material forming the first vias;
wherein removal of the peripheral metallized portions of the second metal layer also removes material forming the second via;
wherein removal of the material forming the first vias and the second via defines a pillar extending upwardly from the first insulator layer, with a second stopper being defined by exposed portions of a bottom surface of the second insulator forming the pillar; and
wherein the second stopper constrains movement of the spring.
7 . The method of claim 6 , wherein the metallized portions of the third metal layer overlay at least one of the peripheral metallized portions of the second metal layer so that removal of the peripheral metallized portions of the second metal layer defines a third stopper formed by exposed portions of a bottom of the third insulator layer.
8 . The method of claim 7 ,
further comprising: forming a fourth insulator layer on the third metal layer; and forming a fourth metal layer on the fourth metal layer;
wherein the etch also removes the fourth insulator layer except portions thereof underlying metallized portions of the fourth metal layer; and
wherein the metallized portions of the fourth metal layer are also removed.
9 . The method of claim 1 , further comprising affixing a top cap over the third insulator layer after the removal of the metallized portions of the third metal layer, second metal layer, and first metal layer.
10 . The method of claim 1 , wherein the at least one integrated circuit comprises at least one thermally isolated MOS (TMOS) sensor.
11 . The method of claim 1 ,
further comprising: forming a fourth insulator layer on the third metal layer; and forming a fourth metal layer on the fourth metal layer;
wherein the etch also removes the fourth insulator layer except portions thereof underlying metallized portions of the fourth metal layer; and
wherein the metallized portions of the fourth metal layer are also removed.
12 . A method of forming a thermal sensing pixel, comprising:
providing a base substrate having a buried oxide layer thereon, with a silicon layer being on the buried oxide layer, whereby the buried oxide layer and silicon layer are selectively etchable to form a frame structure, spring structures, and a central structure;
forming an active layer within the silicon layer to include at least one integrated circuit therein, the at least one integrated circuit formed in a position overlying the central structure;
forming a first insulator layer on the active layer;
forming a first metal layer in the first insulator layer, with metallized portions of the first metal layer overlying the spring structures;
forming a second insulator layer on the first metal layer;
forming a second metal layer in second insulator layer, and with a central metallized portion of the second metal layer overlying the at least one integrated circuit and central structure;
performing an etch to remove portions of the second insulator layer except those underlying metallized portions of the first insulator layer except those underlying metallized portions of the second metal layer, as well as portions of the silicon layer and buried oxide layer underlying metallized portions of the second metal layer and first metal layer to thereby form the frame structure, spring structures, and central structure; and
removing the metallized portions of the second metal layer and first metal layer to thereby form a frame defined by the frame structure, springs defined by the spring structures, and a mass defined by the central structure, with a first stopper being defined by exposed portions of a bottom surface of the second insulator layer.
13 . The method of claim 12 , wherein the second metal layer is also formed to include peripheral metallized portions overlying certain metallized portions of the first metal layer; wherein the etch also fails to remove peripheral metallized portions of the second metal layer and wherein the first stopper constrains movement of the spring in a first direction.
14 . The method of claim 13 , wherein the second metal layer is also formed to include peripheral metallized portions overlying certain metallized portions of the first metal layer; further comprising, prior to formation of the first metal layer,
forming first vias extending through the first insulator layer, silicon layer, and buried oxide layer to reach the base substrate;
wherein the metallized portions of the first metal layer are formed to overlay the first vias;
further comprising forming a second via through the second insulator layer to reach a top surface of a metallized portion of the first metal layer;
wherein removal of the metallized portions of the first metal layer also removes material forming the first vias;
wherein removal of the peripheral metallized portions of the second metal layer also removes material forming the second via;
wherein removal of the material forming the first vias and the second via defines a pillar extending upwardly from the first insulator layer, with a second stopper being defined by exposed portions of a bottom surface of the second insulator layer forming the pillar; and
wherein the second stopper constrains movement of the spring in a second direction opposite to the first direction.
15 . The method of claim 12 , further comprising affixing a top cap over the second insulator layer after the removal of the metallized portions of the second metal layer and first metal layer.
16 . The method of claim 12 , wherein the at least one integrated circuit comprises at least one thermally isolated MOS (TMOS) sensor.