DISPLAY DEVICE AND MANUFACTURING METHOD OF DISPLAY DEVICE
According to one embodiment, in a manufacturing method of a display device, a first etching stopper layer and a first sealing layer is formed. A second etching stopper layer and a second sealing layer is formed. A third etching stopper layer and a third sealing layer is formed. An etching rate of the first etching stopper layer is less than an etching rate of the first sealing layer. An etching rate of the second etching stopper layer is less than an etching rate of the second sealing layer. An etching rate of the third etching stopper layer is less than an etching rate of the third sealing layer. A thickness of each of the first etching stopper layer and the second etching stopper layer is greater than a thickness of the third etching stopper layer.
1 . A manufacturing method of a display device, comprising:
preparing a processing substrate by forming a first lower electrode of a first subpixel, a second lower electrode of a second subpixel and a third lower electrode of a third subpixel and by forming a rib comprising a first aperture overlapping the first lower electrode, a second aperture overlapping the second lower electrode and a third aperture overlapping the third lower electrode;
forming a first thin film including a first organic layer including a first light emitting layer over the first subpixel, the second subpixel and the third subpixel, a first etching stopper layer on the rib and the first organic layer, and a first sealing layer on the first etching stopper layer;
removing the first thin film in the second subpixel and the third subpixel such that the first thin film remains in the first subpixel;
forming a second thin film including a second organic layer including a second light emitting layer over the first subpixel comprising the first thin film, the second subpixel and the third subpixel, a second etching stopper layer on the rib and the second organic layer, and a second sealing layer on the second etching stopper layer;
removing the second thin film in the first subpixel and the third subpixel such that the second thin film remains in the second subpixel;
forming a third thin film including a third organic layer including a third light emitting layer over the first subpixel comprising the first thin film, the second subpixel comprising the second thin film and the third subpixel, a third etching stopper layer on the rib and the third organic layer, and a third sealing layer on the third etching stopper layer; and
removing the third thin film in the first subpixel and the second subpixel such that the third thin film remains in the third subpixel, wherein
an etching rate of the first etching stopper layer is less than an etching rate of the first sealing layer,
an etching rate of the second etching stopper layer is less than an etching rate of the second sealing layer,
an etching rate of the third etching stopper layer is less than an etching rate of the third sealing layer, and
a thickness of each of the first etching stopper layer and the second etching stopper layer is greater than a thickness of the third etching stopper layer.
2 . The manufacturing method of claim 1 , wherein
the thickness of the first etching stopper layer is greater than the thickness of the second etching stopper layer.
3 . The manufacturing method of claim 1 , wherein
the third light emitting layer is formed of a material which emits light in a blue wavelength range.
4 . The manufacturing method of claim 1 , wherein
the first light emitting layer is formed of a material which emits light in a red wavelength range,
the second light emitting layer is formed of a material which emits light in a green wavelength range, and
the third light emitting layer is formed of a material which emits light in a blue wavelength range.
5 . The manufacturing method of claim 1 , wherein
the first light emitting layer is formed of a material which emits light in a green wavelength range,
the second light emitting layer is formed of a material which emits light in a red wavelength range, and
the third light emitting layer is formed of a material which emits light in a blue wavelength range.
6 . The manufacturing method of claim 1 , wherein
the preparing the processing substrate further includes forming a partition including a lower portion located on the rib and an upper portion located on the lower portion and protruding from a side surface of the lower portion.
7 . The manufacturing method of claim 6 , wherein
the lower portion of the partition is formed of a conductive material.
8 . The manufacturing method of claim 7 , wherein
the forming the first thin film includes forming a first upper electrode which is in contact with the lower portion of the partition, as the first etching stopper layer on the first organic layer.
9 . The manufacturing method of claim 8 , wherein
the first upper electrode is formed of an alloy of magnesium and silver.
10 . The manufacturing method of claim 7 , wherein
the forming the first thin film includes:
forming a first upper electrode which is located on the first organic layer and is in contact with the lower portion of the partition;
forming a first transparent layer on the first upper electrode; and
forming a first inorganic layer as the first etching stopper layer on the first transparent layer.
11 . The manufacturing method of claim 10 , wherein
the first inorganic layer is formed of lithium fluoride or silicon oxide.
12 . The manufacturing method of claim 1 , wherein
the rib, the first sealing layer, the second sealing layer and the third sealing layer are formed of silicon nitride.
13 . A display device comprising:
a substrate;
a first lower electrode, a second lower electrode and a third lower electrode provided above the substrate;
a rib comprising a first aperture overlapping the first lower electrode, a second aperture overlapping the second lower electrode and a third aperture overlapping the third lower electrode;
a partition comprising a lower portion provided on the rib and an upper portion provided on the lower portion and protruding from a side surface of the lower portion;
a first organic layer provided on the first lower electrode in the first aperture and including a first light emitting layer;
a first etching stopper layer which is provided on the rib and the first organic layer and is in contact with the partition;
a first sealing layer which is provided on the first etching stopper layer and is in contact with the partition;
a second organic layer provided on the second lower electrode in the second aperture and including a second light emitting layer;
a second etching stopper layer which is provided on the rib and the second organic layer and is in contact with the partition;
a second sealing layer which is provided on the second etching stopper layer and is in contact with the partition;
a third organic layer provided on the third lower electrode in the third aperture and including a third light emitting layer;
a third etching stopper layer which is provided on the rib and the third organic layer and is in contact with the partition; and
a third sealing layer which is provided on the third etching stopper layer and is in contact with the partition, wherein
a thickness of each of the first etching stopper layer and the second etching stopper layer is greater than a thickness of the third etching stopper layer.
14 . The display device of claim 13 , wherein
the thickness of the first etching stopper layer is greater than the thickness of the second etching stopper layer.
15 . The display device of claim 13 , wherein
the third light emitting layer is formed of a material which emits light in a blue wavelength range.
16 . The display device of claim 13 , wherein
the first light emitting layer is formed of a material which emits light in a red wavelength range,
the second light emitting layer is formed of a material which emits light in a green wavelength range, and
the third light emitting layer is formed of a material which emits light in a blue wavelength range.
17 . The display device of claim 13 , wherein
the first light emitting layer is formed of a material which emits light in a green wavelength range,
the second light emitting layer is formed of a material which emits light in a red wavelength range, and
the third light emitting layer is formed of a material which emits light in a blue wavelength range.
18 . The display device of claim 13 , further comprising:
a first upper electrode provided on the first organic layer;
a first transparent layer provided on the first upper electrode; and
a first inorganic layer provided on the first transparent layer, wherein
at least one of the first upper electrode and the first inorganic layer is the first etching stopper layer.
19 . The display device of claim 18 , wherein
the first upper electrode is formed of an alloy of magnesium and silver.
20 . The display device of claim 18 , wherein
the first inorganic layer is formed of lithium fluoride or silicon oxide.