Handling system for fetching a substrate
The present invention relates to a handling system for fetching a substrate out of a substrate container, a use of such a handling system, a module comprising a substrate container and such a handling system and a method for fetching a substrate out of a substrate container. The handling system comprises a main assembly and a sub assembly. The sub assembly is moveably attached to the main assembly and moveable relative to the main assembly between a fetch position and a rest position. The sub assembly extends in the fetch position over the main assembly to fetch the substrate out of the substrate container and lies on the main assembly in the rest position to provide a contact between the main assembly and the substrate. The main assembly comprises a plurality of suction means to fasten and straighten the substrate.
1 . A handling system for fetching a substrate out of a substrate container, comprising:
a main assembly, and
a sub assembly,
wherein the sub assembly is moveably attached to the main assembly,
wherein the sub assembly is moveable relative to the main assembly between a fetch position and a rest position,
wherein the sub assembly in the fetch position extends over the main assembly to fetch the substrate out of the substrate container,
wherein the sub assembly in the rest position lies on the main assembly to provide a contact between a clamping means of the main assembly and the substrate,
wherein the main assembly comprises a plurality of suction means, and
wherein the plurality of suction means is configured to fasten and straighten the substrate.
2 . The handling system according to claim 1 , wherein the sub assembly is moveable in a movement direction parallel to a main extension direction of the main assembly.
3 . The handling system according to claim 1 , wherein the sub assembly is moveable in a horizontal direction.
4 . The handling system according to claim 1 , wherein the sub assembly is moveable relative to the main assembly by means of a rail system.
5 . The handling system according to claim 1 , wherein the sub assembly has a fork shape.
6 . The handling system according to claim 1 , wherein the suction means are equally dispensed over the main assembly to control a warpage of the substrate.
7 . The handling system according to claim 1 , wherein the suction means are only arranged along edges of the main assembly to contact the substrate only in touching areas along edges of the substrate.
8 . The handling system according to claim 7 , wherein the suction means are only arranged along edges of the main assembly at an underside of the main assembly opposite to an upper side of the main assembly, the underside of the main assembly facing away from the sub assembly.
9 . The handling system according to claim 1 , wherein spacer means are arranged at the main assembly to equally straighten the substrate in cooperation with the suction means.
10 . The handling system according to claim 1 , wherein the main assembly and/or the sub assembly comprise(s) fastening means for the substrate.
11 . The handling system according to claim 1 , wherein the main assembly and/or the sub assembly are/is plate shaped with a reinforcement against deflection and/or a recess.
12 . The handling system according to claim 1 , further comprising an interface to a robot for lifting the handling system relative to the substrate container, wherein the interface is arranged at the main assembly.
13 . The handling system according to claim 1 , wherein the main assembly comprises the clamping means, the clamping means comprising gripper arms or edge pushers to hold the substrate therebetween.
14 . The handling system according to claim 13 , wherein the sub assembly further comprises stoppers at an edge of the sub assembly along a length of the substrate to limit a movement of the substrate on the sub assembly.
15 . The handling system according claim 1 , wherein the clamping means are provided at an upper side of the main assembly facing the sub assembly and the clamping means are provided symmetrically, in pairs to contact the substrate on opposite edges of the substrate along a width of the substrate.
16 . The handling system according to claim 1 , wherein the main assembly is configured to transport the substrate to several substrate containers that are arranged around the handing system while holding the substrate by the suction means.
17 . A module comprising the substrate container and the handling system according to claim 1 , wherein the handling system is configured to fetch the substrate out of the substrate container by means of the sub assembly, particularly holding the substrate thereon by means of gravitational force.
18 . The module according to claim 17 , wherein the substrate container comprises fixtures to individually hold single substrates of a staple of substrates.
19 . The module according to claim 17 , wherein the substrate container comprises a lateral opening to fetch the substrate in a movement direction parallel to a main extension direction of a main assembly.
20 . The module according to claim 17 , further comprising a robot connected to a robot interface at the handling system to move the handling system relative to the substrate container.
21 . The module according to claim 17 , further comprising a storage station for handing over the substrate received from the clamping means of the main assembly to the suction means of the main assembly.
22 . The module according to claim 21 , wherein the storage station is further configured to image the substrate using at least one of QR code detection, barcode detection, or notch detection, and/or align the substrate with at least one of a QR code, a barcode, or a notch.