Substrate positioning for deposition machine
A deposition device is described. The deposition device has a substrate support and a laser imaging system disposed to image a portion of a substrate positioned on the substrate support. The laser imaging system comprises a laser source and an imaging unit, and is coupled to a deposition assembly disposed across the substrate support.
1. A method of imaging a feature on a substrate, comprising:
relatively scanning a substrate and a laser imaging system comprising a laser source and an imaging unit, wherein the imaging unit is a camera having sensitivity matched to an emission wavelength of the laser;
activating the imaging unit before an extremity of a feature of the substrate to be imaged reaches an illumination field of the laser source;
activating the laser source when a portion of the feature reaches the illumination field;
deactivating the laser source after an active time of less than 5 μsec; and
deactivating the imaging source after an imaging time, wherein the imaging time encompasses the active time.
2. The method of claim 1 , further comprising relatively positioning the substrate and the laser imaging system based on an expected location of the feature.
3. The method of claim 2 , further comprising automatically identifying a boundary of the feature in the image.
4. The method of claim 2 , further comprising automatically identifying a position error of the feature.
5. The method of claim 2 , further comprising automatically identifying a rotation error of the feature.
6. The method of claim 1 , wherein the laser imaging system is a first laser imaging system, and further comprising:
capturing a first image of the feature using the first laser imaging system; and
capturing a second image of the feature using a second laser imaging system.
7. The method of claim 6 , wherein the first laser imaging system and the second laser imaging system are coupled to a support extending across a substrate support on which the substrate is disposed for imaging.
8. A method, comprising:
relatively scanning a substrate and a laser imaging system comprising a fiber-coupled laser source and an imaging unit;
activating the imaging unit before an extremity of a feature of the substrate to be imaged reaches an illumination field of the laser source;
activating the laser source when a portion of the feature reaches the illumination field;
capturing an image of the feature while the laser source is activated;
deactivating the laser source after an active time; and
deactivating the imaging source after an imaging time, wherein the imaging time encompasses the active time.
9. The method of claim 8 , wherein the laser imaging system is coupled to a deposition assembly of a deposition device, and relatively scanning the substrate and the laser imaging system comprises moving the substrate during the active time.
10. The method of claim 8 , wherein the imaging unit is a camera having sensitivity matched to the emission wavelength of the laser source.
11. The method of claim 8 , further comprising automatically identifying a boundary of the feature in the image, automatically identifying a position error of the feature, automatically identifying a rotation error of the feature, or any combination thereof.
12. The method of claim 11 , wherein automatically identifying a boundary of the feature in the image comprises analyzing brightness of pixels of the image.
13. The method of claim 8 , further comprising determining when to activate the imaging unit and the laser source based on an expected position of the feature on the substrate and a movement rate of the substrate.
14. The method of claim 13 , further comprising using a substrate holder to move the substrate and determining a movement rate of the substrate based on signals from the substrate holder.
15. The method of claim 8 , wherein the image of the feature is captured while the substrate and the laser imaging system are in relative motion.
16. The method of claim 8 , wherein the active time is a time during which the feature is within the illumination field.
17. A method, comprising:
relatively scanning a substrate and a laser imaging system comprising a fiber-coupled laser source and an imaging unit;
activating the imaging unit before an extremity of a feature of the substrate to be imaged reaches an illumination field of the laser source;
activating the laser source when a portion of the feature reaches the illumination field;
capturing an image of the feature while the feature is located within the illumination field;
deactivating the laser source after an active time; and
deactivating the imaging source after an imaging time, wherein the imaging time encompasses the active time.
18. The method of claim 17 , wherein the image of the feature is captured while the substrate and the laser imaging system are in relative motion.