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App. No. 18/315,256 · Confirmation No. 6406

SUBSTRATE PROCESSING APPARATUS

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2026-07-16 NOA Notice of Allowance and Fees Due (PTOL-85) 7 View
2026-07-16 SRFW Search information including classification, databases and other search related notes 2 View
2026-07-16 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 3 View
2026-07-16 BIB Bibliographic Data Sheet 1 View
2026-07-16 SRNT Examiner's search strategy and results 20 View
2026-07-01 N417 Electronic Filing System Acknowledgment Receipt 2 View
2026-07-01 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2026-07-01 SPEC Specification 3 View
2026-07-01 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2026-07-01 CLM Claims 8 View
2026-07-01 WFEE Fee Worksheet (SB06) 1 View
2026-04-01 CTNF Non-Final Rejection 6 View
2026-04-01 892 List of references cited by examiner 1 View
2026-04-01 FWCLM Index of Claims 1 View
2026-04-01 SRFW Search information including classification, databases and other search related notes 1 View
2026-04-01 SRNT Examiner's search strategy and results 20 View
2024-11-14 NTC.PUB Notice of Publication 1 View
2023-09-07 OATH Oath or Declaration filed 2 View
2023-09-07 N417 Electronic Filing System Acknowledgment Receipt 2 View
2023-08-04 APP.FILE.REC Filing Receipt 3 View
2023-08-04 WFEE Fee Worksheet (SB06) 1 View
2023-08-04 M327 Miscellaneous Communication to Applicant - No Action Count 1 View
2023-07-31 N417.PYMT Electronic Fee Payment 2 View
2023-07-31 N417 Electronic Filing System Acknowledgment Receipt 2 View
2023-07-31 PEFR Applicant Response to Pre-Exam Formalities Notice 1 View
2023-07-31 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2023-05-31 APP.FILE.REC Filing Receipt 3 View
2023-05-31 WFEE Fee Worksheet (SB06) 1 View
2023-05-31 NTC.MISS.PRT Notice to File Missing Parts 3 View
2023-05-10 APP.TEXT Application body structured text document — View
2023-05-10 ADS Application Data Sheet 8 View
2023-05-10 SPEC Specification 48 View
2023-05-10 CLM Claims 12 View
2023-05-10 ABST Abstract 1 View
2023-05-10 DRW Drawings-only black and white line drawings 19 View
2023-05-10 N417 Electronic Filing System Acknowledgment Receipt 2 View
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Quick Facts
App. No.
18/315,256
Filed
2023-05-10
Pub. No.
US20240379396A1
Art Unit
3632