PEROVSKITE CELL WITH MULTIPLE HOLE TRANSPORT LAYERS AND PREPARATION METHOD THEREOF
A method for preparing a perovskite cell with multiple hole transport layers is described. The method includes a process of forming the multiple hole transport layers, where the process of forming the multiple hole transport layers includes the following steps: (1) sputtering a nickel oxide target material in a first atmosphere to form a first hole transport layer, where the first atmosphere contains argon and oxygen, and a volume ratio of the argon to the oxygen is approximately 0:1 to 1.5: 1; (2) performing annealing treatment on the first hole transport layer; and (3) sputtering the nickel oxide target material onto the first hole transport layer subjected to the annealing treatment in a second atmosphere to form a second hole transport layer, where the second atmosphere contains argon-containing gas and oxygen. A perovskite cell ( 100 ) with multiple hole transport layers prepared by using the above method is described.
1 . A method for preparing a perovskite cell with multiple hole transport layers, comprising a process of forming the multiple hole transport layers, wherein the process of forming the multiple hole transport layers comprises the following steps:
(1) sputtering a nickel oxide target material in a first atmosphere to form a first hole transport layer, wherein the first atmosphere contains argon and oxygen, and a volume ratio of the argon to the oxygen is approximately 0:1 to 1.5: 1;
(2) performing annealing treatment on the first hole transport layer; and
(3) sputtering the nickel oxide target material onto the first hole transport layer subjected to the annealing treatment in a second atmosphere to form a second hole transport layer, wherein the second atmosphere contains argon-containing gas and oxygen, a volume ratio of the argon-containing gas to the oxygen is approximately 1:0 to 4:1, and the argon-containing gas contains argon, and optionally hydrogen.
2 . The method according to claim 1 , wherein purity of nickel oxide is approximately 95 wt% or more.
3 . The method according to claim 1 , wherein magnetron sputtering is used in step ( 1 ) and/or step ( 3 ).
4 . The method according to claim 1 , wherein a thickness of the first hole transport layer and/or the second hole transport layer is approximately 5-50 nm.
5 . The method according to claim 1 , wherein the volume ratio of the argon to the oxygen in the first atmosphere is approximately 0:1 to 1:1.
6 . The method according to claim 1 , wherein in step ( 2 ), the annealing treatment is performed for approximately 1-45 min under a temperature of 200-500° C.
7 . The method according to claim 1 , wherein in step ( 2 ), the annealing treatment is performed under vacuum.
8 . The method according to claim 1 , wherein in step ( 2 ), the annealing treatment is performed in a magnetron sputtering device under a temperature of approximately 250-450° C. for approximately 5-40 min.
9 . The method according to claim 1 , wherein the volume ratio of the argon-containing gas to the oxygen in the second atmosphere is approximately 1:0 to 5:1.
10 . The method according to claim 1 , wherein the argon-containing gas contains argon and hydrogen, and a volume ratio of the argon to the hydrogen is approximately 90:10 to 99:1.
11 . The method according to claim 1 , wherein the argon-containing gas contains the argon and the hydrogen, and the volume ratio of the argon to the hydrogen is approximately 95:5.
12 . The method according to claim 1 , wherein in step ( 1 ) and/or in step ( 3 ), a sputtering power is approximately 300 W-10 kW, and an atmospheric pressure is approximately 1 × 10-4-100 Pa.
13 . The method according to claim 1 , further comprising at least one of the following steps:
providing a transparent substrate;
forming a transparent conductive layer on the transparent substrate;
forming the multiple hole transport layers on the transparent conductive layer ( 104 );
forming a perovskite layer on the outermost layer of the multiple hole transport layers;
forming an electron transport layer on the perovskite layer; and
forming a back electrode on the electron transport layer.
14 . The method according to claim 1 , further comprising at least one of the following steps:
providing a transparent substrate;
forming a transparent conductive layer on the transparent substrate;
forming an electron transport layer on the transparent conductive layer ( 104 );
forming a perovskite layer on the electron transport layer;
forming the multiple hole transport layers on the perovskite layer; and
forming a back electrode on the outermost layer of the multiple hole transport layers.
15 . A perovskite cell ( 100 ) prepared by using the method according to claim 1 , wherein the cell comprises multiple hole transport layers, and the multiple hole transport layers comprise at least a first hole transport layer ( 106 ) and a second hole transport layer ( 108 ).
16 . The perovskite cell ( 100 ) according to claim 15 , wherein the cell sequentially comprises a transparent substrate ( 102 ), a transparent conductive layer ( 104 ), the multiple hole transport layers, a perovskite layer ( 110 ), an electron transport layer ( 120 ), and a back electrode ( 140 ), or sequentially comprises a transparent substrate ( 102 ), a transparent conductive layer ( 104 ), an electron transport layer ( 120 ), a perovskite layer ( 110 ), the multiple hole transport layers, and a back electrode ( 140 ).
17 . The perovskite cell ( 100 ) according to claim 15 , wherein the multiple hole transport layers are a double-layer nickel oxide film composed of the first hole transport layer ( 106 ) and the second hole transport layer, and the film is about 10-100 nm thick.
18 . The perovskite cell ( 100 ) according to claim 16 , wherein the transparent conductive layer ( 104 ) is selected from one or more of indium tin oxide (ITO) and fluorine-doped tin dioxide (FTO).
19 . The perovskite cell ( 100 ) according to claim 16 , wherein the electron transport layer ( 120 ) is selected from one or more of [6, 6]-phenyl-C61-butyric acid methyl ester (PCBM), C60, BCP (2,9-dimethyl-4,7-diphenyl-1,10-phenanthroline), and SnO 2 .
20 . The perovskite cell ( 100 ) according to claim 16 , wherein the back electrode ( 140 ) is selected from one or more of ITO, tungsten-doped indium oxide (IWO), AZO, Au, Ag, Cu, Al, Ni, Cr, Bi, Pt, and Mg.
21 . The perovskite cell ( 100 ) according to claim 16 , wherein the transparent substrate ( 102 ) is made of glass.
22 . The perovskite cell ( 100 ) according to claim 16 , wherein the perovskite layer ( 110 ) contains one or more of CH 3 NH 3 PbI 3 , CH 3 NH 3 PbI 3-x Cl x , and CH 3 NH 3 PbI 3-x Br x , and 0<x<3.