Liquid ejection head
According to one embodiment, a liquid ejection head includes a substrate and an actuator on a first surface side of the substrate. The actuator has pressure chambers and air chambers. Each pressure chamber is connected to an opening in the substrate extending from a second surface side of the substrate to the pressure chamber. A manifold is on the second surface side of the substrate and connected to the opening in the substrate. A common electrode includes a portion on the actuator, a portion on a surface of the substrate, a portion on another surface of the substrate, a portion on a sidewall surface of the opening, and a portion on a side surface of the substrate. Individual electrodes each have a portion on a surface of the actuator and a portion on a surface of the substrate.
1 . A liquid ejection head, comprising:
a substrate;
an actuator on a first surface side of the substrate, the actuator including a plurality of pressure chambers and a plurality of air chambers, each air chamber of the plurality being between an otherwise adjacent pair of pressure chambers in the plurality of pressure chambers, each pressure chamber being connected to an opening in the substrate extending from a second surface side of the substrate to the pressure chamber;
a manifold on the second surface side of the substrate and connected to the opening in the substrate;
a common electrode including a portion on a front surface of the actuator, a portion on a first surface of the substrate on the first surface side of the substrate, a portion on a second surface on the second surface side of the substrate, a portion on an inner sidewall surface of the opening, and a portion on a side surface of the substrate;
a plurality of individual electrodes each including a portion on the front surface of the actuator and a portion on the first surface of the substrate;
a coating layer on the first surface side of the substrate and covering at least a part of the first surface of the substrate;
a frame member surrounding the actuator on the first surface side of the substrate; and
a nozzle plate including nozzles fluidly connected to the pressure chambers, wherein
the frame member is between the nozzle plate and the substrate.
2 . The liquid ejection head according to claim 1 , wherein the side surface of the substrate is outside the frame member.
3 . The liquid ejection head according to claim 1 , wherein
the inner peripheral sidewall surface of the opening is continuous with the first surface and the second surface, and
the manifold includes a fluid supply channel communicating with the opening.
4 . The liquid ejection head according to claim 3 , wherein the opening is a slot-shaped holed extending longitudinally along a length direction of the substrate.
5 . The liquid ejection head according to claim 3 , wherein the opening is a supply port.
6 . The liquid ejection head according to claim 1 , further comprising:
a discharge port that penetrates the substrate; and
a through-hole that penetrates the substrate at a position outside the frame member, wherein
the common electrode further includes at least one of a portion on an inner wall of the through-hole or a portion on an inner wall of the discharge port.
7 . The liquid ejection head according to claim 1 , wherein the actuator comprises piezoelectric members.
8 . The liquid ejection head according to claim 1 , wherein the common electrode comprises a nickel thin film.
9 . The liquid ejection head according to claim 1 , wherein the plurality of individual electrodes each comprise a nickel thin film.
10 . A liquid ejection apparatus, comprising:
a liquid ejection head including:
a substrate;
an actuator on a first surface side of the substrate, the actuator including a plurality of pressure chambers and a plurality of air chambers, each air chamber of the plurality being between an otherwise adjacent pair of pressure chambers in the plurality of pressure chambers, each pressure chamber being connected to an opening in the substrate extending from a second surface side of the substrate to the pressure chamber;
a manifold on the second surface side of the substrate and connected to the openings in the substrate;
a common electrode including a portion on a front surface of the actuator, a portion on a first surface of the substrate on the first surface side of the substrate, a portion on a second surface on the second surface side of the substrate, a portion on an inner sidewall surface of the opening, and a portion on a side surface of the substrate;
a plurality of individual electrodes each including a portion on the front surface of the actuator and a portion on the first surface of the substrate;
a coating layer on the first surface side of the substrate and covering at least a part of the first surface of the substrate;
a frame member surrounding the actuator on the first surface side of the substrate; and
a nozzle plate including nozzles fluidly connected to the pressure chambers, wherein
the frame member is between the nozzle plate and the substrate.
11 . The liquid ejection apparatus according to claim 10 , further comprising:
a discharge port that penetrates the substrate; and
a through-hole that penetrates the substrate at a position outside the frame member, wherein
the common electrode further includes at least one of a portion on an inner wall of the through-hole or a portion on an inner wall of the discharge port.