Method of forming light-emitting diodes with light coupling and conversion layers
Light-emitting sub-pixels and pixels for micro-light-emitting diode-based displays are provided. Also provided are methods of fabricating individual sub-pixels, pixels, and arrays of the pixels. The sub-pixels include a double-layered film that includes a coupling layer disposed over a light-emitting diode and a light-emission layer disposed over the coupling layer.
1. A method, comprising:
forming a first confinement feature over a first light-emitting diode of a substrate;
forming a first scattering layer comprising scattering particles over the first light-emitting diode;
forming a red light-emission layer comprising red-emitting particles and scattering particles over the first scattering layer;
forming a second confinement feature over a second light-emitting diode of the substrate;
forming a second scattering layer comprising scattering particles over the second light-emitting diode; and
forming a green light-emission layer comprising green-emitting particles and scattering particles over the second scattering layer.
2. The method of claim 1 , wherein at least one of the first scattering layer, the red light-emission layer, the second scattering layer, and the green light-emission layer is formed using inkjet printing.
3. The method of claim 1 , wherein each of the first light-emitting diode and the second light-emitting diode is a gallium nitride-based light-emitting diode integrated into the substrate.
4. The method of claim 1 , wherein each of the first light-emitting diode and the second light-emitting diode is a blue light-emitting diode.
5. The method of claim 1 , wherein each of the first light-emitting diode and the second light-emitting diode is an ultraviolet light-emitting diode.
6. The method of claim 5 , further comprising:
forming a third confinement feature over a third light-emitting diode of the substrate;
forming a coupling layer over the third-light emitting diode; and
forming a blue light-emission layer comprising blue-emitting particles and scattering particles over the coupling layer.
7. The method of claim 6 , wherein the first scattering layer forms a curved interface with the red light-emission layer, the second scattering layer forms a curved interface with the green light-emission layer, the coupling layer forms a curved interface with the blue light-emission layer, or a combination thereof.
8. The method of claim 1 , further comprising forming a protective layer over the red light-emission layer and the green light-emission layer.
9. A method of forming a color conversion display device, the method comprising forming a plurality of pixels on a display device substrate using the method of claim 1 .
10. A method of forming a display, the method comprising:
forming a plurality of pixels on a semiconductor substrate each pixel comprising a red sub-pixel, a green sub-pixel, and a blue sub-pixel, and each pixel formed by:
forming a first light-emitting diode, a second light-emitting diode, and a third light-emitting diode on the semiconductor substrate;
forming a first confinement feature over the first light-emitting diode;
forming a second confinement feature over the second light-emitting diode;
forming a red light emission-layer comprising red-emitting particles and scattering particles over the first light-emitting diode to provide the red sub-pixel;
forming a green light emission layer comprising green-emitting particles and scattering particles over the second light-emitting to provide the green sub-pixel; and
forming a blue light emission layer comprising blue light-emitting particles and scattering particles over the third light-emitting to provide the blue sub-pixel.
11. The method of claim 10 , wherein each of the first, second, and third light-emitting diodes is a gallium nitride-based light-emitting diode integrated into the substrate.
12. The method of claim 10 , wherein the green sub-pixels have emission surface areas that are larger than emission surface areas of the red sub-pixels and the emission surface areas of the blue sub-pixels.
13. The method of claim 10 , wherein at least one of the red light-emission layer, the green light-emission layer, and the blue light-emission layer is formed using inkjet printing.
14. A method, comprising:
forming a first confinement feature over a first light-emitting diode of a substrate;
forming a first scattering layer comprising scattering particles over the first light-emitting diode;
forming a red light-emission layer comprising red-emitting quantum dots and scattering particles over the first scattering layer, the red-emitting quantum dots having a graded concentration in at least a portion of the red light-emission layer;
forming a second confinement feature over a second light-emitting diode of the substrate;
forming a second scattering layer comprising scattering particles over the second light-emitting diode; and
forming a green light-emission layer comprising green-emitting quantum dots and scattering particles over the second scattering layer, the green-emitting quantum dots having a graded concentration in at least a portion of the green light-emission layer.
15. The method of claim 14 , wherein at least one of the red light-emission layer and the green light-emission layer is formed using inkjet printing.
16. The method of claim 14 , wherein each of the first light-emitting diode and the second light-emitting diode is a gallium nitride-based light-emitting diode integrated into the substrate.
17. The method of claim 14 , wherein each of the first light-emitting diode and the second light-emitting diode is a blue light-emitting diode.
18. The method of claim 14 , wherein each of the first light-emitting diode and the second light-emitting diode is an ultraviolet light-emitting diode.
19. The method of claim 18 , further comprising:
forming a third confinement feature over the third light-emitting diode; and
forming a blue light-emission layer comprising scattering particles over the third light-emitting diode.
20. The method of claim 14 , further comprising forming a protective layer over the red light-emission layer and the green light-emission layer.