Liquid ejection head
According to one embodiment, a liquid ejection head includes a substrate with an opening through which a first liquid can pass. An actuator is on a first side of the substrate and has a plurality of pressure chambers. A manifold is on a second side of the substrate. The manifold forms a first flow path for a second fluid. The liquid ejection head has first electrode with portions formed on an upper surface of the actuator, a surface on the first side of the substrate, an inner wall of the opening, and a surface on the second side of the substrate in a region outside the first flow path.
1 . A liquid ejection head, comprising:
a substrate with an opening through which a first liquid can pass;
an actuator on a first side of the substrate and having a plurality of pressure chambers for ejecting the first liquid, each pressure chamber being associated with an addressable piezoelectric element for deforming the pressure chamber;
a manifold on a second side of the substrate opposite the first side, the manifold forming a first flow path for a second fluid; and
a first electrode with portions formed on an upper surface of the actuator, a surface on the first side of the substrate, an inner wall of the opening, and a surface on the second side of the substrate in a region outside the first flow path, the first electrode being electrically connected in common to the addressable piezoelectric elements associated with each pressure chamber in the plurality of pressure chambers of the actuator.
2 . The liquid ejection head according to claim 1 , wherein the actuator has a plurality of air chambers between otherwise adjacent pairs of pressure chambers in the plurality of pressure chambers, the air chambers and pressure chambers alternating with each other along a first direction.
3 . The liquid ejection head according to claim 2 , further comprising:
a nozzle plate on the actuator and having nozzles communicating with the plurality of pressure chambers.
4 . The liquid ejection head according to claim 3 , wherein
the first flow path is formed in a first region between the manifold and the second surface of the substrate, and
a second flow path for the first liquid is formed in a second region between the manifold and the second surface.
5 . The liquid ejection head according to claim 4 , wherein the first electrode comprises at least a portion including a sputtered nickel film, an electroless plated nickel film, and an electrolytic plated gold film.
6 . The liquid ejection head according to claim 5 , further comprising:
a second electrode with portions on the upper surface of the actuator and the surface of the first side of the substrate, wherein
the second electrode has at least one portion with a film thickness less than a maximum film thickness of the first electrode.
7 . The liquid ejection head according to claim 6 , wherein
the opening is between a pair of actuators on the substrate in a second direction perpendicular to the first direction,
the first electrode is drawn out from a pressure chamber or an air chamber of one of the pair of actuators to a central region between the pair of actuators in second direction, and
the second electrode is drawn out from the air chambers or the pressure chamber of the one of the pair of actuators to an outer region outside the central region, the one of the pair of actuators being between the outer region and the central region in the second direction.
8 . A liquid ejection head, comprising:
a substrate with a slot-shaped opening extending lengthwise in a first direction;
a first actuator on a first surface of the substrate to a first side of the slot-shaped opening in a second direction perpendicular to the first direction;
a second actuator on the first surface of the substrate to a second side of the slot-shaped opening in the second direction
a manifold on a second surface of the substrate opposite the first surface, the manifold including grooves forming a first flow path for a cooling fluid and a second flow path for an ink, the second flow path being connected to the slot-shaped opening;
a common electrode connected to the first and second actuators with portions formed on an upper surface of the first and second actuators, the first surface of the substrate, a sidewall of the slot-shaped opening, and the second surface of the substrate; and
a plurality of individual electrodes connected to the first and second actuators, each individual electrode including portions formed on the upper surface of the first or second actuators and the first surface of the substrate.
9 . The liquid ejection head according to claim 8 , wherein the common electrode comprises at least a portion including a sputtered nickel film, an electroless plated nickel film, and an electrolytic plated gold film.
10 . The liquid ejection head according to claim 8 , wherein each individual electrode in the plurality of individual electrodes has at least one portion with a film thickness less than a maximum film thickness of the common electrode.
11 . The liquid ejection head according to claim 8 , wherein
the substrate includes a through-hole at a position in an end region of the substrate beyond the first and second actuators in the first direction, and
the common electrode further includes a portion on a sidewall of the through-hole.
12 . The liquid ejection head according to claim 11 , wherein the through-hole is a discharge port for the ink.
13 . The liquid ejection head according to claim 8 , wherein each individual electrode in the plurality of individual electrodes extends in the second direction to an outer edge of the substrate.
14 . The liquid ejection head according to claim 8 , wherein the upper surfaces of each of the first and second actuators include an inclined portion.
15 . A liquid ejection apparatus, comprising:
a liquid ejection head configured to eject a liquid from at least one nozzle, the liquid ejection head including:
a substrate with an opening through which the liquid can pass;
an actuator on a first side of the substrate and having a plurality of pressure chambers for ejecting the liquid, each pressure chamber being associated with an addressable piezoelectric element for deforming the pressure chamber;
a manifold on a second side of the substrate opposite the first side, the manifold forming a first flow path for a cooling fluid; and
a first electrode with portions formed on an upper surface of the actuator, a surface on the first side of the substrate, an inner wall of the opening, and a surface on the second side of the substrate in a region outside the first flow path, the first electrode being electrically connected in common to the addressable piezoelectric elements associated with each pressure chamber in the plurality of pressure chambers of the actuator.
16 . The liquid ejection apparatus according to claim 15 , wherein the actuator has a plurality of air chambers between otherwise adjacent pairs of pressure chambers in the plurality of pressure chambers, the air chambers and pressure chambers alternating with each other along a first direction.
17 . The liquid ejection apparatus according to claim 16 , further comprising:
a nozzle plate on the actuator, the nozzle plate including the at least one nozzle, the at least one nozzle communicating with one of the plurality of pressure chambers.
18 . The liquid ejection apparatus according to claim 17 , wherein
the first flow path is formed in a first region between the manifold and the second surface of the substrate, and
a second flow path for the liquid is formed in a second region between the manifold and the second surface.
19 . The liquid ejection apparatus according to claim 15 , wherein the first electrode comprises at least a portion including a sputtered nickel film, an electroless plated nickel film, and an electrolytic plated gold film.
20 . The liquid ejection apparatus according to claim 15 , further comprising:
a second electrode with portions on the upper surface of the actuator and the surface of the first side of the substrate, wherein
the second electrode has at least one portion with a film thickness less than a maximum film thickness of the first electrode.