Display device and manufacturing method thereof
According to one embodiment, a display device includes a lower electrode, a rib including a pixel aperture, a partition including a lower portion on the rib and an upper portion protruding from a side surface of the lower portion, an upper electrode facing the lower electrode, an organic layer between the electrodes, and a sealing layer covering a display element and the partition. The rib includes a first rib layer and a second rib layer which covers the first rib layer. The sealing layer and the first rib layer are formed of a first inorganic material. The second rib layer is formed of a second inorganic material different from the first inorganic material.
1 . A display device comprising:
a lower electrode;
a rib comprising a pixel aperture which overlaps the lower electrode;
a partition comprising a lower portion provided on the rib and an upper portion which protrudes from a side surface of the lower portion;
an upper electrode which faces the lower electrode;
an organic layer which is located between the lower electrode and the upper electrode, is in contact with the lower electrode through the pixel aperture, and emits light based on a potential difference between the lower electrode and the upper electrode; and
a sealing layer which continuously covers a display element including the lower electrode, the upper electrode and the organic layer and the partition, wherein
the rib includes a first rib layer and a second rib layer which covers the first rib layer,
the sealing layer and the first rib layer are formed of a first inorganic material,
the second rib layer is formed of a second inorganic material different from the first inorganic material, and
the second inorganic material is silicon oxynitride.
2 . The display device of claim 1 , wherein
the first inorganic material is silicon nitride.
3 . The display device of claim 1 , wherein
a thickness of the rib is less than a height of the partition.
4 . The display device of claim 1 , wherein
a thickness of the rib is greater than or equal to 1.5 times a thickness of the lower electrode and less than or equal to 5 times the thickness of the lower electrode.
5 . The display device of claim 1 , wherein
a thickness of the rib is greater than or equal to 200 nm and less than or equal to 600 nm.
6 . The display device of claim 5 , wherein
a thickness of the second rib layer is greater than or equal to 50 nm and less than or equal to 100 nm.
7 . The display device of claim 1 , wherein
the display element further comprises a cap layer which covers the upper electrode.
8 . A manufacturing method of a display device, including:
forming a lower electrode;
forming a first rib layer which covers the lower electrode by a first inorganic material;
forming a second rib layer which covers the first rib layer by a second inorganic material different from the first inorganic material;
forming a rib comprising a pixel aperture which overlaps the lower electrode by patterning the first rib layer and the second rib layer;
forming a partition comprising a lower portion provided on the rib and an upper portion which protrudes from a side surface of the lower portion;
forming an organic layer which is in contact with the lower electrode through the pixel aperture;
forming an upper electrode which covers the organic layer; and
forming a sealing layer which covers a display element including the lower electrode, the upper electrode and the organic layer by the first inorganic material, wherein
the second inorganic material is silicon oxynitride.
9 . The manufacturing method of claim 8 , wherein
the first inorganic material is silicon nitride.
10 . The manufacturing method of claim 8 , further including:
forming a resist on the sealing layer; and
removing a part of the sealing layer located above the partition by a dry etching using the resist as a mask.
11 . The manufacturing method of claim 10 , further including removing a part of the organic layer and a part of the upper electrode by an etching using the resist as a mask.
12 . The manufacturing method of claim 8 , wherein
a thickness of the rib is less than a height of the partition.
13 . The manufacturing method of claim 8 , wherein
a thickness of the rib is greater than or equal to 1.5 times a thickness of the lower electrode and less than or equal to 5 times the thickness of the lower electrode.
14 . The manufacturing method of claim 8 , wherein
a thickness of the rib is greater than or equal to 200 nm and less than or equal to 600 nm.
15 . The manufacturing method of claim 8 , wherein
a thickness of the second rib layer is greater than or equal to 50 nm and less than or equal to 100 nm.
16 . The manufacturing method of claim 8 , further including forming a cap layer which covers the upper electrode before forming the sealing layer.
17 . A display device comprising:
a lower electrode;
a rib comprising a pixel aperture which overlaps the lower electrode;
a partition comprising a lower portion provided on the rib and an upper portion which protrudes from a side surface of the lower portion;
an upper electrode which faces the lower electrode;
an organic layer which is located between the lower electrode and the upper electrode, is in contact with the lower electrode through the pixel aperture, and emits light based on a potential difference between the lower electrode and the upper electrode; and
a sealing layer which continuously covers a display element including the lower electrode, the upper electrode and the organic layer and the partition, wherein
the rib includes a first rib layer and a second rib layer which covers the first rib layer,
the sealing layer and the first rib layer are formed of a first inorganic insulating material, and
the second rib layer is formed of a second inorganic insulating material different from the first inorganic insulating material.
18 . The display device of claim 17 , wherein
the first rib layer includes
a lower surface in direct contact with the lower electrode,
an upper surface opposing the lower surface, and
a side surface connecting the lower surface to the upper surface, and
the second rib layer includes
a lower surface in direct contact with the upper surface of the first rib layer and covering an entirety of the upper surface of the first rib layer, and
an upper surface opposing the lower surface of the second rib layer and in direct contact with the lower portion of the partition.
19 . The display device of claim 18 , wherein
the lower portion of the partition includes
a first metal layer formed of a first metal material, and
a second metal layer disposed on the first metal layer and formed of a second metal material, and
a thickness of the second metal layer is greater than a thickness of the first metal layer.
20 . The display device of claim 19 , wherein
the first metal material is different from the second metal material.