COMPOSITIONS AND PROCESSES FOR DEPOSITING CARBON-DOPED SILICON-CONTAINING FILMS
Described herein are compositions for depositing a carbon-doped silicon containing film comprising: a precursor comprising at least one compound selected from the group consisting of: an organoaminosilane having a formula of R 8 N(SiR 9 LH) 2 , wherein R 8 , R 9 , and L are defined herein. Also described herein are methods for depositing a carbon-doped silicon-containing film using the composition wherein the method is one selected from the following: cyclic chemical vapor deposition (CCVD), atomic layer deposition (ALD), plasma enhanced ALD (PEALD) and plasma enhanced CCVD (PECCVD).
1 . A method of forming a carbon-doped silicon nitride film via an atomic layer deposition process, the method comprising the steps of:
a. providing a substrate in a reactor;
b. introducing into the reactor a precursor comprising at least one organoaminosilane having a formula of R 5 (NR 3 R 4 )H 2 , wherein
R 3 and R 4 are independently selected from the group consisting of a C 1 to C 10 linear or branched alkyl group, a C 3 to C 10 cyclic alkyl group, a linear or branched C 2 to C 10 alkenyl group, a linear or branched C 2 to C 10 alkynyl group, a C 5 to C 10 aromatic group, and a C 3 to C 10 saturated or unsaturated heterocyclic group; and wherein R 3 and R 4 can also form a cyclic or alkyl substituted cyclic ring;
R 5 is selected from the group consisting of a C 1 to C 10 linear or branched alkyl group, a C 3 to C 10 cyclic alkyl group, a linear or branched C 2 to C 10 alkenyl group, a linear or branched C 2 to C 10 alkynyl group, a C 5 to C 10 aromatic group, and a C 3 to C 10 saturated or unsaturated heterocyclic group;
c. purging the reactor with a purge gas;
d. introducing a nitrogen source into the reactor wherein the nitrogen source is selected from the group consisting of ammonia, hydrazine, monoalkylhydrazine, dialkylhydrazine, nitrogen, nitrogen/hydrogen, ammonia plasma, nitrogen plasma, nitrogen/hydrogen plasma, and mixture thereof; and
e. purging the reactor with a purge gas,
wherein steps b through e are repeated until a desired thickness of the film is obtained.
2 . The method of claim 1 wherein the at least one organoaminoalkylsilane is selected from the group consisting of di-iso-propylaminomethylsilane, di-sec-butylaminomethylsilane, and di-iso-propylaminophenylsilane.
3 . The method of claim 1 wherein the at least one organoaminoalkylsilane comprises an organoaminoalkylsilane having a formula of (Me 2 N)R 5 SiH 2 wherein R 5 is selected from the group consisting of Me, Et, n Pr, i Pr, n Bu, i Bu, s Bu, t Bu, and phenyl.
4 . The method of claim 1 wherein the at least one organoaminoalkylsilane comprises an organoaminoalkylsilane having a formula of (Et 2 N)R 5 SiH 2 wherein R 5 is selected from the group consisting of Me, Et, n Pr, i Pr, n Bu, i Bu, s Bu, t Bu, and phenyl.
5 . The method of claim 1 wherein the at least one organoaminoalkylsilane comprises an organoaminoalkylsilane having a formula of ( i Pr 2 N)R 5 SiH 2 wherein R 5 is selected from the group consisting of Me, Et, n Pr, i Pr, n Bu, i Bu, s Bu, t Bu, and phenyl.
6 . The method of claim 1 wherein the at least one organoaminoalkylsilane comprises an organoaminoalkylsilane having a formula of ( s Bu 2 N)R 5 SiH 2 wherein R 5 is selected from the group consisting of Me, Et, n Pr, i Pr, n Bu, i Bu, s Bu, t Bu, and phenyl.
7 . The method of claim 1 wherein the at least one organoaminoalkylsilane comprises an organoaminoalkylsilane having the formula (2,6-dimethylpiperidino)R 5 SiH 2 wherein R 5 is selected from the group consisting of Me, Et, n Pr, i Pr, n Bu, i Bu, s Bu, t Bu, isomers of pentyl, vinyl, phenyl, and alkyl substituted phenyl.
8 . The method of claim 1 wherein the at least one organoaminoalkylsilane comprises an organoaminoalkylsilane having the formula (phenylmethylamino)R 5 SiH 2 wherein R 5 is selected from the group consisting of Me, Et, n Pr, i Pr, n Bu, i Bu, s Bu, t Bu, isomers of pentyl, vinyl, phenyl, and alkyl substituted phenyl.
9 . A method of forming a carbon-doped silicon oxide film via an atomic layer deposition process, the method comprising the steps of:
a. providing a substrate in a reactor;
b. introducing into the reactor at least one compound selected from the group consisting of:
an organoaminosilane having a formula of R 5 (NR 3 R 4 )H 2 , wherein
R 3 and R 4 are independently selected from the group consisting of a C 1 to C 10 linear or branched alkyl group, a C 3 to C 10 cyclic alkyl group, a linear or branched C 2 to C 10 alkenyl group, a linear or branched C 2 to C 10 alkynyl group, a C 5 to C 10 aromatic group, and a C 3 to C 10 saturated or unsaturated heterocyclic group; and wherein R 3 and R 4 can also form a cyclic or alkyl substituted cyclic ring;
R 5 is selected from the group consisting of a C 1 to C 10 linear or branched alkyl group, a C 3 to C 10 cyclic alkyl group, a linear or branched C 2 to C 10 alkenyl group, a linear or branched C 2 to C 10 alkynyl group, a C 5 to C 10 aromatic group, and a C 3 to C 10 saturated or unsaturated heterocyclic group;
c. purging the reactor with a purge gas;
d. introducing an oxygen source into the reactor wherein the oxygen source is selected from the group consisting of water, water plasma, oxygen, peroxide, oxygen plasma, ozone, NO, NO 2 , carbon monoxide, carbon dioxide, and combinations thereof; and
e. purging the reactor with a purge gas, wherein steps b through e are repeated until a desired thickness of the film is obtained.
10 . The method of claim 9 wherein the at least one organoaminoalkylsilane is selected from the group consisting of di-iso-propylaminomethylsilane, di-sec-butylaminomethylsilane, and di-iso-propylaminophenylsilane.
11 . The method of claim 9 wherein the at least one organoaminoalkylsilane comprises an organoaminoalkylsilane having a formula of (Me 2 N)R 5 SiH 2 wherein R 5 is selected from the group consisting of Me, Et, n Pr, i Pr, n Bu, i Bu, s Bu, t Bu, and phenyl.
12 . The method of claim 9 wherein the at least one organoaminoalkylsilane comprises an organoaminoalkylsilane having a formula of (Et 2 N)R 5 SiH 2 wherein R 5 is selected from the group consisting of Me, Et, n Pr, i Pr, n Bu, i Bu, s Bu, t Bu, and phenyl.
13 . The method of claim 9 wherein the at least one organoaminoalkylsilane comprises an organoaminoalkylsilane having a formula of ( i Pr 2 N)R 5 SiH 2 wherein R 5 is selected from the group consisting of Me, Et, n Pr, i Pr, n Bu, i Bu, s Bu, t Bu, and phenyl.
14 . The method of claim 9 wherein the at least one organoaminoalkylsilane comprises an organoaminoalkylsilane having a formula of ( s Bu 2 N)R 5 SiH 2 wherein R 5 is selected from the group consisting of Me, Et, n Pr, i Pr, n Bu, i Bu, s Bu, t Bu, and phenyl.
15 . The method of claim 9 wherein the at least one organoaminoalkylsilane comprises an organoaminoalkylsilane having the formula (2,6-dimethylpiperidino)R5SiH 2 wherein R 5 is selected from the group consisting of Me, Et, n Pr, i Pr, n Bu, i Bu, s Bu, t Bu, isomers of pentyl, vinyl, phenyl, and alkyl substituted phenyl.
16 . The method of claim 9 wherein the at least one organoaminoalkylsilane comprises an organoaminoalkylsilane having the formula (phenylmethylamino)R 5 SiH 2 wherein R 5 is selected from the group consisting of Me, Et, n Pr, i Pr, n Bu, i Bu, s Bu, t Bu, isomers of pentyl, vinyl, phenyl, and alkyl substituted phenyl.