Optical device
An optical device includes a support portion, a first movable portion having an optical surface, a second movable portion having a frame shape and surrounding the first movable portion, a first coupling portion coupling the first movable portion and the second movable portion to each other, a second coupling portion coupling the second movable portion and the support portion to each other, and a softening member which has a softening characteristic and to which stress is applied when the first movable portion swings around a first axis. When viewed in a direction perpendicular to the optical surface, the softening member is provided to a portion of the second movable portion, the portion extending between a drive element and the first coupling portion, and is not electrically connected to an outside.
1. An optical device comprising:
a support portion;
a first movable portion having an optical surface;
a second movable portion having a frame shape and surrounding the first movable portion;
a first coupling portion coupling the first movable portion and the second movable portion to each other so as for the first movable portion to be swingable around a predetermined axis;
a second coupling portion coupling the second movable portion and the support portion to each other;
a drive element provided to the second movable portion and electrically connected to an outside; and
a softening member which has a softening characteristic, the softening member being a member different from the second movable portion and formed by material different from material of the second movable portion,
wherein the softening member is disposed in a groove formed in the second movable portion or on a surface of the second movable portion and is not electrically connected to the outside.
2. The optical device according to claim 1 ,
wherein the softening member is provided to a position where a maximum stress to be applied to the softening member when the first movable portion swings around the predetermined axis is 1/20 times or more a maximum stress to be applied to the first coupling portion when the first movable portion swings around the predetermined axis.
3. The optical device according to claim 1 ,
wherein the softening member is provided to a position where a maximum stress to be applied to the softening member when the first movable portion swings around the predetermined axis is smaller than a 0.2% proof stress or a yield stress of the softening member.
4. The optical device according to claim 1 ,
wherein the softening member is made of metal or resin material.
5. The optical device according to claim 1 ,
wherein the first coupling portion includes a widened portion whose width increases as approaching the first movable portion.
6. The optical device according to claim 1 ,
wherein the first coupling portion includes a widened portion whose width increases as approaching the second movable portion.
7. The optical device according to claim 1 ,
wherein when viewed in a direction perpendicular to the optical surface, the softening member is provided to a portion of the second movable portion extending between the drive element and the first coupling portion.
8. The optical device according to claim 1 ,
wherein the first coupling portion includes a linear portion and the softening member is provided to a portion of the second movable portion extending between the drive element and the linear portion.
9. An optical device comprising:
a support portion;
a movable portion having an optical surface;
a coupling portion coupling the movable portion and the support portion to each other so as for the movable portion to be swingable around a predetermined axis;
a drive element provided to at least one of the support portion and the movable portion and electrically connected to an outside; and
a softening member which has a softening characteristic, the softening member being a member different from the movable portion and formed by material different from material of the movable portion,
wherein the softening member is disposed in a groove formed in the movable portion or on a surface of the movable portion, and is not electrically connected to the outside.
10. The optical device according to claim 9 ,
wherein the softening member is provided to a position where a maximum stress to be applied to the softening member when the movable portion swings around the predetermined axis is 1/20 times or more a maximum stress to be applied to the coupling portion when the movable portion swings around the predetermined axis.
11. The optical device according to claim 9 ,
wherein the softening member is provided to a position where a maximum stress to be applied to the softening member when the movable portion swings around the predetermined axis is smaller than a 0.2% proof stress or a yield stress of the softening member.
12. The optical device according to claim 9 ,
wherein the softening member is made of metal or resin material.
13. The optical device according to claim 9 ,
wherein the coupling portion includes a widened portion whose width increases as approaching the movable portion.
14. The optical device according to claim 9 ,
wherein the coupling portion includes a widened portion whose width increases as approaching the support portion.
15. The optical device according to claim 9 ,
wherein the drive element is provided to the movable portion and when viewed in a direction perpendicular to the optical surface, the softening member is provided to a portion of the movable portion extending between the drive element and the coupling portion.
16. The optical device according to claim 9 ,
wherein the coupling portion includes a linear portion, the drive element is provided to the movable portion, and when viewed in a direction perpendicular to the optical surface, the softening member is provided to a portion of the movable portion extending between the drive element and the linear portion.
17. An optical device comprising:
a support portion;
a movable portion having an optical surface;
a coupling portion coupling the movable portion and the support portion to each other so as for the movable portion to be swingable around a predetermined axis;
a drive element provided to at least one of the support portion and the movable portion and electrically connected to an outside; and
a softening member which has a softening characteristic, the softening member being a member different from the support portion and formed by material different from material of the support portion,
wherein the softening member is disposed in a groove formed in the support portion or on a surface of the support portion, and is not electrically connected to the outside.
18. The optical device according to claim 17 ,
wherein the softening member is provided to a position where a maximum stress to be applied to the softening member when the movable portion swings around the predetermined axis is 1/20 times or more a maximum stress to be applied to the coupling portion when the movable portion swings around the predetermined axis.
19. The optical device according to claim 17 ,
wherein the softening member is provided to a position where a maximum stress to be applied to the softening member when the movable portion swings around the predetermined axis is smaller than a 0.2% proof stress or a yield stress of the softening member.
20. The optical device according to claim 17 ,
wherein the softening member is made of metal or resin material.
21. The optical device according to claim 17 ,
wherein the coupling portion includes a widened portion whose width increases as approaching the movable portion.
22. The optical device according to claim 17 ,
wherein the coupling portion includes a widened portion whose width increases as approaching the support portion.
23. The optical device according to claim 17 ,
wherein the drive element is provided to the movable portion, the support portion is provided with an external terminal, and when viewed in a direction perpendicular to the optical surface, the softening member is provided to a portion of the support portion extending between the external terminal and the coupling portion.
24. The optical device according to claim 17 , further comprising a frame portion surrounding the support portion and another coupling portion coupling the frame portion and the support portion to each other,
wherein when viewed in a direction perpendicular to the optical surface, the softening member is provided to a portion of the support portion extending between the drive element and the coupling portion.