Pressure sensor with flat flange and central elevated portion
A sensor module includes an organic substrate, a MEMS pressure sensor mounted to the organic substrate, and a unitary lid mounted on the substrate. The unitary lid includes a central elevated portion housing the MEMS pressure sensor, an aperture in the central elevated portion, and a flat flange extending from the central elevated portion to an edge of the organic substrate.
1 . A sensor module, comprising:
an organic substrate;
a MEMS pressure sensor mounted to the substrate;
a unitary lid mounted on the substrate and including:
a central elevated portion housing the MEMS pressure sensor;
an aperture in the central elevated portion; and
a flat flange extending from the central elevated portion toward an edge of the organic substrate, wherein a width of the flat flange from a first edge of the flat flange to an opposite edge of flat flange is at least five times as large as a height of the central elevated portion.
2 . The sensor module of claim 1 , comprising an ASIC electrically coupled to the MEMS pressure sensor and mounted on the substrate below the central elevated portion.
3 . The sensor module of claim 1 , comprising a sealing gel within central elevated portion.
4 . The sensor module of claim 1 , wherein the central elevated portion is less than 3 mm in height above the substrate.
5 . The sensor module of claim 1 , wherein the central aperture is less than 1 mm in diameter.
6 . The sensor module of claim 1 , wherein the substrate has a rectangular surface having four lateral edges, wherein the flat flange extends to within 0.2 mm of each lateral edge.
7 . The sensor module of claim 1 , wherein the flange has grooves in a top surface.
8 . The sensor module of claim 1 , wherein the organic substrate has a circular top surface, wherein the flange has a circular edge.
9 . A method, comprising:
mounting a MEMS pressure sensor on a substrate;
mounting a unitary lid on the substrate, the unitary lid including:
a central elevated portion housing the MEMS pressure sensor;
an aperture in the central elevated portion; and
a flat flange extending from the central elevated portion to an edge of the substrate, wherein a width of the flat flange from a first edge of the flat flange to an opposite edge of flat flange is at least five times as large as a height of the central elevated portion;
partially filling the central elevated portion with a sealing gel;
performing a first curing process of the sealing gel;
filling a remainder of the central elevated portion with the sealing gel after performing the first curing process; and
performing a second curing process of the sealing gel.
10 . The method of claim 9 , wherein mounting the unitary lid to the substrate includes gluing the flange to the substrate.
11 . The method of claim 9 , comprising mounting an ASIC to the substrate prior to mounting the unitary lid to the substrate.
12 . The method of claim 9 , comprising gluing a housing of an electronic device to a top surface of the flange.
13 . The method of claim 12 , wherein the gluing the housing to the top surface of the flange includes gluing the housing to a grooved portion of the top surface.
14 . The method of claim 9 , wherein the unitary lid is stainless steel.
15 . The method of claim 9 , wherein the central elevated portion is less than 3 mm in height above the substrate.
16 . The method of claim 9 , wherein the substrate has a rectangular surface having four lateral edges, wherein the flat flange extends to within 1 mm of each lateral edge.
17 . A method, comprising:
generating, with a MEMS pressure sensor coupled to a substrate, analog pressure signals;
receiving, with an ASIC electrically coupled to the MEMS pressure sensor, digital pressure signals based on the analog pressure signals;
passing the digital pressure signals to a control circuit of an electronic device, wherein the MEMS pressure sensor and the ASIC are positioned within a central elevated portion of a unitary lid mounted on the substrate and including an aperture in the central elevated portion and a flat flange extending from the central elevated portion to an edge of the substrate, wherein a width of the flat flange from a first edge of the flat flange to an opposite edge of flat flange is at least five times as large as a height of the central elevated portion.
18 . The method of claim 17 , wherein the electronic device is a smart watch.
19 . The method of claim 17 , wherein the electronic device is a smart phone.