MANUFACTURING DEVICE OF DISPLAY DEVICE
According to one embodiment, a manufacturing device of a display device includes a conveyance mechanism for conveying a processing substrate in a first direction, and first, second, third and fourth evaporation portions arranged in order in the first direction. The first evaporation portion includes a plurality of evaporation chambers for forming an organic layer. The second evaporation portion includes an evaporation chamber for forming an upper electrode. The third evaporation portion includes an evaporation chamber for forming a first transparent layer. The fourth evaporation portion includes an evaporation chamber for forming a second transparent layer having a refractive index less than a refractive index of the first transparent layer on the first transparent layer.
1 . A manufacturing device of a display device, the manufacturing device comprising:
a conveyance mechanism for conveying a processing substrate in a first direction, the processing substrate comprising a lower electrode located above a substrate, a rib comprising an aperture overlapping the lower electrode, and a partition which includes a lower portion located on the rib and an upper portion located on the lower portion and protruding from a side surface of the lower portion;
a preprocessing portion which is connected to an upstream side in the first direction of the conveyance mechanism and performs preprocessing for the processing substrate;
a post-processing portion which is connected to a downstream side in the first direction of the conveyance mechanism and performs post-processing for the processing substrate; and
first, second, third and fourth evaporation portions arranged in order in the first direction of the conveyance mechanism, wherein
the first evaporation portion comprises a plurality of evaporation chambers for forming an organic layer on the lower electrode in the aperture,
the second evaporation portion comprises an evaporation chamber for forming an upper electrode on the organic layer,
the third evaporation portion comprises an evaporation chamber for forming a first transparent layer on the upper electrode, and
the fourth evaporation portion comprises an evaporation chamber for forming a second transparent layer having a refractive index less than a refractive index of the first transparent layer on the first transparent layer.
2 . The manufacturing device of claim 1 , wherein
the preprocessing portion comprises:
a first load lock chamber in which the processing substrate is carried;
a baking portion which performs a process of drying the processing substrate carried in the preprocessing portion;
a plasma processing portion which reforms a surface of the lower electrode; and
a securing portion which secures the processing substrate to a carrier, and
the conveyance mechanism is configured to convey the carrier to which the processing substrate is secured in the first direction.
3 . The manufacturing device of claim 2 , wherein
the post-processing portion comprises:
a detachment portion which detaches the processing substrate from the carrier;
a first deposition portion which forms a first inorganic insulating layer on the second transparent layer;
an etching portion which reduces a thickness of the first inorganic insulating layer by performing anisotropic dry etching for the first inorganic insulating layer;
a second deposition portion which forms a second inorganic insulating layer on the first inorganic insulating layer; and
a second load lock chamber out of which the processing substrate is carried, and
a conveyance path of the processing substrate from the first load lock chamber to the second load lock chamber is maintained as a vacuum.
4 . The manufacturing device of claim 3 , wherein
the conveyance mechanism is configured to convey the carrier which has been detached from the processing substrate in the detachment portion in a second direction which is an opposite direction of the first direction.
5 . The manufacturing device of claim 4 , wherein
the conveyance mechanism comprises a first rail for conveying the carrier to which the processing substrate is secured in the first direction, and a second rail for conveying the carrier detached from the processing substrate in the second direction.
6 . The manufacturing device of claim 1 , wherein
the first evaporation portion comprises:
an evaporation chamber for forming a hole injection layer;
an evaporation chamber for forming a hole transport layer;
an evaporation chamber for forming an electron blocking layer;
an evaporation chamber for forming a light emitting layer;
an evaporation chamber for forming a hole blocking layer;
an evaporation chamber for forming an n-type charge generation layer;
an evaporation chamber for forming a p-type charge generation layer;
an evaporation chamber for forming an electron transport layer; and
an evaporation chamber for forming an electron injection layer.
7 . The manufacturing device of claim 1 , wherein
the first evaporation portion comprises:
an evaporation chamber for forming a hole injection layer;
an evaporation chamber for forming a hole transport layer;
an evaporation chamber for forming an electron blocking layer;
an evaporation chamber for forming a first light emitting layer;
an evaporation chamber for forming a second light emitting layer which emits light having a wavelength different from a wavelength of the first light emitting layer;
an evaporation chamber for forming a third light emitting layer which emits light having a wavelength different from the wavelengths of the first light emitting layer and the second light emitting layer;
an evaporation chamber for forming a hole blocking layer;
an evaporation chamber for forming an n-type charge generation layer;
an evaporation chamber for forming a p-type charge generation layer;
an evaporation chamber for forming an electron transport layer; and
an evaporation chamber for forming an electron injection layer.
8 . The manufacturing device of claim 2 , wherein
the securing portion comprises a mechanism for perpendicularly raising the processing substrate conveyed horizontally.
9 . The manufacturing device of claim 8 , wherein
the securing portion is connected to the conveyance mechanism.
10 . The manufacturing device of claim 9 , wherein
the first evaporation portion comprises an evaporation chamber for forming a hole injection layer as part of the organic layer at a position adjacent to the securing portion.
11 . The manufacturing device of claim 3 , wherein
the detachment portion is connected to the conveyance mechanism.
12 . The manufacturing device of claim 11 , wherein
the detachment portion comprises a mechanism for horizontally laying down the processing substrate conveyed perpendicularly.
13 . The manufacturing device of claim 12 , wherein
the fourth evaporation portion is adjacent to the detachment portion.
14 . A manufacturing device of a display device, the manufacturing device comprising:
a conveyance mechanism for conveying a processing substrate comprising a lower electrode in a first direction;
a preprocessing portion which is connected to an upstream side in the first direction of the conveyance mechanism and performs preprocessing for the processing substrate;
a post-processing portion which is connected to a downstream side in the first direction of the conveyance mechanism and performs post-processing for the processing substrate; and
a plurality of evaporation chambers arranged in order in the first direction of the conveyance mechanism, wherein
the preprocessing portion comprises a securing portion which secures the processing substrate to a carrier,
the post-processing portion comprises a detachment portion which detaches the processing substrate from the carrier,
the securing portion is adjacent to, of the plurality of evaporation chambers, the evaporation chamber located at an end of the upstream side in the first direction, and
the detachment portion is adjacent to, of the plurality of evaporation chambers, the evaporation chamber located at an end of the downstream side in the first direction.
15 . The manufacturing device of claim 14 , wherein
the plurality of evaporation chambers include evaporation chambers for forming an organic layer, an upper electrode, a first transparent layer and a second transport layer having a refractive index less than a refractive index of the first transparent layer, respectively.
16 . The manufacturing device of claim 15 , wherein
the securing portion is adjacent to, of the plurality of evaporation chambers, the evaporation chamber for forming a hole injection layer as part of the organic layer.
17 . The manufacturing device of claim 15 , wherein
the detachment portion is adjacent to, of the plurality of evaporation chambers, the evaporation chamber for forming the second transparent layer.
18 . The manufacturing device of claim 14 , wherein
the plurality of evaporation chambers comprise, between the securing portion and the detachment portion:
an evaporation chamber for forming a first light emitting layer;
an evaporation chamber for forming a second light emitting layer which emits light having a wavelength different from a wavelength of the first light emitting layer; and
an evaporation chamber for forming a third light emitting layer which emits light having a wavelength different from the wavelengths of the first light emitting layer and the second light emitting layer.
19 . A manufacturing device of a display device, the manufacturing device comprising:
a conveyance mechanism for conveying a processing substrate comprising a lower electrode in a first direction;
a preprocessing portion which is connected to an upstream side in the first direction of the conveyance mechanism and performs preprocessing for the processing substrate;
a post-processing portion which is connected to a downstream side in the first direction of the conveyance mechanism and performs post-processing for the processing substrate; and
a plurality of evaporation chambers arranged in order in the first direction of the conveyance mechanism, wherein
the preprocessing portion comprises a securing portion which secures the processing substrate to a carrier,
the post-processing portion comprises a detachment portion which detaches the processing substrate from the carrier, and
the plurality of evaporation chambers comprise, between the securing portion and the detachment portion:
an evaporation chamber for forming a first light emitting layer;
an evaporation chamber for forming a second light emitting layer which emits light having a wavelength different from a wavelength of the first light emitting layer; and
an evaporation chamber for forming a third light emitting layer which emits light having a wavelength different from the wavelengths of the first light emitting layer and the second light emitting layer.
20 . The manufacturing device of claim 19 , wherein
the securing portion is adjacent to, of the plurality of evaporation chambers, the evaporation chamber for forming a hole injection layer.