Detection device
A detection device includes a substrate having a detection region, a coupling region, and a wiring region between the detection region and the coupling region, a plurality of detection elements disposed in the detection region of the substrate, a plurality of terminals disposed in the coupling region of the substrate and electrically coupled to the detection elements, a plurality of coupling wires adjacently disposed with a gap interposed therebetween in the wiring region of the substrate and electrically coupling the detection elements to the terminals, an insulating layer provided to the wiring region of the substrate and covering the coupling wires, and a plurality of through holes formed in the wiring region of the substrate and passing through the substrate and the insulating layer in a thickness direction between the coupling wires.
1. A detection device comprising:
a substrate having a detection region, a coupling region, and a wiring region between the detection region and the coupling region;
a plurality of sensors disposed in the detection region of the substrate;
a plurality of terminals disposed in the coupling region of the substrate and electrically coupled to the sensors;
a plurality of coupling wires arranged with a gap interposed therebetween in the wiring region of the substrate and electrically coupling the sensors to the terminals;
an insulating layer provided to the wiring region of the substrate and covering the coupling wires; and
a plurality of through holes formed in the wiring region of the substrate, the through holes passing through from an upper surface of the insulating layer to a lower surface of the substrate, in a thickness direction between the coupling wires.
2. The detection device according to claim 1 , further comprising:
a housing having a curved surface; and
a base provided to the housing and having a flat surface, wherein
the detection region and the wiring region of the substrate are provided to the curved surface of the housing, and
the coupling region is provided to the flat surface of the base.
3. The detection device according to claim 1 , wherein the through holes are arrayed along an extending direction of the coupling wires.
4. The detection device according to claim 1 , wherein the through holes have a larger opening area as the distance between the coupling wires adjacently disposed is larger.
5. The detection device according to claim 1 , wherein a larger number of the through holes are formed as the distance between the coupling wires adjacently disposed is larger.
6. The detection device according to claim 1 , wherein the through holes have a circular, elliptical, or rectangular shape.
7. The detection device according to claim 1 , wherein the through holes have a slit shape.
8. The detection device according to claim 1 , wherein
the through holes have a slit shape, and
the through holes each comprise:
a first slit portion extending along an extending direction of the coupling wires; and
a second slit portion intersecting the first slit portion.
9. The detection device according to claim 1 , wherein
the coupling wires are adjacently disposed in a first direction with a gap interposed therebetween, and
an opening width of the through holes in the first direction is substantially equal to the distance between the coupling wires adjacently disposed in the first direction.
10. The detection device according to claim 1 , wherein the coupling wires have a meander shape or a zigzag line shape.
11. The detection device according to claim 1 , wherein
the coupling wires are arranged in a first direction with a gap interposed therebetween, and
the distance between the coupling wires adjacently disposed in the first direction is larger at an outer end of the wiring region of the substrate in the first direction than at a center of the wiring region in the first direction.
12. The detection device according to claim 1 , wherein
the coupling wires are adjacently disposed in a first direction with a gap interposed therebetween, and
the number of the through holes formed between the coupling wires adjacently disposed in the first direction is larger at an outer end of the wiring region of the substrate in the first direction than at a center of the wiring region in the first direction.
13. The detection device according to claim 1 , wherein the sensors are force sensors configured to detect force applied to the force sensors.
14. The detection device according to claim 1 , wherein the sensors are optical sensors configured to detect light incident on the optical sensors.