IP Library Patent Application 18498239
Patent Application
App. No. 18/498,239

WEB COATING COOLING DRUM WITH TURBULATORS FOR HIGH FLUX METALLIC LITHIUM DEPOSITION

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Quick Facts
Patent No.
US None
App. No.
18/498,239
Abstract

The present disclosure relates to vapor deposition systems and methods. In one embodiment, a drum for vapor deposition is provided. The drum includes a shell having gas slits and a cooling drum. The cooling drum includes an exterior region, an interior region, a first fluid channel partially defined by the exterior region and the interior region, and a first inlet. The first fluid channel forms a helical channel around a central axis of the cooling drum. The first inlet is in fluid communication with a first outlet by the first fluid channel.

Claims (42)

1 . A drum for vapor deposition, the drum comprising:

a shell having gas slits; and

a cooling drum comprising:

an exterior region;

an interior region;

a first fluid channel partially defined by the exterior region and the interior region, the first fluid channel forming a helical channel around a central axis of the cooling drum; and

a first inlet in fluid communication with a first outlet by the first fluid channel.

2 . The drum of claim 1 , wherein the cooling drum is a monolithic drum made of copper or aluminum alloy.

3 . The drum of claim 1 , wherein the first fluid channel comprises a turbulating surface feature.

4 . The drum of claim 1 , wherein the cooling drum further has a second fluid channel radially offset from the first cooling channel and partially defined by the exterior region and the interior region, the second fluid channel forming a helical channel around the central axis of the cooling drum.

5 . The drum of claim 4 , wherein the second fluid channel connects a second fluid inlet to a second fluid outlet.

6 . The drum of claim 4 , wherein the first inlet and a second inlet are disposed within a first face of the cooling drum.

7 . The drum of claim 4 , wherein the first inlet and second outlet are disposed within a first face of the cooling drum and a second inlet and first outlet are disposed within a second face of the cooling drum.

8 . The drum of claim 1 , wherein a distance between the shell and a curved surface of the exterior region of the cooling drum is between about 1 millimeter and about 5 millimeters.

9 . The drum of claim 1 , wherein the first inlet is disposed proximate a first face of the cooling drum and the first outlet is disposed proximate a second face of the cooling drum, the second face separated by a curved face of the cooling drum.

10 . The drum of claim 1 , wherein a thickness of the exterior region is less than 10 millimeters.

11 . A roll-to-roll deposition system comprising:

an evaporation unit;

a plurality of tension rollers; and

a drum, disposed between the plurality of tension rollers and the evaporator unit, the drum comprising:

a shell having gas slits; and

a cooling drum comprising:

an exterior region;

an interior region;

a first fluid channel partially defined by the exterior region and the interior region, the first fluid channel forming a helical channel around a central axis of the cooling drum; and

a first inlet in fluid communication with a first outlet by the first fluid channel.

12 . The roll-to-roll deposition system of claim 11 , wherein the cooling drum is monolithic and made of copper or aluminum alloy.

13 . The roll-to-roll deposition system of claim 11 , wherein the cooling drum further has a second fluid channel radially offset from the first cooling channel and partially defined by the exterior region and the interior region, the second fluid channel forming a helical channel around the central axis of the cooling drum.

14 . The roll-to-roll deposition system of claim 13 , wherein the first inlet and second inlet are disposed on a first side of the cooling drum.

15 . The roll-to-roll deposition system of claim 13 , wherein the first inlet is disposed on a first side of the cooling drum and a second inlet is disposed on a second side of the cooling drum.

16 . roll-to-roll deposition system of claim 11 , wherein the first fluid channel comprises a turbulating surface feature.

17 . A method of applying an anode material to a substrate comprising:

supplying a coolant to a drum, the drum comprising:

a shell; and

a cooling drum disposed radially inward of the shell and having a first fluid channel, the first fluid channel partially defined by an exterior region of the cooling drum and an interior region of the cooling drum, the first fluid channel forming a helical channel around a central axis of the cooling drum, the first fluid channel having a turbulating surface feature;

flowing coolant through the first fluid channel;

flowing a gas through a cavity between the shell and the cooling drum;

rolling a substrate onto the shell; and

evaporating as anode material onto the substrate.

18 . The method of claim 17 , wherein the coolant is flowed at a velocity of less than 1 meter per second.

19 . The method of claim 17 , wherein a gas cushion is formed between the substrate and the shell by the gas leaving the shell through a plurality of gas slits, the gas cushion being less than 15 micrometers.

20 . The method of claim 17 , wherein the flow of the coolant has a Reynolds number between about 2300 and about 4000.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 24, 2025
From: APPLIED MATERIALS, INC.
To: ELEVATED MATERIALS US LLC
Reel/Frame 071036/0188 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 23, 2024
From: KLEINER, TIMOTHY; ISHIKAWA, DAVID MASAYUKI; MOYERS, KENNETH; ACHARYA, SUMEDH DATTATRAYA; SIVARAMAKRISHNAN, VISWESWAREN
To: APPLIED MATERIALS, INC.
Reel/Frame 066209/0545 →