Semiconductor devices and hybrid transistors
Semiconductor devices are disclosed. A semiconductor device may include a hybrid transistor configured in a vertical orientation. The hybrid transistor may include a gate electrode, a drain material, a source material, and a channel material operatively coupled between the drain material and the source material. The source material and the drain material include a first material and the channel material includes a second, different material.
1. A semiconductor device, comprising:
a hybrid transistor configured in a vertical orientation and including:
a gate electrode;
a drain material;
a source material; and
a channel material operatively coupled between the drain material and the source material, wherein the source material and the drain material include a first material and the channel material includes a second, different material, wherein the channel material has a length that is less than a length of the gate electrode.
2. The semiconductor device of claim 1 , wherein the source material and the drain material include a doped semiconductor material.
3. The semiconductor device of claim 2 , wherein the doped semiconductor material is selected from the group consisting of Si, Ge, SiGe, SiCo, and a transition metal dichalcogenide.
4. The semiconductor device of claim 1 , wherein the channel material includes an oxide semiconductor material.
5. The semiconductor device of claim 1 , further comprising a base material, wherein the source material, channel material, and drain material are stacked in the vertical orientation relative to the base material.
6. The semiconductor device of claim 5 , wherein at least a portion of the source material extends above a bottom of the gate electrode and at least a portion of the drain material extends below a top of the gate electrode.
7. The semiconductor device of claim 1 , wherein portions of the source material and the drain material that extend into a channel region have a lower doping concentration than a higher doping concentration of portions of the source material and the drain material outside of the channel region.
8. A semiconductor device, comprising:
a hybrid transistor configured in a vertical orientation and including:
a gate electrode;
a drain material;
a source material; and
a channel material operatively coupled between the drain material and the source material, wherein the source material and the drain material include a first material and the channel material includes a second, different material, wherein the channel material exhibits a tapered width from the source material to the drain material.
9. The semiconductor device of claim 1 , wherein a bandgap from the channel material to the source material, and from the channel material to the drain material is uniformly graded.
10. A semiconductor device, comprising:
a hybrid transistor comprising:
a channel region including an IGZO material;
a drain region and a source region disposed on opposing ends of the channel region, the drain region and the source region each including a doped silicon material; and
a gate electrode, wherein the gate electrode is one of a single-sided gate, a dual-sided gate, or a tri-sided gate.
11. The semiconductor device of claim 10 , further comprising a memory cell incorporating the hybrid transistor as its access transistor.
12. The semiconductor device of claim 11 , further comprising a memory array incorporating the memory cell.
13. A semiconductor device, comprising:
a base material; and
a transistor supported by the base material and comprising:
a gate electrode;
a drain region including a drain material;
a source region including a source material; and
a channel region including a channel material operatively coupled between the drain material and the source material, wherein the source region, the channel region, and the drain region extend in a stack substantially vertically from the base material; and
a first conductive material coupled with the source material and a second conductive material coupled to the drain material, wherein each of the first conductive material and the second conductive material is arranged substantially perpendicular to the source material, the channel material, and the drain material.
14. The semiconductor device of claim 13 , wherein at least one of the source material or the drain material includes a low bandgap high mobility material relative to the channel material that is a high bandgap low mobility material.
15. The semiconductor device of claim 13 , wherein the channel region includes an IGZO material and each of the drain region and the source region includes a doped semiconductor material.
16. The semiconductor device of claim 15 , wherein the doped semiconductor material is selected from the group consisting of Si, SiGe, and SiCo.