SYSTEMS AND METHODS FOR SUPPORTING AND CONVEYING A SUBSTRATE
A system may include a support surface for supporting a substrate, a plurality of first passages arranged to distribute flows of a first gas to establish a gas bearing to float the substrate above the support surface, and a plurality of second passages arranged to distribute flows of a second gas to convey the substrate along the support surface. A method may include floating a substrate above a support surface of a substrate support apparatus via a gas bearing; and while floating the substrate, conveying the substrate along the support surface by flowing gas toward a surface of the substrate and in a nonperpendicular direction relative to the surface of the substrate.
1 . A system, comprising:
a printing system comprising a printhead assembly arranged to dispense a material for deposition onto a substrate;
a substrate floatation table having a support surface, the substrate floatation table comprising a plurality of gas float passages and a plurality of gas conveyance passages arranged in the support surface to support and transport a substrate; and
a gripper system disposed along the substrate floatation table to grip the substrate.
2 . The system of claim 1 , wherein the gas float passages and the gas conveyance passages are integral with the support surface of the substrate support apparatus.
3 . The system of claim 1 , wherein the support surface comprises a plurality of segments separated from one another by one or more gaps, and the gas conveyance passages comprise a plurality of nozzles disposed in the one or more gaps between the segments.
4 . The system of claim 1 , wherein the gas float passages extend in a direction perpendicular to the support surface and the gas conveyance passages extend in a direction that is not perpendicular to the support surface.
5 . The system of claim 1 , wherein the plurality of gas float passages, the plurality of gas conveyance passages, or both comprises a nozzle passage having a nozzle disposed therein.
6 . The system of claim 5 , wherein the nozzle has an angled portion and the nozzle passage extends in a direction perpendicular to the support surface.
7 . The system of claim 1 , wherein the plurality of gas float passages, the plurality of gas conveyance passages, or both comprises a plurality of nozzle passages, each nozzle passage having a nozzle disposed therein.
8 . The system of claim 7 , wherein each of the nozzles has an angled portion, and the angled portions of the nozzles point in different directions.
9 . A system, comprising:
a substrate floatation table having a support surface, the substrate floatation table comprising a plurality of gas float passages and a plurality of gas conveyance passages arranged in the support surface to support and transport a substrate;
a printing system comprising a bridge disposed across the substrate floatation table;
a printhead assembly movably mounted on the bridge; and
a gripper system disposed along the substrate floatation table to grip the substrate.
10 . The system of claim 9 , wherein the gas float passages and the gas conveyance passages are integral with the support surface of the substrate support apparatus, and the gas float passages extend in a direction perpendicular to the support surface.
11 . The system of claim 9 , wherein the support surface comprises a plurality of segments separated from one another by one or more gaps, and the gas conveyance passages comprise a plurality of nozzles disposed in the one or more gaps between the segments.
12 . The system of claim 9 , wherein the gas float passages extend in a direction perpendicular to the support surface and the gas conveyance passages extend in a direction that is not perpendicular to the support surface.
13 . The system of claim 9 , wherein the plurality of gas float passages, the plurality of gas conveyance passages, or both comprises a nozzle passage having an angled nozzle disposed therein.
14 . The system of claim 9 , further comprising a gas source fluidly coupled to the gas float passages and the gas conveyance passages.
15 . The system of claim 9 , wherein the plurality of gas float passages, the plurality of gas conveyance passages, or both comprises a plurality of nozzle passages, each nozzle passage has an angled nozzle disposed therein, and the angled portions of the nozzles point in different directions.
16 . The system of claim 9 , further comprising at least one controller configured to pulse a gas to the gas conveyance passages while providing a constant gas flow to the gas float passages.
17 . The system of claim 9 , further comprising a first controller to control gas flow to the gas float passages and a second controller to control gas flow to the gas conveyance passages.
18 . A system, comprising:
a substrate floatation table having a support surface, the substrate floatation table comprising a plurality of gas float passages and a plurality of gas conveyance passages arranged in the support surface to support and transport a substrate, each of the plurality of gas float passages extending in a direction perpendicular to the support surface and each of the plurality of gas conveyance passages extending in a direction that is not perpendicular to the support surface;
a gas supply fluidly coupled to the plurality of gas float passages and the plurality of gas conveyance passages;
a first controller to control gas flow from the gas supply to the gas float passages;
a second controller to control gas flow from the gas supply to the gas conveyance passages;
a printing system comprising a bridge disposed across the substrate floatation table;
a printhead assembly movably mounted on the bridge; and
a gripper system disposed along the substrate floatation table to grip the substrate.
19 . The system of claim 18 , wherein the plurality of gas float passages, the plurality of gas conveyance passages, or both comprises a plurality of nozzle passages, each nozzle passage has an angled nozzle disposed therein, and the angled portions of the nozzles point in different directions.
20 . The system of claim 19 , wherein at least a portion of the nozzles are rotatable.