Robot having second robot arm with second end effector in a second retracted position
An apparatus including a drive, a first robot arm, a mechanical drive transmission, and a second robot arm. The first robot arm includes a first upper arm, a first forearm and a first end effector, where the first upper arm is connected to the drive at a first axis of rotation, and where the first end effector comprises two laterally spaced substrate holding areas. The mechanical drive transmission connects the drive to the first forearm at a first joint between the first upper arm and the first forearm for the drive to rotate the first forearm, where the mechanical drive transmission includes at least one non-circular pulley and a first band. The second robot arm includes a second upper arm, a second forearm and a second end effector, where the second upper arm is connected to the drive at the first axis of rotation.
1 . An apparatus comprising:
a drive;
a first robot arm comprising a first upper arm, a first forearm and a first end effector, where the first upper arm is connected to the drive at a first axis of rotation, and where the first end effector comprises two laterally spaced substrate holding areas;
a mechanical drive transmission connecting the drive to the first forearm at a first joint between the first upper arm and the first forearm for the drive to rotate the first forearm, where the mechanical drive transmission comprises at least one non-circular pulley and a first band; and
a second robot arm comprising a second upper arm, a second forearm and a second end effector, where the second upper arm is connected to the drive at the first axis of rotation, and where the second end effector comprises two laterally spaced substrate holding areas,
where the first robot arm is configured to locate the first end effector in a first retracted position stacked over the second end effector, where the first robot arm is configured to extend the first end effector from the retracted position in a first direction above the second end effector to a first extended position without moving the second robot arm,
where the second robot arm is configured to locate the second end effector in a second retracted position stacked under the first end effector, where the second robot arm is configured to extend the second end effector from the second retracted position in the first direction below the first end effector to a second extended position without moving the first robot arm.
2 . The apparatus as claimed in claim 1 where the first upper arm and the first forearm have different effective lengths, and where the second upper arm and the second forearm have different effective lengths.
3 . The apparatus as claimed in claim 2 where the first forearm and the second forearm have different effective lengths.
4 . The apparatus as claimed in claim 3 where the first upper arm and the second upper arm have different effective lengths.
5 . The apparatus as claimed in claim 1 where the first upper arm and the first forearm have same effective lengths.
6 . The apparatus as claimed in claim 1 where the first end effector has a general “U” shape, and where the first forearm is connected to the first end effector at an off-center location on the general “U” shape.
7 . The apparatus as claimed in claim 1 where the first end effector has a general “V” shape, and where the first forearm is connected to the first end effector at an off-center location on the general “V” shape.
8 . The apparatus as claimed in claim 1 where, when the first and second robot arms are in the first and second retracted positions, respectively, the first upper arm is located between the second upper arm and the second forearm.
9 . The apparatus as claimed in claim 8 where the first end effector is connected to a bottom side of the first forearm.
10 . The apparatus as claimed in claim 9 where the first second effector is connected to a top side of the second forearm and, when the first and second robot arms are in their respective first and second retracted positions, the second end effector is aligned under and directly opposite a bottom of the first end effector.
11 . The apparatus as claimed in claim 1 further comprising a second band connecting the first end effector, at a wrist joint of the first end effector to the first forearm, to the first joint.
12 . An apparatus comprising:
a drive comprising coaxial drive shafts;
a first robot arm comprising a first upper arm, a first forearm and a first end effector, where the first upper arm is connected to a first one of the coaxial drive shafts, where the first end effector comprises two laterally spaced substrate holding areas, and where the first forearm is connected to the first end effector at a first wrist connection which is offset from a first centerline of the first end effector;
a mechanical drive transmission connecting the drive to the first forearm at a first joint between the first upper arm and the first forearm for the drive to rotate the first forearm, where the mechanical drive transmission comprises at least one non-circular pulley and a first band; and
a second robot arm comprising a second upper arm, a second forearm and a second end effector, where the second upper arm is connected to a second one of the coaxial drive shafts, and where the second end effector comprises two laterally spaced substrate holding areas, and where the second forearm is connected to the second end effector at a second wrist connection which is offset from a second centerline of the second end effector,
where the first robot arm is configured to locate the first end effector in a first retracted position stacked over the second end effector, where the first robot arm is configured to extend the first end effector from the retracted position in a first direction above the second end effector to a first extended position,
where the second robot arm is configured to locate the second end effector in a second retracted position stacked under the first end effector, where the second robot arm is configured to extend the second end effector from the second retracted position in the first direction below the first end effector to a second extended position.
13 . The apparatus as claimed in claim 12 where, when the first and second robot arms are in their respective first and second retracted positions, the second centerline is located substantially aligned below the first centerline.
14 . The apparatus as claimed in claim 12 where the first centerline of the first end effector is aligned with a straight path of extension of the first end effector from the first retracted position to the first extended position.
15 . The apparatus as claimed in claim 12 where the first robot arm is configured to extend the first end effector from the retracted position in the first direction without moving the second robot arm.
16 . The apparatus as claimed in claim 12 where the second robot arm is configured to extend the second end effector from the second retracted position to the second extended position without moving the first robot arm.
17 . The apparatus as claimed in claim 12 where the first upper arm and the first forearm have different effective lengths, and where the second upper arm and the second forearm have different effective lengths.
18 . The apparatus as claimed in claim 12 where the first forearm and the second forearm have different effective lengths.
19 . The apparatus as claimed in claim 12 where the first upper arm and the second upper arm have different effective lengths.
20 . The apparatus as claimed in claim 12 where the first upper arm and the first forearm have same effective lengths.
21 . The apparatus as claimed in claim 12 where the first end effector has a general “U” shape, and where the first forearm is connected to the first end effector at an off-center location on the general “U” shape.
22 . The apparatus as claimed in claim 12 where the first end effector has a general “V” shape, and where the first forearm is connected to the first end effector at an off-center location on the general “V” shape.
23 . The apparatus as claimed in claim 12 where, when the first and second robot arms are in the first and second retracted positions, respectively, the first upper arm is located between the second upper arm and the second forearm.
24 . The apparatus as claimed in claim 23 where the first end effector is connected to a bottom side of the first forearm.
25 . The apparatus as claimed in claim 24 where the first second effector is connected to a top side of the second forearm and, when the first and second robot arms are in their respective first and second retracted positions, the second end effector is aligned under and directly opposite a bottom of the first end effector.