IP Library Granted Patent US 12,607,501
Granted Patent B2
US 12,607,501 · App. 18/689,885 · Granted Apr 21, 2026

Conditioning device for reducing positional sensitivity of laser beam on photodetector and method of using the same

Inventor: Patrick Zabawa (Beaverton, OR)
Assignee: Electro Scientific Industries, Inc.
G01J1/0474G01J1/0429G01J1/0437G02B1/04G02B5/0278G02B27/286
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Quick Facts
Patent No.
US 12,607,501
App. No.
18/689,885
Granted
Apr 21, 2026
Kind
B2
Abstract

In a system, a conditioning device includes a diffuser, a lens configured to focus a beam of laser energy onto the diffuser and an iris configured to transmit at least a portion of the beam of laser energy transmitted by the diffuser.

Claims (25)

1 . A system, comprising:

a conditioning device including:

a diffuser;

a lens configured to focus a beam of laser energy onto the diffuser; and

an iris configured to transmit at least a portion of the beam of laser energy transmitted by the diffuser.

2 . The system of claim 1 , wherein the conditioning device further includes a waveplate arranged between the diffuser and the lens.

3 . The system of claim 2 , wherein the waveplate is a quarter waveplate.

4 . The system of claim 1 , further comprising a photodetector having an optical input arranged to receive the beam of laser energy output from the conditioning device.

5 . The system of claim 1 , further comprising a deflector operative to deflect the beam of laser energy and arranged optically upstream of the conditioning device.

6 . The system of claim 1 , wherein the diffuser is formed of non-porous PTFE.

7 . The system of claim 1 , wherein the diffuser is formed of porous PTFE.

8 . The system of claim 1 , wherein the diffuser is not formed of porous PTFE, alumina, fused silica, white glass, polypropylene or cellulose triacetate (TAC).

9 . The system of claim 1 , wherein the diffuser is formed of a material that exhibits no fluorescence in presence of laser energy having a wavelength in the ultra-violet (UV) range of the electromagnetic spectrum.

10 . The system of claim 1 , wherein the conditioning device does not include a color filter.

11 . A method, comprising:

focusing a beam of laser energy having a wavelength in the ultra-violet (UV) range of the electromagnetic spectrum;

diffusing the focused beam of laser energy; and

propagating at least a portion of the diffused beam of laser energy through an aperture and onto a photodetector.

12 . The method of claim 11 , further comprising propagating the focused beam of laser energy through a waveplate before diffusing the focused beam of laser energy.

13 . The method of claim 12 , wherein the waveplate is a quarter waveplate.

14 . The method of claim 11 , further comprising deflecting the beam of laser energy, wherein focusing the beam of laser energy includes focusing the deflected beam of laser energy.

15 . The method of claim 11 , wherein diffusing the beam of laser energy includes diffusing the beam of laser energy using a diffuser formed of non-porous PTFE.

16 . The method of claim 11 , wherein diffusing the beam of laser energy includes diffusing the beam of laser energy using a diffuser formed of porous PTFE.

17 . The method of claim 11 , wherein diffusing the beam of laser energy includes diffusing the beam of laser energy using a diffuser that is not formed of porous PTFE, alumina, fused silica, white glass, polypropylene or cellulose triacetate (TAC).

18 . The method of claim 11 , wherein diffusing the beam of laser energy includes diffusing the beam of laser energy using a diffuser formed of a material that exhibits no fluorescence in presence of laser energy having a wavelength in the UV range of the electromagnetic spectrum.

Assignments (2)
SECURITY INTEREST Recorded Apr 17, 2024
From: MKS INSTRUMENTS, INC.; ELECTRO SCIENTIFIC INDUSTRIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 067141/0561 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 7, 2024
From: ZABAWA, PATRICK
To: ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 066676/0333 →
Continuity (2)
Provisional Application 63245631 · Sep 17, 2021
Related Publication 20250130101A1 · Apr 24, 2025
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