MoSi2 HEATER
An object of this invention is to provide a MoSi 2 heater capable of preventing the peeling of the metal film formed on an electrode part, and thereby extending the service life of the heater. A MoSi 2 heater comprising a heat generating part, a terminal part, and an electrode part provided to a part of the terminal part, wherein the electrode part includes a metal film, and an oxide film having a film thickness of 2.5 μm or less is provided between the metal film and a MoSi 2 base material.
1 . A MoSi 2 heater, comprising:
a heat generating part;
a terminal part; and
an electrode part provided to a part of the terminal part, wherein the electrode part includes a metal film,
an oxide film having a film thickness of 2.5 μm or less is provided between the metal film and a MoSi 2 base material, and
the oxide film is an oxide film mainly composed of SiO 2 .
2 . (canceled)
3 . The MoSi 2 heater according to claim 1 , wherein the metal film contains one or more types of metal elements selected from a group consisting of Al, Ni, Cr, and Ti.
4 . The MoSi 2 heater according to claim 3 , wherein the film thickness of the metal film is 100 μm or more and 300 μm or less.
5 . The MoSi 2 heater according to claim 4 , wherein the MoSi 2 heater contains 35 wt % or more of MoSi 2 .
6 . The MoSi 2 heater according to claim 3 , wherein the MoSi 2 heater contains 35 wt % or more of MoSi 2 .
7 . The MoSi 2 heater according to claim 1 , wherein the MoSi 2 heater contains 35 wt % or more of MoSi 2 .
8 . The MoSi 2 heater according to claim 1 , wherein the film thickness of the metal film is 100 μm or more and 300 μm or less.