Workpiece processing apparatus with thermal processing systems
View Patent ↗A processing apparatus for a thermal treatment of a workpiece is presented. The processing apparatus includes a processing chamber, a workpiece support disposed within the processing chamber, a gas delivery system configured to flow one or more process gases into the processing chamber from the a first side of the processing chamber, one or more radiative heating sources disposed on the second side of the processing chamber, one or more dielectric windows disposed between the workpiece support and the one or more radiative heating sources, a rotation system configured to rotate the one or more radiative heating sources, and a workpiece temperature measurement system configured at a temperature measurement wavelength range to obtain a measurement indicative of a temperature of a back side of the workpiece.
1. A processing apparatus for processing a workpiece, the workpiece having a top side and a back side opposite from the top side, the processing apparatus comprising:
a processing chamber having a first side and a second side opposite from the first side of the processing chamber;
a workpiece support disposed within the processing chamber, the workpiece support configured to support the workpiece, wherein the back side of the workpiece faces the workpiece support;
one or more pumping plates disposed around an outer perimeter of the workpiece comprising at least one continuous pumping channel comprising an annular opening configured to allow gas to pass from a top side of the workpiece to a back side of the workpiece;
a gas delivery system configured to flow one or more process gases into the processing chamber;
a first group of one or more radiative heating sources disposed on the first side of the processing chamber, the first group of one or more radiative heating sources configured to heat the workpiece from the top side of the workpiece;
a second group of one or more radiative heating sources disposed on the second side of the processing chamber, the second group of one or more radiative heating sources configured to heat the workpiece from the back side of the workpiece;
a first dielectric window disposed between the first group of one or more radiative heating sources disposed on the first side of the processing chamber and the workpiece;
a second dielectric window disposed between the second group of one or more radiative heating sources disposed on the second side of the processing chamber and the workpiece support;
a rotation system configured to rotate at least one of the first group of one or more radiative heating sources or the second group of one or more radiative heating sources; and
a workpiece temperature measurement system configured at a temperature measurement wavelength range to obtain a temperature measurement indicative of a temperature of the back side of the workpiece.
2. The processing apparatus of claim 1 , comprising one or more gas exhaust ports for removing gas from the processing chamber such that a vacuum pressure can be maintained.
3. The processing apparatus of claim 1 , wherein the first dielectric window and second dielectric window comprise quartz, and the workpiece support comprises quartz.
4. The processing apparatus of claim 1 , wherein the one or more radiative heating sources are configured to emit a broadband radiation to heat the workpiece.
5. The processing apparatus of claim 1 , wherein the first and second dielectric windows comprise one or more transparent regions that are transparent to at least a portion of radiation within the temperature measurement wavelength range and one or more opaque regions that are opaque to the radiation within the temperature measurement wavelength range, wherein the one or more opaque regions are configured to block at least a portion of broadband radiation emitted by the radiative heating sources within the temperature measurement wavelength range.
6. The processing apparatus of claim 5 , wherein the first and second dielectric windows comprise quartz, and the one or more opaque regions comprise a higher level of hydroxyl (OH) groups than the one or more transparent regions.
7. The processing apparatus of claim 1 , wherein the one or more radiative heating sources are configured to emit a monochromatic radiation at a heating wavelength range, wherein the heating wavelength range is different from the temperature measurement wavelength range.
8. The processing apparatus of claim 1 , wherein the workpiece temperature measurement system is configured to obtain a reflectance measurement of the workpiece.