STRETCHABLE DEVICE
According to an aspect, a stretchable device includes a first stretchable resin, a resin base member, an array layer, and a second stretchable resin stacked in the order as listed. The resin base member includes: a plurality of bodies; and a plurality of hinges that couple the bodies. The array layer includes: a plurality of thin-film transistors disposed at the bodies; and a plurality of strain gauges disposed at the hinges. The strain gauges each include a semiconductor strain gauge made of semiconductor material at a part in a longitudinal direction. An impurity concentration of the semiconductor strain gauge is higher than an impurity concentration of the thin-film transistor.
1 . A stretchable device comprising a first stretchable resin, a resin base member, an array layer, and a second stretchable resin stacked in the order as listed, wherein
the resin base member comprises:
a plurality of bodies; and
a plurality of hinges that couple the bodies,
the array layer comprises:
a plurality of thin-film transistors disposed at the bodies; and
a plurality of strain gauges disposed at the hinges,
the strain gauges each include a semiconductor strain gauge made of semiconductor material at a part in a longitudinal direction, and
an impurity concentration of the semiconductor strain gauge is higher than an impurity concentration of the thin-film transistor.
2 . The stretchable device according to claim 1 , wherein the impurity concentration of the semiconductor strain gauge is higher than the impurity concentration of the thin-film transistor by 30% or more.
3 . The stretchable device according to claim 1 , wherein the length of the semiconductor strain gauge is 10% to 20% of the length of the strain gauge.
4 . The stretchable device according to claim 1 , wherein
the hinges each have a deformation reduction region where an amount of deformation when a load is acting is 1% or smaller with reference to a case where no load is acting, and
the semiconductor strain gauge is disposed in the deformation reduction region.
5 . The stretchable device according to claim 3 , wherein
the hinges each have a deformation reduction region where an amount of deformation when a load is acting is 1% or smaller with reference to a case where no load is acting, and
the semiconductor strain gauge is disposed in the deformation reduction region.
6 . The stretchable device according to claim 1 , wherein
the strain gauges each comprise:
a first strain gauge extending from a first end of the hinge in the longitudinal direction to a second end;
a second strain gauge extending from the second end of the hinge in the longitudinal direction to the first end; and
a folded part disposed at the second end of the hinge in the longitudinal direction and coupling the first strain gauge and the second strain gauge.
7 . The stretchable device according to claim 3 , wherein
the strain gauges each comprise:
a first strain gauge extending from a first end of the hinge in the longitudinal direction to a second end;
a second strain gauge extending from the second end of the hinge in the longitudinal direction to the first end; and
a folded part disposed at the second end of the hinge in the longitudinal direction and coupling the first strain gauge and the second strain gauge.
8 . The stretchable device according to claim 4 , wherein
the strain gauges each comprise:
a first strain gauge extending from a first end of the hinge in the longitudinal direction to a second end;
a second strain gauge extending from the second end of the hinge in the longitudinal direction to the first end; and
a folded part disposed at the second end of the hinge in the longitudinal direction and coupling the first strain gauge and the second strain gauge.
9 . The stretchable device according to claim 5 , wherein
the strain gauges each comprise:
a first strain gauge extending from a first end of the hinge in the longitudinal direction to a second end;
a second strain gauge extending from the second end of the hinge in the longitudinal direction to the first end; and
a folded part disposed at the second end of the hinge in the longitudinal direction and coupling the first strain gauge and the second strain gauge.
10 . The stretchable device according to claim 2 , wherein the length of the semiconductor strain gauge is 10% to 20% of the length of the strain gauge.
11 . The stretchable device according to claim 10 , wherein
the hinges each have a deformation reduction region where an amount of deformation when a load is acting is 1% or smaller with reference to a case where no load is acting, and
the semiconductor strain gauge is disposed in the deformation reduction region.
12 . The stretchable device according to claim 11 , wherein
the strain gauges each comprise:
a first strain gauge extending from a first end of the hinge in the longitudinal direction to a second end;
a second strain gauge extending from the second end of the hinge in the longitudinal direction to the first end; and
a folded part disposed at the second end of the hinge in the longitudinal direction and coupling the first strain gauge and the second strain gauge.
13 . The stretchable device according to claim 10 , wherein
the strain gauges each comprise:
a first strain gauge extending from a first end of the hinge in the longitudinal direction to a second end;
a second strain gauge extending from the second end of the hinge in the longitudinal direction to the first end; and
a folded part disposed at the second end of the hinge in the longitudinal direction and coupling the first strain gauge and the second strain gauge.
14 . The stretchable device according to claim 2 , wherein
the hinges each have a deformation reduction region where an amount of deformation when a load is acting is 1% or smaller with reference to a case where no load is acting, and
the semiconductor strain gauge is disposed in the deformation reduction region.
15 . The stretchable device according to claim 14 , wherein
the strain gauges each comprise:
a first strain gauge extending from a first end of the hinge in the longitudinal direction to a second end;
a second strain gauge extending from the second end of the hinge in the longitudinal direction to the first end; and
a folded part disposed at the second end of the hinge in the longitudinal direction and coupling the first strain gauge and the second strain gauge.