LOW-PARTICLE GAS ENCLOSURE SYSTEMS AND METHODS
A method comprises processing a substrate in a gas enclosure to form a film on one or more portions of the substrate. The method further comprises, while processing the substrate, circulating gas along a circulation path through the gas enclosure. Circulating the gas may comprise flowing gas through an exhaust housing enclosing a printhead assembly housed in the gas enclosure and filtering the gas flowing downstream of the printhead assembly from the exhaust housing.
1 . A system, comprising:
a gas enclosure;
a printing system disposed within the gas enclosure, the printing system comprising:
a printhead assembly comprising a first housing and a printhead disposed within the first housing;
a substrate support;
a second housing in fluid communication with the first housing; and
a service bundle disposed within the second housing; and
a gas circulation unit to circulate gas through the gas enclosure, the first housing, and the second housing.
2 . The system of claim 1 , wherein the gas circulation unit comprises a filter.
3 . The system of claim 1 , further comprising a gas purification unit externally coupled to the gas enclosure.
4 . The system of claim 3 , further comprising a solvent removal unit externally coupled to the gas enclosure.
5 . The system of claim 1 , further comprising an exhaust system fluidly coupled with the second housing.
6 . The system of claim 1 , wherein the substrate support comprises a floatation table.
7 . The system of claim 1 , further comprising a curing assembly.
8 . The system of claim 1 , wherein the printhead assembly is movably mounted on a bridge across the substrate support.
9 . The system of claim 8 , further comprising a curing assembly movably mounted to the bridge.
10 . The system of claim 1 , further comprising a printhead assembly exhaust system in fluid communication with the first housing.
11 . A system, comprising:
a first gas enclosure defining a first volume;
a printing system disposed within the first gas enclosure, the printing system comprising:
a printhead assembly comprising a first housing and a printhead disposed within the first housing;
a substrate support;
a second housing in fluid communication with the first housing; and
a service bundle disposed within the second housing; and
a gas circulation unit to circulate gas through the gas enclosure, the first housing, and the second housing; and
a second gas enclosure disposed within the first gas enclosure, the second gas enclosure defining a second volume.
12 . The system of claim 11 , wherein the gas circulation unit comprises a fan filter unit.
13 . The system of claim 11 , further comprising a gas purification loop fluidly coupled to the first and second gas enclosures.
14 . The system of claim 13 , further comprising a solvent removal unit fluid coupled to the first and second gas enclosures.
15 . The system of claim 1 , wherein the substrate support comprises a floatation table.
16 . The system of claim 1 , further comprising a bridge disposed across the substrate support, and the printhead assembly is mounted on a moving plate of a carriage mounted on the bridge.
17 . The system of claim 12 , further comprising a service bundle carrier holding the service bundle within the second housing.
18 . The system of claim 11 , wherein the service bundle housing is coupled to an exhaust unit, which is coupled to the gas circulation unit by a first duct and a second duct.
19 . A system, comprising:
a first gas enclosure defining a first volume;
a printing system disposed within the first gas enclosure, the printing system comprising:
a printhead assembly comprising a first housing and a printhead disposed within the first housing;
a substrate support;
a second housing in fluid communication with the first housing; and
a service bundle disposed within the second housing
a exhaust system fluidly coupled to the first housing, the second housing, or both; and
a gas circulation unit to circulate gas through the gas enclosure, the first housing, and the second housing; and
a second gas enclosure disposed within the first gas enclosure, the second gas enclosure defining a second volume.
20 . The system of claim 19 , further comprising a gas purification loop fluidly coupled to the first gas enclosure and the second gas enclosure.