TEMPERATURE-CONTROLLED SHIELD, MATERIAL DEPOSITION APPARATUS AND METHOD FOR DEPOSITING A MATERIAL ONTO A SUBSTRATE
A temperature-controlled shield for an evaporation source is described. The temperature-controlled shield is configured to provide a pre-heating zone or a post-cooling zone.
1 . A material deposition apparatus for depositing an evaporated material onto a substrate, the material deposition apparatus comprising:
a substrate transportation device for transporting the substrate;
an evaporation source for providing an evaporated material to the substrate, the evaporation source comprising a plurality of nozzles including two outermost nozzles, the two outermost nozzles being tilted in different directions from each other; and
a temperature-controlled shield arranged at the evaporation source.
2 . The material deposition apparatus of claim 1 , wherein the evaporation source further comprises a second plurality of nozzles including two second outermost nozzles, the two second outermost nozzles being tilted in different directions from each other.
3 . The material deposition apparatus of claim 1 , wherein the evaporation source has a first end and a second end and a surface between the first end and the second end, wherein each of the two outermost nozzles is tilted by an angle with respect to the surface.
4 . The material deposition apparatus of claim 3 , wherein the angle is between 5° and 25°.
5 . The material deposition apparatus of claim 1 , wherein the plurality of nozzles are arranged in a row, the two outermost nozzles being two outermost nozzles of the row.
6 . The material deposition apparatus of claim 1 , wherein the temperature-controlled shield comprises a heating device or a cooling device.
7 . The material deposition apparatus of claim 1 , wherein the substrate transportation device comprises a coating drum.
8 . An evaporation source for providing an evaporated material to a substrate in a vacuum chamber, the evaporation source comprising:
a plurality of nozzles including two outermost nozzles, the two outermost nozzles being tilted in different directions from each other.
9 . The evaporation source of claim 8 , further comprising a second plurality of nozzles including two second outermost nozzles, the two second outermost nozzles being tilted in different directions from each other.
10 . The evaporation source of claim 8 , wherein the evaporation source has a first end and a second end and a surface between the first end and the second end, wherein each of the two outermost nozzles is tilted by an angle with respect to the surface.
11 . The evaporation source of claim 10 , wherein the angle is between 5° and 25°.
12 . The evaporation source of claim 8 , further comprising a nozzle assembly shield including a plurality of openings, the plurality of nozzles extending through the plurality of openings.
13 . The evaporation source of claim 8 , wherein the plurality of nozzles are arranged in a row, the two outermost nozzles being two outermost nozzles of the row.
14 . The evaporation source of claim 13 , wherein the evaporation source comprises a plurality of rows of nozzles, each row of the plurality of rows including two outermost nozzles, wherein the two outermost nozzles of each row are tilted in different directions from each other.
15 . A method for depositing a material onto a substrate in a vacuum chamber, the method comprising:
evaporating the material in an evaporation source, the evaporation source comprising a plurality of nozzles including two outermost nozzles, the two outermost nozzles being tilted in different directions from each other; and
guiding the evaporated material by a temperature-controlled shield towards a substrate area.
16 . The method of claim 15 , wherein the evaporation source further comprises a second plurality of nozzles including two second outermost nozzles, the two second outermost nozzles being tilted in different directions from each other.
17 . The method of claim 15 , wherein the evaporation source has a first end and a second end and a surface between the first end and the second end, wherein each of the two outermost nozzles is tilted by an angle with respect to the surface.
18 . The method of claim 17 , wherein the angle is between 5° and 25°.
19 . The method of claim 15 , wherein the material includes lithium.
20 . The method of claim 15 , wherein the substrate is a flexible substrate used for the manufacture of a battery.