HYBRID OPTICAL FIBER MEMS SCANNER
An optical scanner includes a base region and a cantilevered silicon beam protruding from the base region. The optical scanner also includes a waveguide disposed on the base region and the cantilevered silicon beam and a transducer assembly comprising one or more piezoelectric actuators coupled to the cantilevered silicon beam and configured to induce motion of the cantilevered silicon beam in a scan pattern.
1 . An optical scanner comprising:
a base region;
a cantilevered silicon beam protruding from the base region;
a waveguide disposed on the base region and the cantilevered silicon beam; and
a transducer assembly comprising one or more piezoelectric actuators coupled to the cantilevered silicon beam and configured to induce motion of the cantilevered silicon beam in a scan pattern.
2 . The optical scanner of claim 1 , wherein the transducer assembly comprises a plurality of piezoelectric actuators coupled directly to the cantilevered silicon beam.
3 . The optical scanner of claim 2 , wherein the one or more piezoelectric actuators comprise three piezoelectric actuators.
4 . The optical scanner of claim 1 , further comprising a set of lateral protrusions extending from the cantilevered silicon beam.
5 . The optical scanner of claim 4 , wherein each of the one or more piezoelectric actuators extend between the base region and the one of the set of lateral protrusions.
6 . The optical scanner of claim 1 , wherein:
the cantilevered silicon beam has an elongated width along a first plane; and
the transducer assembly is configured to induce motion of the cantilevered silicon beam in a second plane orthogonal to the first plane.
7 . The optical scanner of claim 6 , wherein two of the one or more piezoelectric actuators lie in the first plane.
8 . The optical scanner of claim 1 , further comprising an input light source optical coupled to the waveguide.
9 . The optical scanner of claim 1 , wherein the cantilevered silicon beam is characterized by a tapered shape with a distal end narrower than a proximal end adjacent to the base region.
10 . The optical scanner of claim 1 , wherein the base region comprises a layer of silicon and the cantilevered silicon beam comprises monocrystalline silicon.
11 . The optical scanner of claim 10 , wherein the cantilevered silicon beam is integrally formed with and protrudes from the base region.
12 . The optical scanner as recited in claim 1 , wherein the scan pattern comprises a spiral scan pattern.
13 . An optical scanner, comprising:
a base region;
a cantilevered optical member protruding from the base region, wherein the cantilevered optical member includes:
a silicon beam having an elongated width along a first plane;
one or more waveguides; and
a plurality of lateral protrusions extending from the silicon beam; and
a transducer assembly comprising a plurality of piezoelectric actuators coupled to the base region and configured to induce motion of the cantilevered optical member in a second plane orthogonal to the first plane.
14 . The optical scanner of claim 13 , wherein the transducer assembly is further configured to induce motion of the cantilevered optical member in a second plane orthogonal to the first plane.
15 . The optical scanner of claim 13 , wherein the base region comprises a layer of monocrystalline silicon and the silicon beam is integrally formed with and protrudes from the layer of monocrystalline silicon.
16 . The optical scanner of claim 13 , wherein each of the plurality of piezoelectric actuators is oriented in a direction substantially parallel to a longitudinal axis of the cantilevered optical member.
17 . The optical scanner of claim 16 , wherein the plurality of piezoelectric actuators comprise longitudinal piezoelectric actuators extending or contracting along the longitudinal axis.
18 . The optical scanner of claim 13 , wherein the first plane is a horizontal plane and the second plane is a vertical plane.
19 . The optical scanner of claim 13 , wherein:
the base region comprises a plurality of first notches;
each of the plurality of lateral protrusions comprises a plurality of second notches; and
each of the plurality of piezoelectric actuators extends from one of the plurality of first notches to one of the plurality of second notches.
20 . The optical scanner of claim 13 , further comprising a strain gauge mechanically coupled to at least one of the plurality of piezoelectric actuators.