DETECTION DEVICE
According to an aspect, a detection device includes: a substrate; a plurality of photodiodes that are arranged on the substrate and each include a lower electrode, a lower buffer layer, an active layer, an upper buffer layer, and an upper electrode that are stacked on the substrate in the order as listed; a plurality of signal lines electrically coupled to the respective lower electrodes of the photodiodes; a detection circuit electrically coupled to the photodiodes through the signal lines; and a shield layer disposed between the signal lines in plan view.
1 . A detection device comprising:
a substrate;
a plurality of photodiodes that are arranged on the substrate and each comprise a lower electrode, a lower buffer layer, an active layer, an upper buffer layer, and an upper electrode that are stacked on the substrate in the order as listed;
a plurality of signal lines electrically coupled to the respective lower electrodes of the photodiodes;
a detection circuit electrically coupled to the photodiodes through the signal lines; and
a shield layer disposed between the signal lines in plan view.
2 . The detection device according to claim 1 , wherein
the lower buffer layer comprises one of a hole transport layer and an electron transport layer, and
the upper buffer layer comprises the other of the hole transport layer and the electron transport layer.
3 . The detection device according to claim 1 , wherein
the shield layer comprises:
a first shield portion that is disposed between the signal lines and extends along the signal lines; and
a second shield portion that extends between a plurality of the lower electrodes.
4 . The detection device according to claim 1 , wherein a reference voltage supplied to the shield layer is equal to a sensor voltage supplied to the upper electrode.
5 . The detection device according to claim 1 , wherein a reference voltage supplied to the shield layer is equal to a sensor reference voltage supplied to the lower electrode.
6 . The detection device according to claim 1 , wherein the shield layer is provided in the same layer as the signal lines.
7 . The detection device according to claim 1 , comprising an insulating film provided on the substrate so as to cover the signal lines, wherein
the shield layer is provided on the insulating film.
8 . The detection device according to claim 7 , wherein the shield layer is continuously provided overlapping the signal lines and extending across an area of the signal lines.
9 . The detection device according to claim 1 , wherein the shield layer is provided between the substrate and the signal lines in a direction orthogonal to the substrate.
10 . The detection device according to claim 9 , wherein the shield layer is continuously provided overlapping the signal lines and extending across an area of the signal lines.
11 . The detection device according to claim 1 , wherein
the signal lines, the shield layer, and the photodiodes are stacked in the order as listed, in a direction orthogonal to the substrate,
the shield layer is continuously provided extending across an area of the signal lines and the photodiodes, and
the lower electrode of the photodiode is electrically coupled to a corresponding one of the signal lines through an opening provided in the shield layer.
12 . A detection device comprising:
a substrate;
a plurality of photodiodes that are arranged on the substrate and each comprise a lower electrode, a lower buffer layer, an active layer, an upper buffer layer, and an upper electrode that are stacked on the substrate in the order as listed;
a plurality of signal lines electrically coupled to the respective lower electrodes of the photodiodes;
a detection circuit electrically coupled to the photodiodes through the signal lines; and
a shield layer disposed between a plurality of the lower electrodes in plan view.
13 . The detection device according to claim 12 , wherein the shield layer is provided in the same layer as the lower electrodes.
14 . The detection device according to claim 12 , wherein the shield layer is provided between the substrate and the lower electrodes in a direction orthogonal to the substrate.
15 . A detection device comprising:
a substrate;
a plurality of photodiodes that are arranged on the substrate and each comprise a lower electrode, a lower buffer layer, an active layer, an upper buffer layer, and an upper electrode that are stacked on the substrate in the order as listed;
a plurality of signal lines electrically coupled to the lower electrodes of the photodiodes;
a detection circuit electrically coupled to the photodiodes through the signal lines; and
a shield layer disposed between the signal lines and the lower electrodes in plan view.
16 . The detection device according to claim 15 , comprising a power supply wiring line configured to supply a reference voltage to the shield layer, wherein
the shield layer is provided in the same layer as the lower electrode, and
the power supply wiring line is provided between the substrate and the shield layer and between the substrate and the lower electrode, in a direction orthogonal to the substrate, and is electrically coupled to the shield layer through a contact hole provided in an insulating film that covers the power supply wiring line.
17 . The detection device according to claim 15 , wherein the shield layer is provided in a layer between the substrate and the lower electrode in a direction orthogonal to the substrate.
18 . The detection device according to claim 15 , comprising a plurality of gate lines that extend in a direction intersecting the signal lines, wherein
the shield layer is provided in the same layer as the gate lines and is coupled to the gate lines.
19 . The detection device according to claim 15 , comprising a plurality of gate lines that extend in a direction intersecting the signal lines, wherein
the shield layer is provided in the same layer as the lower electrode, and
the shield layer is provided in a grid pattern overlapping the signal lines and the gate lines.