EXHAUST GAS TREATMENT METHOD AND EXHAUST GAS TREATMENT DEVICE
Provided is an exhaust gas treatment method where chlorine gas and a perfluoro compound can be decomposed in exhaust gas containing the chlorine gas and the perfluoro compound to reduce both a concentration of the chlorine gas and a concentration of the perfluoro compound in the gas. The method of treating exhaust gas containing chlorine gas and a perfluoro compound includes: a chlorine gas decomposition step of causing the chlorine gas in the exhaust gas to react with water to be decomposed in the presence of a chlorine gas decomposition catalyst; a hydrogen chloride removal step of removing hydrogen chloride from the gas having passed through the chlorine gas decomposition step; and a perfluoro compound decomposition step of causing the perfluoro compound in the gas having passed through the hydrogen chloride removal step to react to be decomposed in the presence of a perfluoro compound decomposition catalyst.
1 . An exhaust gas treatment method of treating exhaust gas containing chlorine gas and a perfluoro compound, the method comprising:
a chlorine gas decomposition step of causing the chlorine gas in the exhaust gas to react with water to be decomposed in a presence of a chlorine gas decomposition catalyst;
a hydrogen chloride removal step of removing hydrogen chloride from the gas having passed through the chlorine gas decomposition step; and
a perfluoro compound decomposition step of causing the perfluoro compound in the gas having passed through the hydrogen chloride removal step to react to be decomposed in a presence of a perfluoro compound decomposition catalyst.
2 . The exhaust gas treatment method according to claim 1 ,
wherein the perfluoro compound decomposition step is a step of causing the perfluoro compound in the gas having passed through the hydrogen chloride removal step to react to be decomposed in the presence of the perfluoro compound decomposition catalyst and causing the chlorine gas in the gas having passed through the hydrogen chloride removal step to react to be decomposed in the presence of a chlorine gas decomposition catalyst.
3 . The exhaust gas treatment method according to claim 1 ,
wherein the hydrogen chloride removal step is a step of removing the hydrogen chloride by bringing the gas having passed through the chlorine gas decomposition step into contact with water to dissolve the hydrogen chloride in the water.
4 . The exhaust gas treatment method according to claim 1 ,
wherein a decomposition reaction of the chlorine gas in the chlorine gas decomposition step is performed at a temperature of 500° C. or higher and 800° C. or lower.
5 . The exhaust gas treatment method according to claim 1 ,
wherein a decomposition reaction of the perfluoro compound in the perfluoro compound decomposition step is performed at a temperature of 500° C. or higher and 800° C. or lower.
6 . An exhaust gas treatment device for treating exhaust gas containing chlorine gas and a perfluoro compound, the device comprising:
a chlorine gas decomposition unit including a chlorine gas decomposition catalyst and configured to cause the chlorine gas in the exhaust gas to react with water to be decomposed in a presence of the chlorine gas decomposition catalyst;
a hydrogen chloride removal unit configured to remove hydrogen chloride from the gas from which the chlorine gas is decomposed by the chlorine gas decomposition unit; and
a perfluoro compound decomposition unit including a perfluoro compound decomposition catalyst and configured to cause the perfluoro compound in the gas from which the hydrogen chloride is removed by the hydrogen chloride removal unit to react to be decomposed in a presence of the perfluoro compound decomposition catalyst.
7 . The exhaust gas treatment device according to claim 6 ,
wherein the perfluoro compound decomposition unit includes a chlorine gas decomposition catalyst in addition to the perfluoro compound decomposition catalyst, causes the perfluoro compound in the gas from which the hydrogen chloride is removed by the hydrogen chloride removal unit to react to be decomposed in the presence of the perfluoro compound decomposition catalyst, and causes the chlorine gas in the gas from which the hydrogen chloride is removed by the hydrogen chloride removal unit to react to be decomposed in the presence of the chlorine gas decomposition catalyst.
8 . The exhaust gas treatment device according to claim 6 ,
wherein the hydrogen chloride removal unit removes the hydrogen chloride by bringing the gas from which the chlorine gas is decomposed by the chlorine gas decomposition unit into contact with water to dissolve the hydrogen chloride in the water.
9 . The exhaust gas treatment device according to claim 6 ,
wherein the chlorine gas decomposition unit performs a decomposition reaction of the chlorine gas at a temperature of 500° C. or higher and 800° C. or lower.
10 . The exhaust gas treatment device according to claim 6 ,
wherein the perfluoro compound decomposition unit performs a decomposition reaction of the perfluoro compound at a temperature of 500° C. or higher and 800° C. or lower.
11 . The exhaust gas treatment method according to claim 2 ,
wherein the hydrogen chloride removal step is a step of removing the hydrogen chloride by bringing the gas having passed through the chlorine gas decomposition step into contact with water to dissolve the hydrogen chloride in the water.
12 . The exhaust gas treatment method according to claim 2 ,
wherein a decomposition reaction of the chlorine gas in the chlorine gas decomposition step is performed at a temperature of 500° C. or higher and 800° C. or lower.
13 . The exhaust gas treatment method according to claim 2 ,
wherein a decomposition reaction of the perfluoro compound in the perfluoro compound decomposition step is performed at a temperature of 500° C. or higher and 800° C. or lower.
14 . The exhaust gas treatment device according to claim 7 ,
wherein the hydrogen chloride removal unit removes the hydrogen chloride by bringing the gas from which the chlorine gas is decomposed by the chlorine gas decomposition unit into contact with water to dissolve the hydrogen chloride in the water.
15 . The exhaust gas treatment device according to claim 7 ,
wherein the chlorine gas decomposition unit performs a decomposition reaction of the chlorine gas at a temperature of 500° C. or higher and 800° C. or lower.
16 . The exhaust gas treatment device according to claim 7 ,
wherein the perfluoro compound decomposition unit performs a decomposition reaction of the perfluoro compound at a temperature of 500° C. or higher and 800° C. or lower.