IP Library Patent Application 18867671
Patent Application
App. No. 18/867,671

LASER PROCESSING APPARATUS INCLUDING LASER SENSOR SYSTEM AND METHODS OF MEASUREMENT OF BEAM CHARACTERISTICS

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Patent No.
US None
App. No.
18/867,671
Abstract

An optical apparatus is disclosed. In one embodiment. the apparatus includes a photodetector apparatus having a photodetector, a first optical component arranged to direct a first beam path along which a beam of laser energy is propagatable to a first optical train configured to direct the first beam path to the photodetector, and a second optical component arranged to direct a second beam path along which the beam of laser energy is propagatable to a second optical train configured to direct the second beam path to the photodetector. The first optical train and the second optical train include a partially-transmissive mirror and a curved mirror configured to allow a first portion of the beam of laser energy to propagate therethrough, thereby imaging an AOD pivot point at a location relative to the detector apparatus. The photodetector may be positioned in a detection port of an integrating sphere.

Claims (41)

1 . An apparatus, comprising:

a detector apparatus including a photodetector;

at least one first optical component arranged to direct a first beam path along which a beam of laser energy is propagatable to a first optical train configured to direct the first beam path to the detector apparatus; and

at least one second optical component arranged to direct a second beam path along which the beam of laser energy is propagatable to a second optical train configured to direct the second beam path to the detector apparatus.

2 . The apparatus of claim 1 , wherein the first optical train and the second optical train are configured to image an AOD pivot point at a location relative to the detector apparatus.

3 . The apparatus of claim 1 , further comprising at least one laser source operative to generate the beam of laser energy.

4 . The apparatus of claim 1 , wherein the first optical train and the second optical train include:

a partially-transmissive mirror; and

a curved mirror.

5 . The apparatus of claim 4 , wherein the partially-transmissive mirror is arranged to:

receive the beam of laser energy;

allow a first portion of the beam of laser energy to propagate therethrough and reflect a second portion of the beam of laser energy.

6 . The apparatus of claim 5 , wherein the curved mirror is arranged to receive the first portion of the beam of laser energy from the partially-transmissive mirror and reflect the first portion of the beam of laser energy to the detector apparatus.

7 . The apparatus of claim 1 , wherein the detector apparatus is an integrating sphere.

8 . The apparatus of claim 1 , further comprising a switch configured to selectively propagate the beam of laser energy to the first beam path or the second beam path.

9 . The apparatus of claim 8 , wherein the switch is an AOD system.

10 . The apparatus of claim 8 , wherein the switch is a galvanometer system.

11 . The apparatus of claim 1 , wherein the detector apparatus comprises:

an integrating sphere having an integrating sphere body with a collection port and a detection port formed therein,

wherein the photodetector is positioned in the detection port.

12 . An apparatus, comprising:

a detector apparatus including a photodetector;

a first laser source operative to generate a first beam of laser energy;

a second laser source operative to generate a second beam of laser energy;

at least one first optical component arranged to direct a first beam path along which the first beam of laser energy or the second beam of laser energy is propagatable to a first optical train configured to direct the first beam path to the detector apparatus; and

at least one second optical component arranged to direct a second beam path along which the first beam of laser energy or the second beam of laser energy is propagatable to a second optical train configured to direct the second beam path to the detector apparatus.

13 . The apparatus of claim 12 , wherein the first optical train and the second optical train are configured to image an AOD pivot point at a location relative to the detector apparatus.

14 . The apparatus of claim 12 , wherein the first optical train and the second optical train include:

a partially-transmissive mirror; and

a curved mirror.

15 . The apparatus of claim 14 , wherein the partially-transmissive mirror is arranged to:

receive the first beam of laser energy or the second beam of laser energy;

allow a first portion of the first beam of laser energy or the second beam of laser energy to propagate therethrough; and

reflect a second portion of the first beam of laser energy or the second beam of laser energy.

16 . The apparatus of claim 15 , wherein the curved mirror is arranged to receive the first portion of the first beam of laser energy or the second beam of laser energy from the partially-transmissive mirror and reflect the first portion of the first beam of laser energy or the second beam of laser energy to the detector apparatus.

17 . The apparatus of claim 12 , further comprising a switch configured to selectively propagate the first beam of laser energy or the second beam of laser energy to the first beam path or the second beam path.

18 . The apparatus of claim 17 , wherein the switch is an AOD system.

19 . The apparatus of claim 17 , wherein the switch is a galvanometer system.

20 . The apparatus of claim 12 , wherein the detector apparatus comprises:

an integrating sphere having an integrating sphere body with a collection port and a detection port formed therein,

wherein the photodetector is positioned in the detection port.

Assignments (2)
SECURITY INTEREST Recorded Feb 27, 2025
From: MKS INSTRUMENTS, INC.; ELECTRO SCIENTIFIC INDUSTRIES, INC.; NEWPORT CORPORATION
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 070356/0789 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 20, 2024
From: RICHTER, JERED; BROOKHYSER, JAMES
To: ELECTRO SCIENTIFIC INDUSTRIES, INCORPORATED
Reel/Frame 069345/0112 →