MATERIAL FOR FILM FORMATION AND METHOD FOR PRODUCING COATING FILM
A film-forming material is provided in which a rare earth fluoride (REF 3 ) and a rare earth oxyfluoride (RE-O-F) are observed in X-ray diffraction measurement, and S REF3 /S RE-O-F that is a ratio of a crystallite size (S REF3 ) of REF 3 relative to a crystallite size (S RE-O-F ) of RE-O-F is 0.90 or more and 1.35 or less. It is preferable that the crystallite size of each of REF 3 and RE-O-F is 40 nm or more and 100 nm or less. It is also preferable that primary particles observed using a scanning electron microscope (SEM) have an average particle size of 0.1 μm or more and 1.0 μm or less.
1 . A film-forming material in which a rare earth fluoride (REF 3 ) and a rare earth oxyfluoride (RE-O-F) are observed in X-ray diffraction measurement,
wherein S REF3 /S RE-O-F that is a ratio of a crystallite size (S REF3 ) of REF 3 relative to a crystallite size (S RE-O-F ) of RE-O-F is 0.90 or more and 1.35 or less.
2 . The film-forming material according to claim 1 ,
wherein the crystallite size of each of REF 3 and RE-O-F is 40 nm or more and 100 nm or less.
3 . The film-forming material according to claim 1 ,
wherein primary particles observed using a scanning electron microscope (SEM) have an average particle size of 0.1 μm or more and 1.0 μm or less.
4 . The film-forming material according to claim 1 ,
wherein the film-forming material is in a form of granules.
5 . The film-forming material according to claim 4 ,
wherein a porosity in an internal cross section of the granules observed using an SEM is 10% or more and 35% or less.
6 . The film-forming material according to claim 4 ,
wherein the film-forming material in the form of granules has a crushing pressure measured using an SEM indenter of 25 kPa or more and 130 kPa or less.
7 . The film-forming material according to claim 4 ,
wherein the film-forming material in the form of granules has an average granule particle size of 10 μm or more and 60 μm or less.
8 . The film-forming material according to claim 1 ,
wherein granules have a bulk density of 1.3 g/cm 3 or more.
9 . The film-forming material according to claim 1 ,
wherein the film-forming material has an oxygen content of 1 mass % or more and 9 mass % or less.
10 . The film-forming material according to claim 1 ,
wherein the rare earth element (RE) is at least one selected from yttrium (Y), gadolinium (Gd), erbium (Er), and ytterbium (Yb).
11 . A method for producing a coating film comprising:
forming the film-forming material according to claim 1 into the coating film based on a thermal spray method or a PVD method.