PROCESS FOR PREPARING ORGANOTIN COMPOUNDS
The invention provides a facile process for preparing certain organotin compounds having alkyl and aryl substituents. These compounds are useful as intermediates in the synthesis of certain alkylamino- and alkoxy-substituted alkyl tin compounds, which are in turn useful as precursors in the deposition of high-purity tin oxide films in, for example, extreme ultraviolet light (EUV) lithography techniques used in microelectronic device manufacturing.
1 - 4 . (canceled)
5 . A process for preparing a compound of Formula (I):
(Q) 3 SnR (I),
wherein Q is chosen from a halide, and
wherein R is a C 1 -C 12 alkyl group,
the process comprising contacting a compound of the formula SnX 2 , wherein X is chosen from fluoro, chloro, bromo, and iodo, with a molar excess of a compound of the formula Q—M, wherein M is chosen from Li, Na, and K, followed by combining with a compound of the formula R—X.
6 . The process of claim 5 , wherein M is Li.
7 . The process of claim 5 , wherein R is a methyl, ethyl, propyl, isopropyl, n-butyl, t-butyl, sec-butyl, n-pentyl, isopentyl, or sec-pentyl group.
8 . The process of claim 5 , wherein R is a cyclic C 1 -C 5 group.
9 . The process of claim 5 , wherein R is a vinyl group or an acetylenyl group.
10 . The process of claim 5 , wherein R is further substituted with one or more halogen groups or ether groups.
11 . The process of claim 5 , wherein R is a perfluorinated C 1 -C 5 group.
12 . The process of claim 5 , wherein R is an alkylether group, wherein the alkyl portion is a C 1 -C 5 group.