Back contact solar cell and fabrication method thereof
The present invention discloses a back contact solar cell. The back contact solar cell includes a semiconductor substrate having a front surface and a rear surface; a first conductive type semiconductor region having a first conductive type and a second conductive type semiconductor region having a second conductive type at an interval on the rear surface of the semiconductor substrate. Furthermore, the rear surface of the semiconductor substrate has a texturing structure at the interval between the first conductive type semiconductor region and the second conductive type semiconductor region.
1 . A back contact solar cell, comprising:
a semiconductor substrate including a textured front surface and a partially textured rear surface, the semiconductor substrate having a first conductive type;
a first oxide layer formed over the textured front surface of the semiconductor substrate;
at least one first conductive type region and at least one second conductive type region formed in an alternating pattern at predetermined intervals on the partially textured rear surface of the semiconductor substrate, wherein the at least one first conductive type region each has a second conductive type opposite to the first conductive type, and the at least one second conductive type region each has the first conductive type, wherein the at least one second conductive type region has a doping concentration greater than the semiconductor substrate;
a second oxide layer formed on the partially textured rear surface of the semiconductor substrate; and
electrodes formed on each of the at least one first conductive type region and the at least one second conductive type region,
wherein portions of the partially textured rear surface of the semiconductor substrate corresponding to the at least one first conductive type region and the at least one second conductive type region are not textured, the textured front surface of the semiconductor substrate is entirely textured, and an area of textured region on the textured front surface of the semiconductor substrate is larger than an area of textured region on the partially textured rear surface of the semiconductor substrate.
2 . The back contact solar cell according to claim 1 , wherein the semiconductor substrate is an n-type silicon substrate.
3 . The back contact solar cell according to claim 1 , wherein the at least one first conductive type region is a p-type region and the at least one second conductive type region is an n-type region.
4 . The back contact solar cell according to claim 1 , wherein the first oxide layer and the second oxide layer are silicon oxide layers.
5 . The back contact solar cell according to claim 1 , wherein the first oxide layer is formed over an entire surface of the textured front surface of the semiconductor substrate.
6 . The back contact solar cell according to claim 1 , further comprising an anti-reflection layer formed over a surface of the first oxide layer away from the semiconductor substrate.
7 . The back contact solar cell according to claim 6 , wherein the anti-reflection layer comprises silicon nitride.
8 . The back contact solar cell according to claim 6 , wherein the anti-reflection layer is formed over an entire surface of the first oxide layer.
9 . The back contact solar cell according to claim 1 , wherein the at least one first conductive type region includes a plurality of first conductive type regions, and the at least one second conductive type region includes a plurality of second conductive type regions, wherein the plurality of first conductive type regions and the plurality of second conductive type regions are formed in an alternating pattern.
10 . The back contact solar cell according to claim 1 , wherein the electrodes comprises:
a first electrode electrically connected to the at least one first conductive type region; and
a second electrode electrically connected to the at least one second conductive type region.
11 . The back contact solar cell according to claim 1 , wherein each of the electrodes has a width greater than the at least one first conductive type region or the at least one second conductive type region.
12 . The back contact solar cell according to claim 1 , wherein the at least one first conductive type region and the at least one second conductive type region have different sizes.
13 . The back contact solar cell according to claim 1 , wherein textured structures on the textured front surface and the partially textured rear surface of the semiconductor substrate have a pyramidal shape.
14 . The back contact solar cell according to claim 1 , wherein the at least one second conductive type region extends further into the semiconductor substrate than the at least one first conductive type region.
15 . The back contact solar cell according to claim 1 , wherein a surface roughness of the partially textured rear surface of the semiconductor substrate corresponding to the at least one first conductive type region and the at least one second conductive type region is smaller than a surface roughness of the partially textured rear surface of the semiconductor substrate corresponding to the interval between the at least one first conductive type region and the at least one second conductive type region.
16 . The back contact solar cell according to claim 1 , wherein an average surface roughness of the textured front surface of the semiconductor substrate is greater than an average surface roughness of the partially textured rear surface of the semiconductor substrate.
17 . The back contact solar cell according to claim 1 , wherein a surface of the partially textured portion of the partially textured rear surface of the semiconductor substrate is coplanar with a surface of the at least one first conductive type region and a surface of the at least one second conductive type region.
18 . The back contact solar cell according to claim 1 , wherein the at least one first conductive type region and the at least one second conductive type region are fabricated in different processing steps with different methods.
19 . The back contact solar cell according to claim 1 , wherein the at least one first conductive type region includes a plurality of first conductive type regions and the at least one second conductive type region includes a plurality of second conductive type regions, the plurality of first conductive type regions and the plurality of second conductive type regions are formed on positions of the partially textured rear surface of the semiconductor substrate without the second oxide layer.
20 . The back contact solar cell according to claim 19 , wherein the plurality of second conductive type regions are formed between the plurality of first conductive type region with predetermined intervals at both sides.