DOPED HIGH PURITY POLYSILOCARB MATERIALS, APPLICATIONS AND PROCESSES
Organosilicon chemistry, polymer derived ceramic materials, and methods. Such materials and methods for making polysilocarb (SiOC) and Silicon Carbide (SiC) materials having 3-nines, 4 -nines, 6 -nines and greater purity. Processes and articles utilizing such high purity SiOC and SiC.
1 - 28 . (canceled)
29 . A high purity SiOC composition comprising of 1% to 99% silicon, 1% to 99% carbon and 1% to 99% oxygen and a dopant; wherein the dopant is selected to provide an electrical property to a SiC wafer; and wherein the SiOC composition is substantially free from impurities, whereby the composition is at last 99.99% pure.
30 . The composition of claim, wherein the silicon oxycarbide is at least 99.999% pure.
31 . The composition of claim 29 , having a molar ratio of about 30% to 85% carbon, about 5% to 40% oxygen, and about 5% to 35% silicon.
32 . The composition of claim 29 , having a molar ratio of about 50% to 65% carbon, about 20% to 30% oxygen, and about 15% to 20% silicon.
33 . The composition of claim 30 , having a molar ratio of about 30% to 85% carbon, about 5% to 40% oxygen, and about 5% to 35% silicon.
34 . The composition of claim 30 , having a molar ratio of about 50% to 65% carbon, about 20% to 30% oxygen, and about 15% to 20% silicon.
35 . The composition of claim 29 , wherein the composition is a solid.
36 . The composition of claim 31 , wherein the composition is a solid.
37 . The composition of claim 34 , wherein the composition is a solid.
38 . The composition of claim 29 , wherein the composition is a ceramic.
39 . The composition of claim 31 , wherein the composition is a ceramic.
40 . The composition of claim 34 , wherein the composition is a ceramic.
41 . The composition of claim 29 , wherein the composition is a liquid.
42 . The composition of claim 32 , wherein the composition is a liquid.
43 . A high purity SiOC composition consisting essentially of 1% to 99% silicon, 1% to 99% carbon and 1% to 99% oxygen and a dopant; wherein the dopant is selected to provide an electrical property to a SiC wafer; and wherein the SiOC composition is substantially free from impurities, whereby the composition is at last 99.99% pure.
44 . The composition of claim 43 , wherein the silicon oxycarbide is at least 99.999% pure.
45 . The composition of claim 43 , having a molar ratio of about 30% to 85% carbon, about 5% to 40% oxygen, and about 5% to 35% silicon.
46 . The composition of claim 43 , having a molar ratio of about 50% to 65% carbon, about 20% to 30% oxygen, and about 15% to 20% silicon.
47 . The composition of claim 43 , having a molar ratio of about 30% to 85% carbon, about 5% to 40% oxygen, and about 5% to 35% silicon.
48 . The composition of claim 43 , wherein the composition is a solid
49 . The composition of claim 43 , wherein the composition is a ceramic.
50 . The composition of claim 43 , wherein the composition is a liquid.