IP Library Patent Application 19016340
Patent Application
App. No. 19/016,340

FLOW CONTROL SYSTEM, METHOD, AND APPARATUS

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Quick Facts
Patent No.
US None
App. No.
19/016,340
Abstract

In one embodiment, a flow control system for delivering a fluid at a predetermined rate includes a base having a flow path extending from an inlet to an outlet, a proportional valve operably coupled to the base to control fluid flow through the flow path, a flow restrictor located between the proportional valve and the outlet, and a pressure transducer fluidly coupled to a volume of the flow path. The volume is defined between the proportional valve and the flow restrictor.

Claims (33)

1 . A gas flow control system for delivering a gas at a predetermined flow rate, the gas flow control system comprising:

a base comprising a gas flow path extending from a gas inlet to a gas outlet;

a proportional valve operably coupled to the gas flow path, the proportional valve coupled to the base;

a flow restrictor having a flow impedance located between the proportional valve and the gas outlet; and

a pressure transducer fluidly coupled to a volume of the gas flow path defined between the proportional valve and the flow restrictor.

2 . The gas flow control system of claim 1 wherein the proportional valve is the only valve coupled to the base.

3 . The gas flow control system of claim 1 wherein the pressure transducer is configured to sense a pressure within the volume.

4 . The gas flow control system of claim 1 wherein the proportional valve further comprises an orifice and a poppet configured to obstruct the orifice, the pressure transducer configured to measure a pressure between the orifice and the flow restrictor.

5 . The gas flow control system of claim 1 wherein a passage fluidly connects the volume to the pressure transducer.

6 . The gas flow control system of claim 5 wherein the passage extends immediately adjacent to an orifice of the proportional valve.

7 . A flow control system for delivering a fluid at a predetermined flow rate, the flow control system comprising:

a base comprising a flow path extending from an inlet to an outlet;

a proportional valve operably coupled to the base to control fluid flow through the flow path, the proportional valve comprising an orifice and a poppet;

a flow restrictor having a flow impedance located between the proportional valve and the outlet; and

a pressure transducer fluidly coupled to a volume of the flow path defined between the proportional valve and the flow restrictor.

8 . The flow control system of claim 7 wherein the flow path comprises an inlet portion between the inlet and the orifice and an outlet portion between the orifice and the outlet, the flow restrictor located within the outlet portion.

9 . The flow control system of claim 8 further comprising a passage fluidly connecting the volume to the pressure transducer.

10 . The flow control system of claim 9 wherein the passage has a first length along the passage from the pressure transducer to the orifice and the volume has a second length from the orifice to the flow restrictor, the second length being less than the first length.

11 . The flow control system of claim 9 wherein the passage joins the volume immediately adjacent to the orifice.

12 . The flow control system of claim 7 wherein the proportional valve is the only valve coupled to the base.

13 . The flow control system of claim 7 wherein flow restrictor is inserted into an outlet portion of the flow path.

14 . A flow control system for delivering a fluid at a predetermined flow rate, the flow control system comprising:

a base comprising a flow path extending from an inlet to an outlet;

a proportional valve operably coupled to the base to control fluid flow through the flow path, the proportional valve comprising an orifice and a poppet;

a flow restrictor having a flow impedance located between the proportional valve and the outlet;

a pressure transducer configured to measure a pressure within a volume of the flow path defined between the proportional valve and the flow restrictor; and

a passage fluidly connecting the volume to the pressure transducer.

15 . The flow control system of claim 14 wherein the flow path comprises an inlet portion between the inlet and the orifice and an outlet portion between the orifice and the outlet, the flow restrictor located within the outlet portion.

16 . The flow control system of claim 14 wherein the passage has a first length along the passage from the pressure transducer to the orifice and the volume has a second length from the orifice to the flow restrictor, the second length being less than the first length.

17 . The flow control system of claim 14 wherein the proportional valve is the only valve coupled to the base.

18 . The flow control system of claim 14 wherein the passage joins the volume immediately adjacent to the orifice.

19 . The flow control system of claim 14 wherein flow restrictor is inserted into an outlet portion of the flow path.

20 . The flow control system of claim 14 wherein the pressure transducer is configured to sense a pressure within the volume.

Assignments (2)
SECURITY INTEREST Recorded Sep 29, 2025
From: ICHOR SYSTEMS, INC.; IMG ALTAIR, LLC
To: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT
Reel/Frame 072979/0862 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 10, 2025
From: MUDD, PATTI J.; MUDD, DANIEL T.
To: ICHOR SYSTEMS, INC.
Reel/Frame 069818/0643 →