DETECTION DEVICE
According to an aspect, a detection device includes: a plurality of photodiodes provided on a substrate; a plurality of light emitters arranged so as to face the photodiodes; and a collimating lens that is located between the photodiodes and the light emitters and is configured to emit parallel light toward the photodiodes. At least one of the light emitters is configured to be brought into a lit state and other of the light emitters are configured to be brought into an unlit state. The collimating lens is configured to emit the parallel light at a different emission angle depending on a position of the light emitter in the lit state.
1 . A detection device comprising:
a plurality of photodiodes provided on a substrate;
a plurality of light emitters arranged so as to face the photodiodes; and
a collimating lens that is located between the photodiodes and the light emitters and is configured to emit parallel light toward the photodiodes, wherein
at least one of the light emitters is configured to be brought into a lit state and other of the light emitters are configured to be brought into an unlit state, and
the collimating lens is configured to emit the parallel light at a different emission angle depending on a position of the light emitter in the lit state.
2 . The detection device according to claim 1 , comprising a stage provided between the photodiodes and the collimating lens in a direction orthogonal to the substrate, wherein
an object to be detected is to be placed on the stage.
3 . The detection device according to claim 1 , wherein
the light emitters are configured to be sequentially brought into the lit state in detection periods, and
the photodiodes are each configured to sequentially output a detection signal corresponding to the position of the light emitter in the lit state in each of the detection periods.
4 . The detection device according to claim 3 , comprising an image processing circuit configured to generate one image by combining a plurality of images acquired in the respective detection periods, based the detection signals that have been output in the respective detection periods and information on the light emitters in the lit state in the respective detection periods.
5 . The detection device according to claim 3 , wherein an amount of shift of each of the images in the respective detection periods in plan view is a non-integer multiple of an arrangement pitch of the photodiodes.
6 . The detection device according to claim 1 , comprising a light distribution lens provided between the light emitters and the collimating lens.
7 . The detection device according to claim 1 , comprising a reference marker between the photodiodes and the collimating lens, wherein the reference marker has a first region having higher light transmittance and a second region having lower light transmittance than the first region.
8 . The detection device according to claim 7 , wherein, in plan view, the first region and the second region are arranged adjacent to each other in a first direction, and arranged adjacent to each other in a second direction orthogonal to the first direction.
9 . The detection device according to claim 7 , configured to detect an amount of shift of an image for each of the positions of the light emitters in the lit state, based on a detection signal of each of the photodiodes at a location overlapping the reference marker.
10 . The detection device according to claim 1 , comprising a light source that is located so as to face the photodiodes and comprises a plurality of light-emitting elements, wherein
the light emitters are the light-emitting elements.
11 . The detection device according to claim 1 , comprising a liquid crystal panel that is located so as to face the photodiodes and comprises a plurality of pixels, wherein
the light emitters are the pixels.