STACKED QUANTUM DOT SHORT-WAVELENGTH INFRARED SENSOR
An imager is configured for capturing short-wavelength infrared (SWIR) images. The imager includes an optical sensor die including a semiconductor substrate, at least one device fabricated in the semiconductor substrate, a layer of colloidal quantum dots (CQD) photodetectors disposed above of the semiconductor substrate, and an intermetal dielectric (IMD) layer disposed on a bottom surface of the semiconductor substrate. The IMD layer includes at least a metal level of a redistribution layer of the optical sensor die.
1 . An imager configured for capturing short-wavelength infrared images, the imager comprising:
an optical sensor die including a semiconductor substrate, at least one device fabricated in the semiconductor substrate;
an intermetal dielectric layer disposed on the semiconductor substrate, the intermetal dielectric layer including at least a metal level of a redistribution layer of the optical sensor die; and
a layer of colloidal quantum dot photodetectors disposed on the intermetal dielectric layer.
2 . The imager of claim 1 further comprising:
a top electrode disposed on the layer of colloidal quantum dot photodetectors; and
an array of bottom electrodes disposed on a top surface of the intermetal dielectric layer underneath the layer of colloidal quantum dot photodetectors, each of the array of bottom electrodes corresponding to an optically-active pixel of the imager.
3 . The imager of claim 2 , wherein the optically-active pixel of the imager includes a capacitor with a pair of capacitor plates formed by one of the array of bottom electrodes and the top electrode, and the layer of colloidal quantum dot photodetectors forms a capacitive material of the capacitor.
4 . The imager of claim 2 , wherein at least one of the array of bottom electrodes is electrically connected to a metal level in the intermetal dielectric layer by a metal-filled via extending through the intermetal dielectric layer.
5 . The imager of claim 2 , wherein at least one of the array of bottom electrodes is electrically connected one of a polysilicon gate or a doped source region of a transistor formed in or on the semiconductor substrate by a metal-filled via extending through the intermetal dielectric layer.
6 . The imager of claim 1 , wherein the semiconductor substrate is a first semiconductor substrate, the redistribution layer is a first redistribution layer, and the intermetal dielectric layer is a first intermetal dielectric layer, the imager further comprising:
an application specific integrated circuit die including a second semiconductor substrate; and
a second intermetal dielectric layer disposed on the second semiconductor substrate, the second intermetal dielectric layer including at least a metal level of a second redistribution layer of the application specific integrated circuit die,
wherein the optical sensor die is stacked above the application specific integrated circuit die with a dielectric layer disposed between the first semiconductor substrate and the second intermetal dielectric layer, the dielectric layer bonding the optical sensor die to the application specific integrated circuit die.
7 . The imager of claim 6 , wherein the dielectric layer disposed between the first semiconductor substrate and the second intermetal dielectric layer includes a pair of copper pads that are fused together to electrically connect the first redistribution layer of the optical sensor die and the second redistribution layer of the application specific integrated circuit die.
8 . The imager of claim 1 , wherein the layer of colloidal quantum dots includes colloidal semiconductor nanocrystals dispersed in a film.
9 . The imager of claim 8 , wherein colloidal semiconductor nanocrystals include, at least one of PbS, InAs, InP, PbSe, CdS, CdSe, In x Ga 1-x As, CdHgTe, ZnSe (PbS), ZnS (CdSe), ZnSe (CdS), PbO (PbS), and PbSO 4 (PbS).
10 . The imager of claim 1 further comprising:
an array of micro lenses disposed above the layer of colloidal quantum dot photodetectors to funnel incident infrared or short-wavelength infrared light into an optically-active pixel.
11 . The imager of claim 2 , wherein a high-k dielectric material is disposed on the top surface of the semiconductor substrate, and wherein the optically-active pixel of the imager includes a capacitor with a pair of capacitor plates formed by one of the array of bottom electrodes and the semiconductor substrate, and the high-k dielectric material forms a capacitive material of the capacitor.
12 . The imager of claim 11 , wherein the top surface of the semiconductor substrate includes a sidewall of an opening etched in the semiconductor substrate, wherein a portion of the layer of passivating material is disposed on the sidewall of the opening, and wherein the capacitor is formed as an in-pixel trench capacitor.
13 . The imager of claim 11 , further comprising:
a layer of passivating material disposed on a top surface of the semiconductor substrate underneath the layer of colloidal quantum dot photodetectors, the layer of passivating material including silicon oxide and a high-k dielectric material; and
an array of bottom electrodes disposed on the semiconductor substrate underneath the layer of colloidal quantum dot photodetectors, each of the array of bottom electrodes corresponding to an optically-active pixel of the imager, each of the array of bottom electrodes forming a high-k dielectric material capacitor with the semiconductor substrate being an opposing electrode of the high-k dielectric material capacitor and the high-k dielectric material forming a capacitive material of the high-k dielectric material capacitor.
14 . The imager of claim 13 , wherein the top surface of the semiconductor substrate includes a sidewall of an opening etched in the semiconductor substrate, wherein portions of the layer of passivating material are disposed on the sidewall of the opening, and wherein the high-k dielectric material capacitor is formed as an in-pixel trench capacitor.
15 . An imager configured for capturing short-wavelength infrared short- wavelength infrared images, the imager comprising:
an optical sensor die including a semiconductor substrate, at least one device fabricated in the semiconductor substrate;
a layer of colloidal quantum dot photodetectors disposed above the semiconductor substrate; and
an intermetal dielectric layer disposed on a bottom surface of the semiconductor substrate, the intermetal dielectric layer including at least a metal level of a redistribution layer of the optical sensor die.
16 . The imager of claim 15 , further comprising:
a layer of passivating material disposed on a top surface of the semiconductor substrate underneath the layer of colloidal quantum dot photodetectors, the layer of passivating material including at least one of silicon dioxide and a high-k dielectric material.
17 . The imager of claim 15 , further comprising:
a top electrode disposed on the layer of colloidal quantum dot photodetectors; and
an array of bottom electrodes disposed on the semiconductor substrate underneath the layer of colloidal quantum dot photodetectors, each of the array of bottom electrodes corresponding to an optically-active pixel of the imager.
18 . The imager of claim 17 , wherein at least one of the array of bottom electrodes is electrically connected to a metal level in the intermetal dielectric layer by a metal-filled via extending through the semiconductor substrate.
19 . The imager of claim 17 , wherein at least one of the array of bottom electrodes is electrically connected to one of a polysilicon gate or a doped source region of a transistor formed in or on the semiconductor substrate by a metal-filled via extending through the semiconductor substrate.
20 . The imager of claim 15 , wherein the semiconductor substrate is a first semiconductor substrate, the redistribution layer is a first redistribution layer, and the intermetal dielectric layer is a first intermetal dielectric layer, the imager further comprising:
an application specific integrated circuit die including a second semiconductor substrate; and
a second intermetal dielectric layer disposed on the second semiconductor substrate, the second intermetal dielectric layer including at least a metal level of a second redistribution layer of the application specific integrated circuit die,
wherein the optical sensor die is stacked above the application specific integrated circuit die with a dielectric layer disposed between the bottom surface of first semiconductor substrate and a top surface of the second intermetal dielectric layer, the dielectric layer bonding the optical sensor die to the application specific integrated circuit die.
21 . The imager of claim 20 , wherein the dielectric layer disposed between the bottom surface of first semiconductor substrate and the top surface of the second intermetal dielectric layer includes a pair of copper pads that are fused together to electrically connect the first redistribution layer of the optical sensor die and the second redistribution layer of the application specific integrated circuit die.
22 . A method, comprising:
forming an optical sensor die including a semiconductor substrate, at least one device being fabricated in the semiconductor substrate;
disposing an intermetal dielectric layer on the semiconductor substrate, the intermetal dielectric layer including at least a metal level of a redistribution layer of the optical sensor die;
forming at least one bottom electrode on the semiconductor substrate, the at least one bottom electrode corresponding to an optically-active pixel of a short-wavelength infrared imager, the at least one bottom electrode being electrically connected to a metal level in the intermetal dielectric layer;
disposing a layer of colloidal quantum dot photodetectors on the semiconductor substrate including over the at least one bottom electrode; and
disposing a top electrode on the layer of colloidal quantum dot photodetectors.
23 . The method of claim 22 , further comprising:
patterning and etching the layer of colloidal quantum dots and the top electrode to correspond to an array of short-wavelength infrared sensitive pixels.
24 . The method of claim 22 , further comprising:
disposing a layer of passivating material including at least one of high-k dielectric material and silicon dioxide on a top surface of the semiconductor substrate and in an opening in the semiconductor substrate.
25 . The method of claim 24 , further comprising:
forming an in-pixel trench capacitor between the at least one bottom electrode and the semiconductor substrate with the high-k dielectric material disposed on a top surface of the semiconductor substrate and in the opening in the semiconductor substrate forming a capacitive material of the in-pixel trench capacitor.
26 . The method of claim 25 , further comprising:
disposing a layer of passivating material including at least one of high-k dielectric material and silicon dioxide on a top surface of the semiconductor substrate and in an opening in the semiconductor substrate and wherein forming at least one bottom electrode on the semiconductor substrate corresponding to an optically-active pixel of a short-wavelength infrared imager includes forming a high-k dielectric material capacitor between the at least one bottom electrode and the semiconductor substrate, wherein the high-k dielectric material capacitor is formed as an in-pixel trench capacitor.
27 . A method, comprising:
forming an optical sensor die including a semiconductor substrate, at least one device being fabricated in the semiconductor substrate;
disposing an intermetal dielectric layer on the semiconductor substrate, the intermetal dielectric layer including at least a metal level of a redistribution layer of the optical sensor die;
forming at least one bottom electrode on the intermetal dielectric layer, the at least one bottom electrode corresponding to an optically-active pixel of a short-wavelength infrared imager, the at least one bottom electrode being electrically connected to a metal level in the intermetal dielectric layer;
disposing a layer of colloidal quantum dot photodetectors on the intermetal dielectric layer including over the at least one bottom electrode; and
disposing a top electrode on the layer of colloidal quantum dot photodetectors.
28 . The method of claim 27 , further comprising:
patterning and etching the layer of colloidal quantum dots and the top electrode to correspond to an array of short-wavelength infrared sensitive pixels.