IP Library Patent Application 19107837
Patent Application
App. No. 19/107,837

Laser Array Excitation and Multichannel Detection in a Spectrometer

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Patent No.
US None
App. No.
19/107,837
Abstract

Spectrometers are provided comprising a plurality of excitation light sources (e.g., a plurality of laser light sources), a plurality of detector elements, and/or a plurality of excitation light sources and a plurality of detector elements. In one embodiment, for example, a spectrometer includes a light source adapted to provide an excitation incident beam, a detector adapted to detect a spectroscopy signal; and an optical system adapted to direct the excitation incident beam toward a sample, receive a spectroscopy signal from the sample and provide the spectroscopy signal to the detector. The light source includes a plurality of laser sources adapted to provide a plurality of excitation incident beams through the optical system and/or the detector comprises a plurality of detector elements.

Claims (82)

1 . A spectrometer comprising:

a light source adapted to provide an excitation incident beam;

a detector adapted to detect a spectroscopy signal; and

an optical system adapted to direct the excitation incident beam toward a sample, receive a spectroscopy signal from the sample and provide the spectroscopy signal to the detector,

wherein the light source comprises a plurality of laser sources adapted to provide a plurality of excitation incident beams through the optical system.

2 . The spectrometer of claim 1 , wherein the plurality of laser sources comprises a plurality of VCSEL laser sources.

3 . The spectrometer of claim 1 , wherein the plurality of laser sources of the light source comprises a two-dimensional array of laser sources.

4 . The spectrometer of claim 3 , wherein the two-dimensional array of laser sources comprises a VCSEL laser array.

5 . The spectrometer of claim 1 , wherein the optical system is adapted to provide the plurality of excitation incident beams to the sample and to receive a plurality of spectroscopy signals from the sample corresponding to the plurality of excitation incident beams.

6 . The spectrometer of claim 1 , wherein the optical system is adapted to provide the plurality of excitation incident beams across a surface of the sample.

7 . The spectrometer of claim 1 , wherein at least a portion of the plurality of laser sources are addressable.

8 . The spectrometer of claim 7 , wherein each of the laser sources are individually addressable.

9 . The spectrometer of claim 7 , wherein at least two portions of the plurality of laser sources are individually addressable.

10 . The spectrometer of claim 1 , wherein the detector comprises a plurality of detector elements.

11 . The spectrometer of claim 10 , wherein the plurality of detector elements comprises a two-dimensional array of detector elements.

12 . The spectrometer of claim 10 , wherein at least a portion of the plurality of detector elements are addressable.

13 . The spectrometer of claim 12 , wherein each of the detector elements are individually addressable.

14 . The spectrometer of claim 12 , wherein at least two portions of the plurality of detector elements are individually addressable.

15 . The spectrometer of claim 1 , wherein the spectrometer comprises a controller adapted to process one or more detector signals from the detector.

16 . The spectrometer of claim 15 , wherein the controller is adapted to correct a curvature of the spectroscopy signal at the detector.

17 . The spectrometer of claim 16 , wherein the controller is adapted to correct the curvature by fitting a circle to a known line.

18 . The spectrometer of claim 15 , wherein the controller is adapted to linearize the detected spectroscopy signal received at the detector.

19 . The spectrometer of claim 1 , wherein the optical system comprises a lens adapted to flatten an intensity profile of the spectroscopy signal at the detector.

20 . The spectrometer of claim 1 , wherein the detector comprises a plurality of detector elements adapted to detect a plurality of spectroscopy signals corresponding to the plurality of excitation incident beams.

21 . The spectrometer of claim 20 , wherein the spectrometer comprises a controller adapted to separate spectra of a target material and a second material of a sample.

22 . The spectrometer of claim 21 , wherein the sample comprises an inhomogeneous sample.

23 . The spectrometer of claim 21 , wherein the second material comprises a surface of the sample.

24 . The spectrometer of claim 1 , wherein the optical system comprises a beam expander adapted to expand the plurality of excitation incident beams at a surface of the sample.

26 . A spectrometer comprising:

a light source adapted to provide an excitation incident beam;

a detector adapted to detect a spectroscopy signal; and

an optical system adapted to direct the excitation incident beam toward a sample, receive a spectroscopy signal from the sample and provide the spectroscopy signal to the detector,

wherein the detector comprises a plurality of detector elements.

27 . The spectrometer of claim 26 , wherein the light source comprises a VCSEL laser source.

28 . The spectrometer of claim 26 , wherein the light source comprises a plurality of laser sources adapted to provide a plurality of excitation incident beams.

29 . The spectrometer of claim 28 , wherein the plurality of laser sources comprises a two-dimensional array of laser sources.

30 . The spectrometer of claim 29 , wherein the two-dimensional array of laser sources comprises a VCSEL laser array.

31 . The spectrometer of claim 28 , wherein the optical system is adapted to provide the plurality of excitation incident beams to the sample and to receive a plurality of spectroscopy signals from the sample corresponding to the plurality of excitation incident beams.

32 . The spectrometer of claim 28 , wherein the optical system is adapted to provide the plurality of excitation incident beams across a surface of the sample.

33 . The spectrometer of claim 28 , wherein at least a portion of the plurality of laser sources are addressable.

34 . The spectrometer of claim 26 , wherein the plurality of detector elements comprises a two-dimensional array of detector elements.

35 . The spectrometer of claim 26 , wherein at least a portion of the plurality of detector elements are addressable.

36 . The spectrometer of claim 35 , wherein each of the detector elements are individually addressable.

37 . The spectrometer of claim 35 , wherein at least two portions of the plurality of detector elements are individually addressable.

38 . The spectrometer of claim 26 , wherein the spectrometer comprises a controller adapted to process one or more detector signals from the detector.

39 . The spectrometer of claim 38 , wherein the controller is adapted to correct a curvature of the spectroscopy signal at the detector.

40 . The spectrometer of claim 39 , wherein the controller is adapted to correct the curvature by fitting a circle to a known line.

41 . The spectrometer of claim 38 , wherein the controller is adapted to linearize the detected spectroscopy signal received at the detector.

42 . The spectrometer of claim 26 , wherein the optical system comprises a lens adapted to flatten an intensity profile of the spectroscopy signal at the detector.

43 . The spectrometer of claim 26 , wherein plurality of detector elements are adapted to detect a plurality of spectroscopy signals corresponding to a plurality of excitation incident beams.

44 . The spectrometer of claim 43 , wherein the spectrometer comprises a controller adapted to separate spectra of a target material and a second material of a sample.

45 . The spectrometer of claim 44 , wherein the sample comprises an inhomogeneous sample.

46 . The spectrometer of claim 44 , wherein the second material comprises a surface of the sample.

47 . The spectrometer of claim 26 , wherein the optical system comprises a beam expander adapted to expand the plurality of excitation incident beams at a surface of the sample.

48 . A spectrometer comprising:

a light source adapted to provide an excitation incident beam;

a detector adapted to detect a spectroscopy signal; and

an optical system adapted to direct the excitation incident beam toward a sample, receive a spectroscopy signal from the sample and provide the spectroscopy signal to the detector,

wherein the optical system comprises a beam expander adapted to expand the excitation incident beam.

49 . A method for determining at least one spectrum of a sample, the method comprising:

providing a plurality of excitation incident beams from a light source comprising a plurality of light sources;

directing the plurality of excitation incident beams to a sample via an optical system;

receiving a spectroscopy signal from the sample via the optical system; and

directing the spectroscopy signal to a detector via the optical system;

determining at least one spectrum corresponding to the spectroscopy signal.

50 . The method of claim 49 , wherein the operation of determining at least one spectrum is performed via a controller.

51 . A method for determining at least one spectrum of a sample, the method comprising:

providing an excitation incident beam from a light source;

directing the excitation incident beam to a sample via an optical system;

receiving a spectroscopy signal from the sample via the optical system;

directing the spectroscopy signal to a detector via the optical system, wherein the detector comprises a plurality of detector elements; and

determining at least one spectrum corresponding to the spectroscopy signal.

50 . The method of claim 49 , wherein the operation of determining at least one spectrum is performed via a controller.

51 . The method of claim 49 , wherein the detector comprises a two-dimensional array of detector elements.

52 . A method for determining at least one spectrum of a sample, the method comprising:

providing an excitation incident beam from a light source;

directing the excitation incident beam to a sample via an optical system;

expanding the excitation incident beam within the optical system;

receiving a spectroscopy signal from the sample via the optical system; and

directing the spectroscopy signal to a detector via the optical system;

determining at least one spectrum corresponding to the spectroscopy signal.

53 . The method of claim 52 , wherein the operation of determining at least one spectrum is performed via a controller.