DISTRIBUTION SYSTEM FOR THE SIMULTANEOUS CHEMICAL AND/OR ELECTROLYTIC SURFACE TREATMENT OF AT LEAST TWO SUBSTRATES

1 . A distribution system for an electrolyte and an electric current for chemical and/or electrolytic surface treatment of simultaneously at least two substrate surfaces of at least two different substrates, comprising:

a substrate holder unit,

an immersion tank,

at least two distribution bodies, and

a control unit,

wherein the substrate holder unit comprises at least two substrate holders, each configured to hold one of the at least two substrates in the immersion tank,

wherein the immersion tank is configured to hold a shared electrolyte for the substrates,

wherein the two substrate holders are further configured to electrically contact the two substrate surfaces,

wherein each distribution body is arranged to be designated to one of the two substrate surfaces,

wherein each distribution body comprises jet holes to direct a flow of the electrolyte onto the designated substrate surface and drain holes to direct a flow of the electric current relative to the designated substrate surface, and

wherein the control unit is configured to control for each distribution body and/or for each substrate surface individually the flow of the electrolyte and the flow of the electric current.

2 . The distribution system according to claim 1 , wherein at least one anode, one cathode and one distribution body form a cell of the distribution system, and preferably two anodes, at least one cathode and at least one distribution body form the cell of the distribution system.

3 . The distribution system according to claim 2 , wherein the at least one anode is arranged in an anode assembly which is shared between adjacent cells of the distribution system.

4 . The distribution system according to claim 3 , wherein the anode assembly comprises one anode being a shared anode between two adjacent cells or wherein the anode assembly comprises two anodes being individually controllable for each of the two adjacent cells.

5 . The distribution system according to claim 1 , further comprising an individual power supply for each cell of the distribution system, wherein the individual power supply is controlled by the control unit.

6 . The distribution system according to claim 1 , wherein the control unit is configured to control a potential difference between the anode and the cathode.

7 . The distribution system according to claim 1 , wherein the control unit is configured to control the potential difference between the anode and the cathode to be below a predetermined threshold to achieve a quasi-potentiostatic surface treatment.

8 . The distribution system according to claim 2 , further comprising a separation element arranged to separate two cells of the distribution system.

9 . The distribution system according to claim 8 , wherein the separation element is a membrane anode assembly blocking an electrical connection between the two cells.

10 . The distribution system according to claim 2 , further comprising a resistive element arranged between adjacent cells of the distribution system to control an interaction between these adjacent cells.

11 . The distribution system according to claim 10 , wherein the resistive element comprises a funnel, meander, plate, barrier and/or sealing structure changing a travel distance of the electrolyte and/or the electric current.

12 . The distribution system according to claim 2 , further comprising a reference potential system as basis to quantify a cathode potential of the distribution system absolutely relative to the reference potential system.

13 . The distribution system according to claim 2 , further comprising at least one thief anode unit to control an interaction between adjacent cells, wherein the thief anode unit is at least a segment or a pixel of the anode or an additional anode shifted into a cathode mode independent of adjacent segments, pixels or anodes.

14 . The distribution system according to claim 1 , wherein the substrate holder unit comprises substrate holder components configured to independently move the at least two substrate holders relative to the immersion tank.

15 . The distribution system according to claim 1 , wherein the substrate holder unit is segmented to provide an individual power supply to each of the at least two substrate surfaces.

16 . The distribution system according to claim 1 , wherein at least one of the substrate holders is configured for a single-side surface treatment of the substrate and/or a double-side surface treatment of the substrate.

17 . A distribution method for an electrolyte and an electric current for chemical and/or electrolytic surface treatment of simultaneously at least two substrate surfaces of at least two different substrates, comprising:

providing a substrate holder unit comprising at least two substrate holders, each holding one of the two substrates in an immersion tank, which holds a shared electrolyte for the substrates,

arranging at least two distribution bodies in the immersion tank, each distribution body being designated to one of the substrate surfaces, wherein each distribution body comprises jet holes to direct a flow of the electrolyte onto the designated substrate surface and drain holes to direct a flow of the electric current relative to the designated substrate surface,

electrically contacting the substrate surfaces by means of the substrate holders, and

controlling for each distribution body and/or for each substrate surface individually the flow of the electrolyte and the flow of the electric current by means of a control unit.