MICRO LED STRUCUTRE
A micro LED structure includes a micro mesa comprising a bottom electrode, a PN junction structure, and a top electrode from bottom to top; and a micro lens formed on the micro mesa, wherein a top surface of the micro lens comprises a sub-micro lens array comprising a plurality of sub-micro lenses.
1 . A micro LED structure, comprising:
a micro mesa comprising a bottom electrode, a PN junction structure, and a top electrode from bottom to top; and
a micro lens formed on the micro mesa, wherein a top surface of the micro lens comprises a sub-micro lens array comprising a plurality of sub-micro lenses.
2 . The micro LED structure according to claim 1 , further comprising a contact pad provided around the micro mesa, wherein a gap is formed between the contact pad and the micro mesa.
3 . The micro LED structure according to claim 2 , wherein a top of the micro lens is not lower than a top of the contact pad.
4 . The micro LED structure according to claim 2 , wherein the micro lens is filled in the gap between the contact pad and the micro mesa.
5 . The micro LED structure according to claim 2 , wherein the micro lens is in contact with the contact pad and the micro mesa.
6 . The micro LED structure according to claim 1 , wherein the sub-micro lens array is a semi-spherical array.
7 . The micro LED structure according to claim 1 , wherein the sub-micro lens array is a photonic crystal array.
8 . The micro LED structure according to claim 1 , wherein a material of the micro lens is SiO 2 or Si 3 N 4 .
9 . The micro LED structure according to claim 2 , further comprising an integrated circuit (IC) backplane provided at a bottom of the micro mesa and a bottom of the contact pad, wherein the IC backplane is bonded with the bottom of the micro mesa.
10 . The micro LED structure according to claim 1 , wherein the micro lens covers a top surface and a sidewall surface of the micro mesa.
11 . The micro LED structure according to claim 2 , wherein the micro lens covers a top surface and a sidewall surface of the mesa;
the micro LED structure further comprising an integrated circuit (IC) backplane formed at a bottom surface of the micro mesa and the bottom surface of the contact pad, the IC backplane bonded with the bottom of the micro mesa.
12 . The micro LED structure according to claim 1 , wherein the PN junction structure further comprises:
a first type epitaxial layer;
a light emitting layer formed on the first type epitaxial layer; and
a second type epitaxial layer formed on the light emitting layer; wherein the first type is P type and the second type is N type; or the first type is N type and the second type is P type.
13 . The micro LED structure according to claim 1 , wherein a top view of the micro lens and the micro mesa are round, and a diameter of the micro lens is greater than 150% of a diameter of the micro mesa.
14 . The micro LED structure according to claim 2 , further comprising a reflective structure provided at a sidewall of the contact pad facing the micro mesa.