Patent Application
Utility
App. No. 19/347,789
· Confirmation No. 1860
POLISHING SEMICONDUCTOR WAFERS USING CAUSAL MODELS
Inventors:
Brian E. Brooks, Gilles J. Benoit, Peter O. Olson, Tyler W. Olson, Himanshu Nayar, Frederick J. Arsenault, Nicholas A. Johnson, Vincent J. Laraia, Don V. West
Applicant:
3M INNOVATIVE PROPERTIES COMPANY
Docketed New Case - Ready for Examination
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Code | Description | Pages | ||
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| 2026-01-29 | NTC.PUB |
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| 2025-10-21 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2025-10-21 | APP.FILE.REC |
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| 2025-10-21 | WELCOME.LET |
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| 2025-10-02 | APP.TEXT |
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| 2025-10-02 | N417 |
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| 2025-10-02 | ADS |
Application Data Sheet | 11 | View | |
| 2025-10-02 | PA.. |
Power of Attorney | 1 | View | |
| 2025-10-02 | SPEC |
Specification | 54 | View | |
| 2025-10-02 | CLM |
Claims | 5 | View | |
| 2025-10-02 | ABST |
Abstract | 1 | View | |
| 2025-10-02 | DRW |
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| 2025-10-02 | N417.PYMT |
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| 2025-10-02 | OATH |
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| 2025-10-02 | SCORE |
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Inventors
Brian E. Brooks
St. Paul, MN
Gilles J. Benoit
Minneapolis, MN
Peter O. Olson
Andover, MN
Tyler W. Olson
Woodbury, MN
Himanshu Nayar
St. Paul, MN
Frederick J. Arsenault
Stillwater, MN
Nicholas A. Johnson
Burnsville, MN
Vincent J. Laraia
Houlton, WI
Don V. West
St. Paul, MN
Attorneys & Agents of Record
Classification
USPC
700/28
H10P74/23
B24B37/005
G05B13/028
H10P74/203
H10P72/0428
H10P50/00
G05B17/02
G05B19/41875
G06N5/025
Prosecution
- Examiner
- CENTRAL, DOCKET
- Art Unit
- OPAP
- Customer No.
- 32692
- Docket No.
- PA82498US09
- Confirmation No.
- 1860
Publication
- Pub. No.
- US20260029758A1
- Pub. Date
- 2026-01-29
Parent
is a Continuation of
→
App. 17/438,027
· US 12,487,566
Filed 2021-09-10
· Patented Case
Parent
is a National Stage Entry of
→
App. PCTIB2019058438
Filed 2019-10-03
· Docketed New Case - Ready for Examination
Parent
Claims priority from a provisional application
→
App. 62/818,816
Filed 2019-03-15
· Provisional Application Expired
Parent
Claims priority from a provisional application
→
App. 62/898,938
Filed 2019-09-11
· Provisional Application Expired
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 19/347,789
- Filed
- 2025-10-02
- Pub. No.
- US20260029758A1
- Examiner
- CENTRAL, DOCKET
- Art Unit
- OPAP
External Links