IP Library › Granted Patent US 722,298
Granted Patent S1
US 722,298 · App. 29/479,498 · Granted Feb 10, 2015

Chamber of charged particle beam drawing apparatus

Inventors: Hiroyasu Saito (Yokohama, JP); Seiichi Nakazawa (Yokohama, JP); Yoshinori Nakagawa (Numazu, JP)
Assignee: NuFlare Technology, Inc.
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Quick Facts
Patent No.
US 722,298
App. No.
29/479,498
Granted
Feb 10, 2015
Kind
S1
Claims (1)

The ornamental design for a chamber of charged particle beam drawing apparatus, as shown and described.

Assignments (2)
SECURITY INTEREST Recorded Feb 22, 2021
From: ZAGG INC
To: LYNX HOLDINGS V, LLC
Reel/Frame 055361/0929 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 16, 2014
From: SAITO, HIROYASU; NAKAZAWA, SEIICHI; NAKAGAWA, YOSHINORI
To: NUFLARE TECHNOLOGY, INC.
Reel/Frame 031988/0616 →
Priority Claims (1)
JP 2013-016242 · Jul 17, 2013 · national