IP Library › Granted Patent US 973,609
Granted Patent S1
US 973,609 · App. 29/732,229 · Granted Dec 27, 2022

Upper shield with showerhead for a process chamber

Inventors: Sarath Babu (Singapore, SG); Ananthkrishna Jupudi (Singapore, SG); Yueh Sheng Ow (Singapore, SG); Junqi Wei (Singapore, SG); Kelvin Tai Ming Boh (Singapore, SG); Kang Zhang (Singapore, SG); Yuichi Wada (Chiba, JP)
Assignee: APPLIED MATERIALS, INC.
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Quick Facts
Patent No.
US 973,609
App. No.
29/732,229
Granted
Dec 27, 2022
Kind
S1
Claims (1)

The ornamental design for an upper shield with showerhead for a process chamber, as shown and described.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 4, 2021
From: APPLIED MATERIALS SINGAPORE TECHNOLOGY PTE. LTD.
To: APPLIED MATERIALS, INC.
Reel/Frame 055145/0094 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 19, 2020
From: WADA, YUICHI
To: APPLIED MATERIALS, INC.
Reel/Frame 052700/0822 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 19, 2020
From: BABU, SARATH; JUPUDI, ANANTHKRISHNA; OW, YUEH SHENG; WEI, JUNQI; BOH, KELVIN TAI MING; ZHANG, KANG
To: APPLIED MATERIALS SINGAPORE TECHNOLOGY PTE. LTD.
Reel/Frame 052701/0026 →