Granted Patent
S1
US 1,055,006 · App. 29/831,297 · Granted Dec 24, 2024
Support ring for an interlocking process kit for a substrate processing chamber
Inventors:
Sahiti Nallagonda (San Jose, CA); Jonathan Simmons (San Jose, CA); Xinwei Huang (San Jose, CA); Peter Muraoka (San Mateo, CA); Andreas Schmid (Sunnyvale, CA)
Assignee:
Applied Materials, Inc.
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Claims (1)
The ornamental design for a support ring for an interlocking process kit for a substrate processing chamber, as shown and described.
Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded Apr 14, 2022
From: NALLAGONDA, SAHITI; SIMMONS, JONATHAN; HUANG, XINWEI; MURAOKA, PETER; SCHMID, ANDREAS
To: APPLIED MATERIALS, INC.
Reel/Frame 059597/0392 →