IP Library Patent Application 60259676
Patent Application Provisional
App. No. 60/259,676 · Confirmation No. 2329

Integrated system for processing semiconductor wafers

Provisional Application Expired
⬇ PDF
Code Description Pages PDF
2001-01-05 TRNA Transmittal of New Application 1 View
2001-01-05 SPEC Specification 12 View
2001-01-05 CLM Claims 2 View
2001-01-05 DRW Drawings-only black and white line drawings 3 View
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Quick Facts
App. No.
60/259,676
Filed
2001-01-05